scholarly journals Influence of the Metal Film of Micro-cantilever Fabricated by Photolithographical Technique on the Mechanical Resonant Frequency.

1997 ◽  
Vol 51 (5) ◽  
pp. 733-736
Author(s):  
Akio Kuroe ◽  
Akio Murata ◽  
Sayuri Muramatsu ◽  
Kazuo Yokoyama ◽  
Osamu Kusumoto
Keyword(s):  
Resonant Frequency ◽  
Metal Film ◽  
Mechanical Resonant Frequency ◽  
Micro Cantilever

A Silicon Resonant Micro-Cantilever Biosensor with Closed-Loop Self-Excitation System for Biomacromolecular Detection

2014 ◽  
Vol 1030-1032 ◽  
pp. 2320-2325
Author(s):  
Long Fei Ma ◽  
Guo Yin Huang ◽  
Ming Yuan Guan ◽  
Yong Huang ◽  
Guo Wei Shi ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Closed Loop ◽  
Detection System ◽  
Mass Effect ◽  
Experimental Result ◽  
Excitation System ◽  
Cantilever Sensors ◽  
Order Of Magnitude ◽  
Equivalent Mass ◽  
Micro Cantilever

A silicon resonant micro-cantilever biosensor was introduced to detect biomacromolecular based on the relationship between the cantilever resonant frequency and the cantilever equivalent mass. A closed-loop self-excitation system was designed to acquire the resonant frequency of micro-cantilever. Two groups of resonant micro-cantilever sensors with different resonant frequencies of 18.192 kHz and 17.688 kHz respectively were tested. The result showed that the detection system can automatically search the resonant frequency of micro-cantilever and locked quickly. To demonstrate the feasibility of this approach, human immunoglobulin G(IgG) as model target biomacromolecular was employed, different concentration of IgG was detected by the resonant micro-cantilever sensors, the mass effect of micro-cantilever was adept and the micro-cantilever was drive by closed-loop circuit. The linearity of micro-cantilever biosensor was very well and the experimental result of sensitivity of micro-cantilever biosensor was about 6.6×106. All the results showed that sensitivity of the presented immunoassay significantly increased by one-order of magnitude and offered great application promises in providing a sensitive, specific, and potent method for real-time detection of biological detection.

scholarly journals See Atoms in Motion!

1996 ◽  
Vol 4 (1) ◽  
pp. 3-4
Author(s):  
Stephen W. Carmichael
Keyword(s):  
Resonant Frequency ◽  
Atomic Force Microscope ◽  
Ultrahigh Vacuum ◽  
Atomic Motion ◽  
Atomic Resolution ◽  
Atomic Force ◽  
Silicon Cantilever ◽  
Mechanical Resonant Frequency ◽  
Reconstructed Surface ◽  
Stiff Spring

It is impressive enough that individual atoms can be resolved with the atomic force microscope (AFM), but who would have thought that atomic motion would be detected so soon? Atomic resolution with the AFM was only recently achieved. As reported in this column, Franz Giessibl was able to demonstrate local resolution of adatoms of the Si(111) 7×7 reconstructed surface. Now, Yasuhiro Sugawara. Masahiro Ohta, Hitoshi Ueyama, and Seizo Morita of Hiroshima University have demonstrated atomic resolution of the surface of InP(110). Not only that, but images taken about one minute apart show that some of the atoms had moved! Sugawara et al, used a very compact AFM under ultrahigh vacuum (4 X 10-8 Pa) to accomplish this impressive feat. A stiff (spring constant of 34 N/m) silicon cantilever was used. This stiffness, along with a mechanical resonant frequency of 151 kHz, was used to keep the cantilever from jumping onto the sample and crushing the initially sharp tip.

scholarly journals Tunable high-Q SAW resonator loaded on a changing capacitance

2020 ◽  
Vol 10 (01n02) ◽  
pp. 2060009
Author(s):  
G. Ya. Karapetyan ◽  
V. E. Kaydashev ◽  
M. E. Kutepov ◽  
T. A. Minasyan ◽  
V. A. Kalinin ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Resonant Frequency ◽  
Metal Film ◽  
Frequency Range ◽  
Frequency Shifts ◽  
Linear Character ◽  
High Q ◽  
Bulk Waves ◽  
Working Frequency

