scholarly journals Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers

Sensors ◽  
2020 ◽  
Vol 20 (6) ◽  
pp. 1736 ◽  
Author(s):  
Mingqiang Pan ◽  
Jun Sheng ◽  
Jizhu Liu ◽  
Zeming Shi ◽  
Lei Jiu
Keyword(s):  
Magnesium Oxide ◽  
Humidity Sensor ◽  
Fast Response ◽  
High Humidity ◽  
Response Signal ◽  
Humidity Sensors ◽  
Average Output ◽  
Important Indicator ◽  
Detection Range ◽  
Micro Arc Oxidation

Humidity detection range is an important indicator for measuring the performance of humidity sensors, but semiconductor humidity sensors often face the problems of narrow detection ranges and insufficient detection sensitivities. In this paper, a magnesium oxide (MgO) humidity sensor based on micro-arc oxidation (MAO) technology was designed to solve these problems by simultaneously using impedance and capacitance as the response signals, as well as by normalizing the output of the two signals. The experimental results showed that the average output of the micro-arc MgO ceramic film, with impedance as the response signal, could reach 150 in the low relative humidity(RH) range (11.3–67% RH), which was much higher than its sensitivity in the high humidity range (< 1), and the film showed fast response (13 s) and recovery (61 s). Under high humidity conditions (67–97.3% RH), with capacitance as the response signal, the output of the micro-arc MgO was as high as 120. Therefore, the micro-arc MgO humidity sensor with impedance, and the sensor with capacitance as the response signal, demonstrated good stability in low humidity and in high humidity environments, respectively, indicating that the method of selecting appropriate response signals for different humidity environments can be applied to extend the humidity detection range of sensing material, and to improve the humidity detection capability of a sensor.

High-performance humidity sensors from Ni(SO4)0.3(OH)1.4 nanobelts

Nanoscale ◽  
2014 ◽  
Vol 6 (12) ◽  
pp. 6521-6525 ◽  
Author(s):  
Ming Zhuo ◽  
Yuejiao Chen ◽  
Tao Fu ◽  
Haonan Zhang ◽  
Zhi Xu ◽  
...  
Keyword(s):  
High Performance ◽  
Humidity Sensor ◽  
High Sensitivity ◽  
Fast Response ◽  
Humidity Sensors ◽  
Term Stability ◽  
Long Term Stability

Ni(SO4)0.3(OH)1.4 nanobelts are utilized in a humidity sensor by a facile method. The nanobelt based sensor shows a high sensitivity, fast response and long-term stability in the sensing process.

Fast-response ionogel humidity sensor for real-time monitoring of breathing rate

2019 ◽  
Vol 3 (3) ◽  
pp. 484-491 ◽  
Author(s):  
Songhua Xiao ◽  
Jianxia Nie ◽  
Rou Tan ◽  
Xiaochuan Duan ◽  
Jianmin Ma ◽  
...  
Keyword(s):  
Ionic Liquids ◽  
Real Time ◽  
Humidity Sensor ◽  
Fast Response ◽  
Breathing Rate ◽  
Real Time Monitoring ◽  
Silica Network ◽  
Humidity Sensors ◽  
Human Breath

Ionogel-based chemoresistive humidity sensors have been successfully fabricated through ionothermal assembly of ionic liquids into a silica network, which exhibited superior humidity performances. Fast substantial impedance changes were observed with changing humidity for real-time monitoring of human breath.

Highly chemoresistive humidity sensing using poly(ionic liquid)s

2016 ◽  
Vol 52 (54) ◽  
pp. 8417-8419 ◽  
Author(s):  
Lingling Wang ◽  
Xiaochuan Duan ◽  
Wuyuan Xie ◽  
Qiuhong Li ◽  
Taihong Wang
Keyword(s):  
Ionic Liquid ◽  
Relative Humidity ◽  
High Performance ◽  
Humidity Sensor ◽  
High Sensitivity ◽  
Fast Response ◽  
Humidity Sensors ◽  
Humidity Sensing ◽  
Good Repeatability ◽  
Poly Ionic Liquid

A novel resistance type humidity sensor was fabricated using poly(ionic liquid)s, which exhibited high sensitivity, fast response, small hysteresis and good repeatability at a relative humidity (RH) in the range of 11–98%, making poly(ionic liquid)s as promising sensing materials for high-performance humidity sensors.

scholarly journals Low-Hysteresis and Fast Response Time Humidity Sensors Using Suspended Functionalized Carbon Nanotubes

Sensors ◽  
2019 ◽  
Vol 19 (3) ◽  
pp. 680 ◽  
Author(s):  
Shivaram Arunachalam ◽  
Ricardo Izquierdo ◽  
Frederic Nabki
Keyword(s):  
Carbon Nanotubes ◽  
Response Time ◽  
Humidity Sensor ◽  
Fast Response ◽  
Hysteresis Curve ◽  
Humidity Sensors ◽  
Fold Reduction ◽  
Stable Performance ◽  
Suspended Structure ◽  
Temperature Surface

