scholarly journals Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor

Sensors ◽  
2020 ◽  
Vol 20 (3) ◽  
pp. 626
Author(s):  
Feng Xu ◽  
Yuliang Wei ◽  
Shiyuan Bian ◽  
Huanqin Wang ◽  
Da-Ren Chen ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Interaction Model ◽  
Film Structure ◽  
Width Ratio ◽  
Mass Sensor ◽  
Design And Optimization ◽  
Mass Sensors ◽  
Aerosol Mass ◽  
Gas Damping ◽  
Micro Cantilever

Micro-Cantilever (MCL) is a thin film structure that is applied for aerosol particle mass sensing. Several modifications to the rectangular MCL (length-to-width ratio, slots at the anchor, serrations at its side edges) are made to deduce the role and influence of the shape of rectangular MCL-based aerosol mass sensors and reduce gas damping. A finite element fluid-structure interaction model was used to investigate the performance of MCL. It is found that (I) the mass sensitivity and quality factor decline with the increasing of length-to-width ratio which alters the resonant frequency of the MCL. The optimum conditions, including the length-to-width ratio (σlw = 5) and resonant frequency (f0 = 540.7 kHz) of the MCL, are obtained with the constant surface area (S = 45,000 μm2) in the frequency domain ranging from 0 to 600 kHz. (II) The slots can enhance the read-out signal and bring a small Q factor drop. (III) The edge serrations on MCL significantly reduce the gas damping. The results provide a reference for the design of aerosol mass sensor, which makes it possible to develop aerosol mass sensor with high frequency, sensitivity, and quality.

Vibration Analysis of Single Walled Boron Nitride Nanotube Based Nanoresonators

2012 ◽  
Vol 3 (3) ◽  
Author(s):  
Mitesh B. Panchal ◽  
S. H. Upadhyay ◽  
S. P. Harsha
Keyword(s):  
Boron Nitride ◽  
Resonant Frequency ◽  
Continuum Mechanics ◽  
Boron Nitride Nanotubes ◽  
Response Analysis ◽  
Published Data ◽  
Boron Nitride Nanotube ◽  
Mass Sensor ◽  
Nanomechanical Resonators ◽  
Mass Sensitivity

In this paper, the vibration response analysis of single walled boron nitride nanotubes (SWBNNTs) treated as thin walled tube has been done using finite element method (FEM). The resonant frequencies of fixed-free SWBNNTs have been investigated. The analysis explores the resonant frequency variations as well as the resonant frequency shift of the SWBNNTs caused by the changes in size of BNNTs in terms of length as well as the attached masses. The performance of cantilevered SWBNNT mass sensor is also analyzed based on continuum mechanics approach and compared with the published data of single walled carbon nanotube (SWCNT) for fixed-free configuration as a mass sensor. As a systematic analysis approach, the simulation results based on FEM are compared with the continuum mechanics based analytical approach and are found to be in good agreement. It is also found that the BNNT cantilever biosensor has better response and sensitivity compared to the CNT as a counterpart. Also, the results indicate that the mass sensitivity of cantilevered boron nitride nanotube nanomechanical resonators can reach 10−23 g and the mass sensitivity increases when smaller size nanomechanical resonators are used in mass sensors.

Nonlinear Behavior of a Parametric Resonance-Based Mass Sensor

2002 ◽  
Author(s):  
Wenhua Zhang ◽  
Rajashree Baskaran ◽  
Kimberly L. Turner
Keyword(s):  
Parametric Resonance ◽  
Mathieu Equation ◽  
Nonlinear Behavior ◽  
High Sensitivity ◽  
Small Mass ◽  
Mass Change ◽  
Mass Sensor ◽  
Mass Sensors ◽  
Mems Oscillator ◽  
Harmonic Resonance

