scholarly journals A Fluidics-Based Double Flexural Membrane Piezoelectric Micromachined Ultrasonic Transducer (PMUT) for Wide-Bandwidth Underwater Acoustic Applications

Sensors ◽  
2021 ◽  
Vol 21 (16) ◽  
pp. 5582
Author(s):  
Khairul Azman Ahmad ◽  
Mohamad Faizal Abd Rahman ◽  
Khairu Anuar Mohamed Zain ◽  
Muhammad Naim Haron ◽  
Asrulnizam Abd Manaf
Keyword(s):  
Wide Spectrum ◽  
Ultrasonic Transducer ◽  
Center Frequency ◽  
Receiver Design ◽  
Wide Bandwidth ◽  
Element Analysis ◽  
Underwater Acoustic ◽  
Novel Structure ◽  
Backing Layer ◽  
Pulse Echo

In acoustic receiver design, the receiving sensitivity and bandwidth are two primary parameters that determine the performance of a device. The trade-off between sensitivity and bandwidth makes the design very challenging, meaning it needs to be fine-tuned to suit specific applications. The ability to design a PMUT with high receiving sensitivity and a wide bandwidth is crucial to allow a wide spectrum of transmitted frequencies to be efficiently received. This paper presents a novel structure involving a double flexural membrane with a fluidic backing layer based on an in-plane polarization mode to optimize both the receiving sensitivity and frequency bandwidth for medium-range underwater acoustic applications. In this structure, the membrane material and electrode configuration are optimized to produce good receiving sensitivity. Simultaneously, a fluidic backing layer is introduced into the double flexural membrane to increase the bandwidth. Several piezoelectric membrane materials and various electrode dimensions were simulated using finite element analysis (FEA) techniques to study the receiving performance of the proposed structure. The final structure was then fabricated based on the findings from the simulation work. The pulse–echo experimental method was used to characterize and verify the performance of the proposed device. The proposed structure was found to have an improved bandwidth of 56.6% with a receiving sensitivity of −1.8864 dB rel 1 V µPa. For the proposed device, the resonance frequency and center frequency were 600 and 662.5 kHz, respectively, indicating its suitability for the targeted frequency range.

scholarly journals PMMA-Based Wafer-Bonded Capacitive Micromachined Ultrasonic Transducer for Underwater Applications

Micromachines ◽  
2019 ◽  
Vol 10 (5) ◽  
pp. 319 ◽  
Author(s):  
Mansoor Ahmad ◽  
Ayhan Bozkurt ◽  
Omid Farhanieh
Keyword(s):  
Wafer Bonding ◽  
Sacrificial Layer ◽  
Ultrasonic Transducer ◽  
Center Frequency ◽  
Single Element ◽  
Element Analysis ◽  
Laboratory Equipment ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Dry Etch

This article presents a new wafer-bonding fabrication technique for Capacitive Micromachined Ultrasonic Transducers (CMUTs) using polymethyl methacrylate (PMMA). The PMMA-based single-mask and single-dry-etch step-bonding device is much simpler, and reduces process steps and cost as compared to other wafer-bonding methods and sacrificial-layer processes. A low-temperature (< 180 ∘ C ) bonding process was carried out in a purpose-built bonding tool to minimize the involvement of expensive laboratory equipment. A single-element CMUT comprising 16 cells of 2.5 mm radius and 800 nm cavity was fabricated. The center frequency of the device was set to 200 kHz for underwater communication purposes. Characterization of the device was carried out in immersion, and results were subsequently validated with data from Finite Element Analysis (FEA). Results show the feasibility of the fabricated CMUTs as receivers for underwater applications.

scholarly journals Wide Bandwidth Class-S Power Amplifiers for Ultrasonic Devices

Sensors ◽  
2020 ◽  
Vol 20 (1) ◽  
pp. 290 ◽  
Author(s):  
Kiheum You ◽  
Hojong Choi
Keyword(s):  
Power Amplifier ◽  
Power Amplifiers ◽  
Ultrasonic Transducer ◽  
Wide Frequency Range ◽  
Frequency Range ◽  
Wide Bandwidth ◽  
Class A ◽  
Ultrasonic Devices ◽  
Constant Output ◽  
Pulse Echo