A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s and a recovery time of 47 s, along with superior hysteresis and stable performance. The hysteresis curve area of the suspended structure is 3.6, a 3.2-fold reduction in comparison to the non-suspended structure. A comparative study between suspended and non-suspended devices highlights the advantages of using a suspended architecture.

scholarly journals Humidity Sensors with Shielding Electrode Under Interdigitated Electrode

Sensors ◽  
2019 ◽  
Vol 19 (3) ◽  
pp. 659 ◽  
Author(s):  
Hong Liu ◽  
Qi Wang ◽  
Wenjie Sheng ◽  
Xubo Wang ◽  
Kaidi Zhang ◽  
...  
Keyword(s):  
Humidity Sensor ◽  
High Sensitivity ◽  
Fast Response ◽  
Capacitive Sensors ◽  
Humidity Sensors ◽  
Interdigitated Electrode ◽  
Response Recovery ◽  
Chip Fabrication ◽  
Good Agreement ◽  
Capacitive Humidity Sensor

Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to the shielding electrode, this humidity sensor combines the high sensitivity of parallel plate capacitive sensors and the fast response of interdigitated electrode capacitive sensors. We use COMSOL Multiphysics to design and optimize the SIDE structure. The experimental data show very good agreement with the simulation. The sensitivity of the SIDE sensor is 0.0063% ± 0.0002% RH. Its response/recovery time is 20 s/22 s. The maximum capacitance drift under different relative humidity is 1.28% RH.

scholarly journals Nonporous Inorganic Nanoparticle-Based Humidity Sensor: Evaluation of Humidity Hysteresis and Response Time

Sensors ◽  
2020 ◽  
Vol 20 (14) ◽  
pp. 3858
Author(s):  
Shinya Kano ◽  
Harutaka Mekaru
Keyword(s):  
Response Time ◽  
Humidity Sensor ◽  
Silica Nanoparticle ◽  
Fast Response ◽  
Inorganic Nanoparticles ◽  
Humidity Sensors ◽  
Inorganic Nanoparticle ◽  
Response Recovery ◽  
Recovery Times ◽  
Nanoparticle Film

Fast-response humidity sensors using nanomaterials are attractive and have been intensively studied. Among the various nanomaterials, nonporous inorganic nanoparticles are suitable for use in humidity sensitive films for sensors. Here, we focus on a nonporous inorganic nanoparticle film and investigate a humidity sensor using the film. Hysteresis error and a dynamic response to a change of humidity are fundamental specifications of humidity sensors. A humidity sensor using a 50 nm silica nanoparticle film shows a hysteresis error of 2% at 85% RH and a response/recovery time of 2.8/2.3 s in 30% RH to 70% RH. We also summarize response/recovery times and hysteresis errors of state-of-the-art humidity sensors. As compared to those of commercial sensors and porous nanoparticle-based sensors evaluated using saturated salt solutions, the fabricated sensor shows a comparative hysteresis error and shorter response time.

scholarly journals High Sensitivity and High Stability QCM Humidity Sensors Based on Polydopamine Coated Cellulose Nanocrystals/Graphene Oxide Nanocomposite

Nanomaterials ◽  
2020 ◽  
Vol 10 (11) ◽  
pp. 2210
Author(s):  
Yao Yao ◽  
Xianhe Huang ◽  
Qiao Chen ◽  
Zhen Zhang ◽  
Weiwei Ling
Keyword(s):  
Graphene Oxide ◽  
High Stability ◽  
Humidity Sensor ◽  
High Sensitivity ◽  
Fast Response ◽  
Dynamic Resistance ◽  
Sensitive Material ◽  
Detection Range ◽  
Response And Recovery ◽  
Humidity Range

In this paper, a high sensitivity and high stability quartz crystal microbalance (QCM) humidity sensor using polydopamine (PDA) coated cellulose nanocrystal (CNC)/graphene oxide (GO) (PDA@CNC/GO) nanocomposite as sensitive material is demonstrated. The PDA@CNC was prepared by the self-polymerization action on the surface of CNC, and it acted as filler material to form functional nanocomposite with GO. The material characteristics of PDA@CNC, CNC/GO and PDA@CNC/GO were analyzed by transmission electron microscope (TEM) and Fourier transform infrared spectroscopy (FTIR), respectively. The experimental results show that the introduction of PDA@CNC into GO film not only effectively enhanced the sensitivity of GO-based nanocomposite-coated QCM sensor but also significantly maintained high stability in the entire humidity range. The PDA@CNC/GO30-coated QCM humidity sensor exhibited a superior response sensitivity up to 54.66 Hz/% relative humidity (RH), while the change rate of dynamic resistance of the sensor in the humidity range of 11.3–97.3% RH is only 14% that is much smaller than that of CNC/GO-coated QCM. Besides, the effect of the PDA@CNC content on the sensitivity and stability of GO-based nanocomposite-coated QCM humidity was also studied. Moreover, other performances of PDA@CNC/GO-coated QCM humidity sensor, including humidity hysteresis, fast response and recovery and long-term stability, were systematically investigated. This work suggests that PDA@CNC/GO nanocomposite is a promising candidate material for realizing high sensitivity and high stability QCM humidity sensor in the entire humidity detection range.