The ability to detect mass change of the order of femtograms (10e-15g) opens up implementations of various precise chemical and biological sensors. Micro-scale oscillator based mass sensors are promising due to their small mass and high sensitivity. Many such sensors detect mass change by measuring the shift of natural frequency. We have reported previous work introducing the idea of using parametric resonance to detect mass change. This method utilizes stability behavior with mass variation as the detection criterion and high sensitivity is expected. This paper presents theoretical and experimental research on nonlinearity effects on the dynamic behavior of a MEMS oscillator, which is the prototype of such a mass sensor. A Duffing equation and a nonlinear Mathieu equation are used to model the behavior of nonlinear harmonic resonance and parametric resonance. Experimental results agree with the theoretical analysis very well. Some bulk equivalent parameters, such as Q factor, cubic stiffness and linear electrostatic stiffness can be estimated by studying the nonlinear behavior. The estimation of the parameters is important for design of the optimal mass sensor. The potential effects of nonlinearity on mass sensor application are discussed.

scholarly journals Sensitivity of Micro Cantilever Mass Sensor Transduced by PZT Film

2007 ◽  
Vol 127 (3) ◽  
pp. 126-130 ◽  
Author(s):  
Jian Lu ◽  
Tsuyoshi Ikehara ◽  
Mitsuo Konno ◽  
Ryutaro Maeda ◽  
Takashi Mihara
Keyword(s):  
Mass Sensor ◽  
Pzt Film ◽  
Micro Cantilever

scholarly journals Design and Optimization of a Low-Resonant-Frequency Piezoelectric MEMS Energy Harvester Based on Artificial Intelligence

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 930 ◽  
Author(s):  
Seyedfakhreddin Nabavi ◽  
Lihong Zhang
Keyword(s):  
Neural Network ◽  
Artificial Intelligence ◽  
Resonant Frequency ◽  
Deep Neural Network ◽  
Energy Harvester ◽  
Vibration Energy Harvester ◽  
Design And Optimization ◽  
Speed Up ◽  
Operational Frequency ◽  
Piezoelectric Mems

In this study we propose a piezoelectric MEMS vibration energy harvester with the capability of oscillating at low (i.e., less than 200 Hz) resonant frequency. The mechanical structure of the proposed harvester is comprised of a doubly clamped cantilever with a serpentine pattern associated with several discrete masses. In order to obtain the optimal physical aspects of the harvester and speed up the design process, we have utilized a deep neural network, as an artificial intelligence (AI) method. Firstly, the deep neural network was trained with 108 data samples gained from finite element modeling (FEM). Then this trained network was integrated with the genetic algorithm (GA) to optimize geometry of the harvester to enhance its performance in terms of resonant frequency and generated voltage. Our numerical results confirm that the accuracy of the network in prediction is above 90%. Consequently, by taking advantage of this efficient AI-based performance estimator, the GA is able to reduce the device operational frequency from 169 Hz to 110.5 Hz and increase its efficiency on harvested voltage from 2.5 V to 3.4 V under 0.25 g excitation.

Fabrication of Diamond Based Quartz Crystal Microbalance Gas Sensor

2014 ◽  
Vol 605 ◽  
pp. 589-592 ◽  
Author(s):  
Marián Varga ◽  
Alexandr Laposa ◽  
Pavel Kulha ◽  
Marina Davydova ◽  
Jiri Kroutil ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Quartz Crystal Microbalance ◽  
Room Temperature ◽  
Quartz Crystal ◽  
Microwave Plasma ◽  
Natural Diamond ◽  
Chemical Vapor ◽  
Mass Sensor ◽  
Mass Sensors ◽  
Optical Mirrors

Synthetic diamond has remarkable properties comparable with natural diamond and hence is a very promising material for many various applications (sensors, heat sink, optical mirrors, cold cathode, tissue engineering, etc.). Nowadays, deposition of diamond films is normally employed in chemical vapor deposition (CVD) usually at high temperatures (800900 °C), what limit its application to high melting substrates. Gravimetric (mass) sensors belong to the major categories of chemical sensors and the most common type of mass sensor is the bulk acoustic quartz crystal microbalance (QCM). This contribution deals with a nanocrystalline diamond (NCD) growth from the H2/CH4/CO2gas mixture at low temperature (400 °C) by pulsed linear antenna microwave plasma system on 10 MHz circular AT-cut quartz resonators substrate. Gas sensor based on the NCD-coated QCM was developed for detection of ammonia (NH3) at room temperature. Measurements not only confirmed the functionality of this first published NCD-coated QCM sensor, but in addition its sensitivity was twofold to a virgin QCM sensor with a gold active layer.