Wide bandwidth ultrasonic devices are a necessity in high-resolution ultrasonic systems. Therefore, constant output voltages need to be produced across the wide bandwidths of a power amplifier. We present the first design of a wide bandwidth class-S power amplifier for ultrasonic devices. The −6 dB bandwidth of the developed class-S power amplifier was measured at 125.07% at 20 MHz, thus, offering a wide bandwidth for ultrasonic devices. Pulse-echo measurement is a performance measurement method used to evaluate the performance of ultrasonic transducers, components, or systems. The pulse-echo signals were obtained using an ultrasonic transducer with designed power amplifiers. In the pulse-echo measurements, time and frequency analyses were conducted to evaluate the bandwidth flatness of the power amplifiers. The frequency range of the ultrasonic transducer was measured and compared when using the developed class-S and commercial class-A power amplifiers with the same output voltages. The class-S power amplifiers had a relatively flat bandwidth (109.7 mV at 17 MHz, 112.0 mV at 20 MHz, and 109.5 mV at 23 MHz). When the commercial class-A power amplifier was evaluated under the same conditions, an uneven bandwidth was recorded (110.6 mV at 17 MHz, 111.5 mV at 20 MHz, and 85.0 mV at 23 MHz). Thus, we demonstrated that the designed class-S power amplifiers could prove useful for ultrasonic devices with a wide frequency range.

scholarly journals Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer

Sensors ◽  
2020 ◽  
Vol 20 (11) ◽  
pp. 3333
Author(s):  
Wei Liu ◽  
Dawei Wu
Keyword(s):  
Low Temperature ◽  
Polyvinylidene Fluoride ◽  
Adhesive Bonding ◽  
Ultrasonic Transducer ◽  
Wearable Devices ◽  
Center Frequency ◽  
Pvdf Film ◽  
Element Analysis ◽  
Acoustic Performance ◽  
Bonding Technique

This paper presents the development of a flexible piezoelectric micromachined ultrasonic transducer (PMUT) that can conform to flat, concave, and convex surfaces and work in air. The PMUT consists of an Ag-coated polyvinylidene fluoride (PVDF) film mounted onto a laser-manipulated polymer substrate. A low temperature (<100 °C) adhesive bonding technique is adopted in the fabrication process. Finite element analysis (FEA) is implemented to confirm the capability of predicting the resonant frequency of composite diaphragms and optimizing the device. The manufactured PMUT exhibits a center frequency of 198 kHz with a wide operational bandwidth. Its acoustic performance is demonstrated by transmitting and receiving ultrasound in air on curved surface. The conclusions from this study indicate the proposed PMUT has great potential in ultrasonic and wearable devices applications.

Design and Experiment of Capacitive Micromachined Ultrasonic Transducer Array for High-Frequency Underwater Imaging

2020 ◽  
Vol 13 ◽  
Author(s):  
Yuanyu Yu ◽  
Jiujiang Wang ◽  
Xin Liu ◽  
Sio Hang Pun ◽  
Weibao Qiu ◽  
...  
Keyword(s):  
Ultrasound Imaging ◽  
High Frequency ◽  
Ultrasonic Transducer ◽  
Center Frequency ◽  
Design Parameters ◽  
Underwater Imaging ◽  
Release Process ◽  
Steel Wires ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Frequency Ultrasound

Background:: Ultrasound is widely used in the applications of underwater imaging. Capacitive micromachined ultrasonic transducer (CMUT) is a promising candidate to the traditional piezoelectric ultrasonic transducer. In underwater ultrasound imaging, better resolutions can be achieved with a higher frequency ultrasound. Therefore, a CMUT array for high-frequency ultrasound imaging is proposed in this work. Methods:: Analytical methods are used to calculate the center frequency in water and the pull-in voltage for determining the operating point of CMUT. Finite element method model was developed to finalize the design parameters. The CMUT array was fabricated with a five-mask sacrificial release process. Results:: The CMUT array owned an immersed center frequency of 2.6 MHz with a 6 dB fractional bandwidth of 123 %. The pull-in voltage of the CMUT array was 85 V. An underwater imaging experiment was carried out with the target of three steel wires. Conclusion:: In this study, we have developed CMUT for high-frequency underwater imaging. The experiment showed that the CMUT can detect the steel wires with the diameter of 100 μm and the axial resolution was 0.582 mm, which is close to one wavelength of ultrasound in 2.6 MHz.