scholarly journals Dual-mode humidity detection using a lanthanide-based metal–organic framework: towards multifunctional humidity sensors

2017 ◽  
Vol 53 (32) ◽  
pp. 4465-4468 ◽  
Author(s):  
Yuan Gao ◽  
Pengtao Jing ◽  
Ning Yan ◽  
Michiel Hilbers ◽  
Hong Zhang ◽  
...  
Keyword(s):  
Impedance Spectroscopy ◽  
Humidity Sensor ◽  
Metal Organic Framework ◽  
Dual Mode ◽  
Humidity Sensors ◽  
Highly Effective ◽  
Metal Organic ◽  
Spectroscopy Studies ◽  
Organic Framework

Combined photoluminescence and impedance spectroscopy studies show that a europium-based metal–organic framework behaves as a highly effective and reliable humidity sensor, enabling dual-mode humidity detection.

scholarly journals Tin Disulfide-Coated Microfiber for Humidity Sensing with Fast Response and High Sensitivity

Crystals ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 648
Author(s):  
Aijie Liang ◽  
Jingyuan Ming ◽  
Wenguo Zhu ◽  
Heyuan Guan ◽  
Xinyang Han ◽  
...  
Keyword(s):  
Humidity Sensor ◽  
Small Diameter ◽  
High Sensitivity ◽  
Large Change ◽  
Small Variation ◽  
Response Speed ◽  
Fast Response ◽  
Tin Disulfide ◽  
Recovery Times ◽  
Response And Recovery

Breath monitoring is significant in assessing human body conditions, such as cardiac and pulmonary symptoms. Optical fiber-based sensors have attracted much attention since they are immune to electromagnetic radiation, thus are safe for patients. Here, a microfiber (MF) humidity sensor is fabricated by coating tin disulfide (SnS2) nanosheets onto the surface of MF. The small diameter (~8 μm) and the long length (~5 mm) of the MF promise strong interaction between guiding light and SnS2. Thus, a small variation in the relative humidity (RH) will lead to a large change in optical transmitted power. A high RH sensitivity of 0.57 dB/%RH is therefore achieved. The response and recovery times are estimated to be 0.08 and 0.28 s, respectively. The high sensitivity and fast response speed enable our SnS2-MF sensor to monitor human breath in real time.

scholarly journals A Full-Range Flexible and Printed Humidity Sensor Based on a Solution-Processed P(VDF-TrFE)/Graphene-Flower Composite

Nanomaterials ◽  
2021 ◽  
Vol 11 (8) ◽  
pp. 1915
Author(s):  
Shenawar Ali Khan ◽  
Muhammad Saqib ◽  
Muhammad Muqeet Rehman ◽  
Hafiz Mohammad Mutee Ur Rehman ◽  
Sheik Abdur Rahman ◽  
...  
Keyword(s):  
Active Layer ◽  
Humidity Sensor ◽  
High Reliability ◽  
Full Range ◽  
High Sensitivity ◽  
Fast Response ◽  
Considerable Change ◽  
Relative Humidity Range ◽  
Response And Recovery ◽  
Proportional Relationship

A novel composite based on a polymer (P(VDF-TrFE)) and a two-dimensional material (graphene flower) was proposed as the active layer of an interdigitated electrode (IDEs) based humidity sensor. Silver (Ag) IDEs were screen printed on a flexible polyethylene terephthalate (PET) substrate followed by spin coating the active layer of P(VDF-TrFE)/graphene flower on its surface. It was observed that this sensor responds to a wide relative humidity range (RH%) of 8–98% with a fast response and recovery time of 0.8 s and 2.5 s for the capacitance, respectively. The fabricated sensor displayed an inversely proportional response between capacitance and RH%, while a directly proportional relationship was observed between its impedance and RH%. P(VDF-TrFE)/graphene flower-based flexible humidity sensor exhibited high sensitivity with an average change of capacitance as 0.0558 pF/RH%. Stability of obtained results was monitored for two weeks without any considerable change in the original values, signifying its high reliability. Various chemical, morphological, and electrical characterizations were performed to comprehensively study the humidity-sensing behavior of this advanced composite. The fabricated sensor was successfully used for the applications of health monitoring and measuring the water content in the environment.

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