An Extensive Review of Nanotubes Based Mass-Sensors

2021 ◽  
Author(s):  
Dinesh Deshwal ◽  
Anil Kumar Narwal
Keyword(s):  
Boron Nitride Nanotubes ◽  
Biological Applications ◽  
Mass Sensor ◽  
Mass Sensing ◽  
Electromechanical Systems ◽  
Nanomechanical Resonators ◽  
Mass Sensors ◽  
Sensing Applications ◽  
Chemical Inertness ◽  
Non Linear

Abstract Sensors have tremendous demand in Industry because of their properties like sensitiveness, responsiveness, stability, selectiveness, and cost-effectiveness. Therefore, it is a dire need to develop advanced sensing materials and technologies. With the rapid advancement in micro and nanotechnologies in Micro-electromechanical Systems/ Nano-electromechanical Systems (MEMS/NEMS), more emphasis has to develop micro and nanomechanical resonators, having great interest for engineering fields. When MEMS/NEMS resonators are used for advancement in sensors, then they could perform both detection and sensing. Both BNNT and CNT are the strongest lightweight nanomaterials used for mass sensing applications. BNNT contradict to CNT have nontoxic property towards health and environment because of its structural stability and chemical inertness, which makes it more suitable for biological applications. From various studies, the conclusion comes out that the non-linear dynamic behavior of Boron Nitride Nanotubes-based mass sensors has not yet been explored. It is required strongly to study the non-linear conduct of BNNT for designing a better performing mass sensor.

Design and optimization of a MEMS quartz mass sensor array for biosensing

2017 ◽  
Author(s):  
Ahmad Anwar Zainuddin ◽  
Anis Nurashikin Nordin ◽  
Aliza Aini Md Ralib ◽  
Rosminazuin Ab Rahim ◽  
Sheroz Khan ◽  
...  
Keyword(s):  
Sensor Array ◽  
Mass Sensor ◽  
Design And Optimization

A Silicon Resonant Micro-Cantilever Biosensor with Closed-Loop Self-Excitation System for Biomacromolecular Detection

2014 ◽  
Vol 1030-1032 ◽  
pp. 2320-2325
Author(s):  
Long Fei Ma ◽  
Guo Yin Huang ◽  
Ming Yuan Guan ◽  
Yong Huang ◽  
Guo Wei Shi ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Closed Loop ◽  
Detection System ◽  
Mass Effect ◽  
Experimental Result ◽  
Excitation System ◽  
Cantilever Sensors ◽  
Order Of Magnitude ◽  
Equivalent Mass ◽  
Micro Cantilever

A silicon resonant micro-cantilever biosensor was introduced to detect biomacromolecular based on the relationship between the cantilever resonant frequency and the cantilever equivalent mass. A closed-loop self-excitation system was designed to acquire the resonant frequency of micro-cantilever. Two groups of resonant micro-cantilever sensors with different resonant frequencies of 18.192 kHz and 17.688 kHz respectively were tested. The result showed that the detection system can automatically search the resonant frequency of micro-cantilever and locked quickly. To demonstrate the feasibility of this approach, human immunoglobulin G(IgG) as model target biomacromolecular was employed, different concentration of IgG was detected by the resonant micro-cantilever sensors, the mass effect of micro-cantilever was adept and the micro-cantilever was drive by closed-loop circuit. The linearity of micro-cantilever biosensor was very well and the experimental result of sensitivity of micro-cantilever biosensor was about 6.6×106. All the results showed that sensitivity of the presented immunoassay significantly increased by one-order of magnitude and offered great application promises in providing a sensitive, specific, and potent method for real-time detection of biological detection.

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