scholarly journals An Investigation of Silica Aerogel to Reduce Acoustic Crosstalk in CMUT Arrays

Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1459
Author(s):  
Varshitha Yashvanth ◽  
Sazzadur Chowdhury
Keyword(s):  
Silica Aerogel ◽  
Ultrasonic Transducer ◽  
Fluid Interface ◽  
Fractional Bandwidth ◽  
Neighboring Element ◽  
Element Analysis ◽  
Average Improvement ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Scholte Wave ◽  
Fea Simulation

This paper presents a novel technique to reduce acoustic crosstalk in capacitive micromachined ultrasonic transducer (CMUT) arrays. The technique involves fabricating a thin layer of diisocyanate enhanced silica aerogel on the top surface of a CMUT array. The silica aerogel layer introduces a highly nanoporous permeable layer to reduce the intensity of the Scholte wave at the CMUT-fluid interface. 3D finite element analysis (FEA) simulation in COMSOL shows that the developed technique can provide a 31.5% improvement in crosstalk reduction for the first neighboring element in a 7.5 MHz CMUT array. The average improvement of crosstalk level over the −6 dB fractional bandwidth was 22.1%, which is approximately 5 dB lower than that without an aerogel layer. The results are in excellent agreement with published experimental results to validate the efficacy of the new technique.

scholarly journals Some Studies on Forming Optimization with Genetic Algorithm

2012 ◽  
Vol 2 (2) ◽  
pp. 105-112
Author(s):  
Ganesh Marotrao KAKANDIKAR ◽  
Vilas M. NANDEDKAR
Keyword(s):  
Genetic Algorithm ◽  
Process Parameters ◽  
Wide Spectrum ◽  
Simulation Software ◽  
Flow Conditions ◽  
Element Analysis ◽  
Blank Holder ◽  
New Approach ◽  
Finite Element Analysis Simulation ◽  
Selection Of

Forming is a compression-tension process involving wide spectrum of operations and flow conditions. The result of the process depends on the large number of parameters and their interdependence. The selection of various parameters is still based on trial and error methods. In this paper the authors presents a new approach to optimize the geometry parameters of circular components, process parameters such as blank holder pressure and coefficient of friction etc. The optimization problem has been formulated with the objective of optimizing the maximum forming load required in Forming. Genetic algorithm is used for the optimization purpose to minimize the drawing load and to optimize the process parameters. A finite element analysis simulation software Fast Form Advanced is used for the validations of the results after optimization.

scholarly journals 10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

Sensors ◽  
2020 ◽  
Vol 20 (15) ◽  
pp. 4335
Author(s):  
Jeong Nyeon Kim ◽  
Tianning Liu ◽  
Thomas N. Jackson ◽  
Kyusun Choi ◽  
Susan Trolier-McKinstry ◽  
...  
Keyword(s):  
Finite Element ◽  
Lead Zirconate Titanate ◽  
Focal Length ◽  
Spectral Response ◽  
Guided Wave ◽  
Center Frequency ◽  
Depth Of Field ◽  
High Frequency Ultrasound ◽  
Pulse Echo ◽  
2D Array

Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr0.52Ti0.48O3 (PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to remove a PMUT from an underlying silicon (Si) substrate has enabled curved arrays to be readily formed. This research aimed to improve the design of flexible PMUT arrays using PZFlex, a finite element method software package. A 10 MHz PMUT 2D array working in 3-1 mode was designed. A circular unit-cell was structured from the top, with concentric layers of platinum (Pt)/PZT/Pt/titanium (Ti) on a polyimide (PI) substrate. Pulse-echo and spectral response analyses predicted a center frequency of 10 MHz and bandwidth of 87% under water load and air backing. A 2D array, consisting of the 256 (16 × 16) unit-cells, was created and characterized in terms of pulse-echo and spectral responses, surface displacement profiles, crosstalk, and beam profiles. The 2D array showed: decreased bandwidth due to protracted oscillation decay and guided wave effects; mechanical focal length at 2.9 mm; 3.7 mm depth of field for -6 dB; and -55.6 dB crosstalk. Finite element-based virtual prototyping identified figures of merit—center frequency, bandwidth, depth of field, and crosstalk—that could be optimized to design robust, flexible PMUT arrays.

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