scholarly journals Humidity Sensors with Shielding Electrode Under Interdigitated Electrode

Sensors ◽  
2019 ◽  
Vol 19 (3) ◽  
pp. 659 ◽  
Author(s):  
Hong Liu ◽  
Qi Wang ◽  
Wenjie Sheng ◽  
Xubo Wang ◽  
Kaidi Zhang ◽  
...  

Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to the shielding electrode, this humidity sensor combines the high sensitivity of parallel plate capacitive sensors and the fast response of interdigitated electrode capacitive sensors. We use COMSOL Multiphysics to design and optimize the SIDE structure. The experimental data show very good agreement with the simulation. The sensitivity of the SIDE sensor is 0.0063% ± 0.0002% RH. Its response/recovery time is 20 s/22 s. The maximum capacitance drift under different relative humidity is 1.28% RH.

Nanoscale ◽  
2014 ◽  
Vol 6 (12) ◽  
pp. 6521-6525 ◽  
Author(s):  
Ming Zhuo ◽  
Yuejiao Chen ◽  
Tao Fu ◽  
Haonan Zhang ◽  
Zhi Xu ◽  
...  

Ni(SO4)0.3(OH)1.4 nanobelts are utilized in a humidity sensor by a facile method. The nanobelt based sensor shows a high sensitivity, fast response and long-term stability in the sensing process.


2016 ◽  
Vol 52 (54) ◽  
pp. 8417-8419 ◽  
Author(s):  
Lingling Wang ◽  
Xiaochuan Duan ◽  
Wuyuan Xie ◽  
Qiuhong Li ◽  
Taihong Wang

A novel resistance type humidity sensor was fabricated using poly(ionic liquid)s, which exhibited high sensitivity, fast response, small hysteresis and good repeatability at a relative humidity (RH) in the range of 11–98%, making poly(ionic liquid)s as promising sensing materials for high-performance humidity sensors.


2018 ◽  
Vol 6 (12) ◽  
pp. 5016-5024 ◽  
Author(s):  
Seo Yun Park ◽  
Yeon Hoo Kim ◽  
Seon Yong Lee ◽  
Woonbae Sohn ◽  
Jung Eun Lee ◽  
...  

Sensors based on 2D rGO/2D MoS2 van der Waals hybrid composites exhibited high sensitivity, extreme selectivity, fast response/recovery, and good reliability to humidity detection.


Sensors ◽  
2021 ◽  
Vol 21 (15) ◽  
pp. 5118
Author(s):  
Zhenyu Wei ◽  
Jianqiu Huang ◽  
Wenhao Chen ◽  
Qingan Huang

Porous polytetrafluoroethylene (PTFE) is physically flexible, thermally and chemically stable, relatively inexpensive, and commercially available. It is attractive for various flexible sensors. This paper has studied flexible capacitive humidity sensors fabricated on porous PTFE substrates. Graphene oxide (GO) was used as a sensing material, both hydrophobic and hydrophilic porous PTFE as the substrates, and interdigitated electrodes on the PTFE substrates were screen-printed. SEM and Raman spectrum were utilized to characterize GO and PTFE. An ethanol soak process is developed to increase the yield of the humidity sensors based on hydrophobic porous PTFE substrates. Static and dynamic properties of these sensors are tested and analyzed. It demonstrates that the flexible capacitive humidity sensors fabricated on the ethanol-treated hydrophobic PTFE exhibit high sensitivity, small hysteresis, and fast response/recovery time.


Sensors ◽  
2020 ◽  
Vol 20 (14) ◽  
pp. 3858
Author(s):  
Shinya Kano ◽  
Harutaka Mekaru

Fast-response humidity sensors using nanomaterials are attractive and have been intensively studied. Among the various nanomaterials, nonporous inorganic nanoparticles are suitable for use in humidity sensitive films for sensors. Here, we focus on a nonporous inorganic nanoparticle film and investigate a humidity sensor using the film. Hysteresis error and a dynamic response to a change of humidity are fundamental specifications of humidity sensors. A humidity sensor using a 50 nm silica nanoparticle film shows a hysteresis error of 2% at 85% RH and a response/recovery time of 2.8/2.3 s in 30% RH to 70% RH. We also summarize response/recovery times and hysteresis errors of state-of-the-art humidity sensors. As compared to those of commercial sensors and porous nanoparticle-based sensors evaluated using saturated salt solutions, the fabricated sensor shows a comparative hysteresis error and shorter response time.