A tunable high-Q surface acoustic wave (SAW) resonator in the form of several parallel-connected interdigital transducers loaded on a varying capacitance on lithium niobate substrates was developed and studied. The working frequency range was 90–2450[Formula: see text]MHz. A method of calculating such resonators, considering losses in the metal film as well as losses due to the propagation of SAWs and transformations into bulk waves is proposed. Such a design allows one to obtain a quality factor over 5000 in the frequency range 2400–2483[Formula: see text]MHz. The resonant frequency shifts by 600[Formula: see text]kHz when the capacitance changes by [Formula: see text]% of the value of 21[Formula: see text]pF (or 32[Formula: see text]ppm/pF) and has an almost linear character.

Micro Cantilever CO2 Gas Sensor Based on Mass

2015 ◽  
Vol 766-767 ◽  
pp. 528-533
Author(s):  
S. Subhashini ◽  
A. Vimala Juliet
Keyword(s):  
Residual Stresses ◽  
Resonant Frequency ◽  
Natural Frequency ◽  
Low Cost ◽  
High Sensitivity ◽  
The Other ◽  
Sensitive Coating ◽  
Metal Oxide Layer ◽  
Micro Cantilever

Sensors had gained importance in all fields of science and technology and development of real time small devices with high sensitivity for in situ measurements at low cost has gained momentum. Micromachined cantilever provides a solution to this hunt. MEMS cantilever are the simplest of all the other mechanical structures and hence is considered for the ease of fabrication. Here a chemical CO2 sensor is considered with the metal oxide layer as receptor to adsorb the CO2 molecules leading to an increase in mass and microcantilever as the transducer part converting the change in mass to change in natural frequency. The sensitive SnO2 layer increases the mass and hence decreases the resonant frequency. The inherent natural frequency of the cantilever is altered by the sensitive coating on top of the beam and the residual stresses present on the structure. In this paper, we investigate the SiO2 cantilever with SnO2 deposited on the top surface. Initially the microcantilever is analytically modelled and then is fabricated and characterized experimentally. Finally the error % is analysed between the analytical model and experimental results.

TUNING THE RESONANT FREQUENCIES OF FLEXURE MODE FLEXOELECTRIC PIEZOELECTRIC COMPOSITES

2011 ◽  
Vol 01 (01) ◽  
pp. 53-56 ◽  
Author(s):  
BAOJIN CHU ◽  
WENYI ZHU ◽  
MINGJIN CHU ◽  
NAN LI ◽  
L. ERIC CROSS
Keyword(s):  
Resonant Frequency ◽  
Ferroelectric Ceramic ◽  
Piezoelectric Response ◽  
Additional Mass ◽  
Resonant Frequencies ◽  
Piezoelectric Composites ◽  
Mechanical Resonant Frequency

The newly developed flexure mode flexoelectric composites have extremely high direct piezoelectric response around mechanical resonant frequency. Methods of tuning the resonant frequencies of the composites were studied in this paper. The resonant frequencies can be adjusted by changing dimensions of ferroelectric ceramic bars in the composites or by adding an additional mass on the composites. Design of flexure mode composites with multiple resonant frequencies was also studied.

scholarly journals Dynamic Mechanical Simulation of Miniature Silicon Membrane during Air Blast for Pressure Measurement

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 727 ◽  
Author(s):  
Julien Veyrunes ◽  
Jérôme Riondet ◽  
André Ferrand ◽  
Maylis Lavayssière ◽  
Alexandre Lefrançois ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Mechanical Behavior ◽  
Pressure Measurement ◽  
Rise Time ◽  
Silicon Membrane ◽  
Air Blast ◽  
Dynamic Mechanical ◽  
Dynamic Mechanical Behavior ◽  
Mechanical Resonant Frequency ◽  
Short Rise Time

The development of new ultra-fast sensors for pressure air blast monitoring requires taking into account the very short rise time of pressure occurring during explosion. Simulations show here that the dynamic mechanical behavior of membrane-based sensors depends significantly on this rise time when the fundamental mechanical resonant frequency of the membrane is higher than 10 MHz.

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