Crystals ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 648
Author(s):  
Aijie Liang ◽  
Jingyuan Ming ◽  
Wenguo Zhu ◽  
Heyuan Guan ◽  
Xinyang Han ◽  
...  

Breath monitoring is significant in assessing human body conditions, such as cardiac and pulmonary symptoms. Optical fiber-based sensors have attracted much attention since they are immune to electromagnetic radiation, thus are safe for patients. Here, a microfiber (MF) humidity sensor is fabricated by coating tin disulfide (SnS2) nanosheets onto the surface of MF. The small diameter (~8 μm) and the long length (~5 mm) of the MF promise strong interaction between guiding light and SnS2. Thus, a small variation in the relative humidity (RH) will lead to a large change in optical transmitted power. A high RH sensitivity of 0.57 dB/%RH is therefore achieved. The response and recovery times are estimated to be 0.08 and 0.28 s, respectively. The high sensitivity and fast response speed enable our SnS2-MF sensor to monitor human breath in real time.


Nanomaterials ◽  
2021 ◽  
Vol 11 (8) ◽  
pp. 1915
Author(s):  
Shenawar Ali Khan ◽  
Muhammad Saqib ◽  
Muhammad Muqeet Rehman ◽  
Hafiz Mohammad Mutee Ur Rehman ◽  
Sheik Abdur Rahman ◽  
...  

A novel composite based on a polymer (P(VDF-TrFE)) and a two-dimensional material (graphene flower) was proposed as the active layer of an interdigitated electrode (IDEs) based humidity sensor. Silver (Ag) IDEs were screen printed on a flexible polyethylene terephthalate (PET) substrate followed by spin coating the active layer of P(VDF-TrFE)/graphene flower on its surface. It was observed that this sensor responds to a wide relative humidity range (RH%) of 8–98% with a fast response and recovery time of 0.8 s and 2.5 s for the capacitance, respectively. The fabricated sensor displayed an inversely proportional response between capacitance and RH%, while a directly proportional relationship was observed between its impedance and RH%. P(VDF-TrFE)/graphene flower-based flexible humidity sensor exhibited high sensitivity with an average change of capacitance as 0.0558 pF/RH%. Stability of obtained results was monitored for two weeks without any considerable change in the original values, signifying its high reliability. Various chemical, morphological, and electrical characterizations were performed to comprehensively study the humidity-sensing behavior of this advanced composite. The fabricated sensor was successfully used for the applications of health monitoring and measuring the water content in the environment.


2019 ◽  
Vol 3 (3) ◽  
pp. 484-491 ◽  
Author(s):  
Songhua Xiao ◽  
Jianxia Nie ◽  
Rou Tan ◽  
Xiaochuan Duan ◽  
Jianmin Ma ◽  
...  

Ionogel-based chemoresistive humidity sensors have been successfully fabricated through ionothermal assembly of ionic liquids into a silica network, which exhibited superior humidity performances. Fast substantial impedance changes were observed with changing humidity for real-time monitoring of human breath.


Nanomaterials ◽  
2021 ◽  
Vol 11 (12) ◽  
pp. 3368
Author(s):  
Huangping Yan ◽  
Zilu Chen ◽  
Linyuan Zeng ◽  
Zijun Wang ◽  
Gaofeng Zheng ◽  
...  

The development of a flexible and high-performance humidity sensor is essential to expand its new applications, such as personal health monitoring and early diagnosis. In this work, SnO2/rGO nanocomposites were prepared by one-step hydrothermal method. The effect of rGO-doping on humidity sensing performance was investigated. Scanning electron microscopy, transmission electron microscopy, X-ray diffraction and Raman spectroscopy were used to characterize the nanostructure, morphology and chemical composition of SnO2/rGO nanocomposites. The SnO2/rGO humidity sensitive film was prepared by electrospinning on a polyimide film modified with gold electrodes. The humidity test results show that different doping ratios of rGO have different effects on humidity sensing properties. Among them, the sensor with 2 wt% rGO-doping has a high sensitivity (37,491.2%) within the humidity range as well as the fast response time (80 s) and recover time (4 s). Furthermore, the sensor with 2 wt% rGO-doping remains good flexibility and stability in the case of bending (1000 times). The sensitivity of the 2 wt% rGO-doping sensor at the bending radius (8 mm and 4 mm) is 48,219% and 91,898%, respectively. More importantly, the sensor could reflect different breathing states clearly and track breathing intervals as short as 3 s. The SnO2/rGO flexible humidity sensor with accuracy, flexibility and instantaneity as well as the facile fabrication strategy is conceivable to be applied in the potential application for human health real-time monitoring.


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