scholarly journals In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

Sensors ◽  
2020 ◽  
Vol 20 (3) ◽  
pp. 618 ◽  
Author(s):  
Andi Setiono ◽  
Maik Bertke ◽  
Wilson Ombati Nyang’au ◽  
Jiushuai Xu ◽  
Michael Fahrbach ◽  
...  
Keyword(s):  
Micro Electro Mechanical System ◽  
Laboratory System ◽  
Mass Detection ◽  
Cantilever Sensors ◽  
Cantilever Sensor ◽  
First Case ◽  
Silicon Cantilever ◽  
Out Of Plane ◽  
Resistive Heater ◽  
Particle Sizer

In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170 × 19.5 µm3 and 300 × 100 × 4 µm3, which refer to the 1st and 2nd types of cantilevers, respectively. For the first case, the cantilever is configured to detect the fundamental in-plane bending mode and is actuated using a resistive heater. Similarly, the second type of cantilever sensor is actuated using a meandering resistive heater (bimorph) and is designed for out-of-plane operation. We have successfully employed these two cantilevers to measure and monitor the changes of mass concentration of carbon nanoparticles in air, provided by atomizing suspensions of these nanoparticles into a sealed chamber, ranging from 0 to several tens of µg/m3 and oversize distributions from ~10 nm to ~350 nm. Here, we deploy both types of cantilever sensors and operate them simultaneously with a standard laboratory system (Fast Mobility Particle Sizer, FMPS, TSI 3091) as a reference.

scholarly journals Conducting Polymer-Based Cantilever Sensors for Detection Humidity

Scanning ◽  
2018 ◽  
Vol 2018 ◽  
pp. 1-6 ◽  
Author(s):  
Clarice Steffens ◽  
Alexandra Nava Brezolin ◽  
Juliana Steffens
Keyword(s):  
Relative Humidity ◽  
Mechanical Response ◽  
Sensitive Layer ◽  
Cantilever Sensors ◽  
Cantilever Sensor ◽  
Silicon Cantilever ◽  
Recovery Times ◽  
Long Time ◽  
Response And Recovery ◽  
Low Humidity

This paper describes the use of different conducting polymers (polyaniline, poly(o-ethoxyaniline), and polypyrrole) as a sensitive layer on a silicon cantilever sensor. The mechanical response (deflection) of the bimaterial (the coated cantilever) was investigated under the influence of relative humidity. The variations in the deflection of the coated cantilevers when exposed to relative humidity were evaluated. The results indicated a linear sensitivity in ranges, where the high value was obtained for a polypyrrole-sensitive layer between 20 and 45% of humidity. Furthermore, the sensor shows excellent performance along with rapid response and recovery times, relatively low hysteresis, and excellent stability. The sensors developed are potentially excellent materials for sensing low humidity for long time.

scholarly journals Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

Sensors ◽  
2021 ◽  
Vol 21 (11) ◽  
pp. 3731
Author(s):  
Maik Bertke ◽  
Ina Kirsch ◽  
Erik Uhde ◽  
Erwin Peiner
Keyword(s):  
Mass Concentration ◽  
Limit Of Detection ◽  
A Priori ◽  
Micro Electro Mechanical System ◽  
Single Chip ◽  
Air Stream ◽  
Mems Technology ◽  
Clean Air ◽  
Particle Sizer ◽  
Ultrafine Aerosol

To monitor airborne nano-sized particles (NPs), a single-chip differential mobility particle sizer (DMPS) based on resonant micro cantilevers in defined micro-fluidic channels (µFCs) is introduced. A size bin of the positive-charged fraction of particles herein is separated from the air stream by aligning their trajectories onto the cantilever under the action of a perpendicular electrostatic field of variable strength. We use previously described µFCs and piezoresistive micro cantilevers (PMCs) of 16 ng mass fabricated using micro electro mechanical system (MEMS) technology, which offer a limit of detection of captured particle mass of 0.26 pg and a minimum detectable particulate mass concentration in air of 0.75 µg/m3. Mobility sizing in 4 bins of a nebulized carbon aerosol NPs is demonstrated based on finite element modelling (FEM) combined with a-priori knowledge of particle charge state. Good agreement of better than 14% of mass concentration is observed in a chamber test for the novel MEMS-DMPS vs. a simultaneously operated standard fast mobility particle sizer (FMPS) as reference instrument. Refreshing of polluted cantilevers is feasible without de-mounting the sensor chip from its package by multiply purging them alternately in acetone steam and clean air.

scholarly journals γ-Nanofluid Thermal Transport between Parallel Plates Suspended by Micro-Cantilever Sensor by Incorporating the Effective Prandtl Model: Applications to Biological and Medical Sciences

Molecules ◽  
2020 ◽  
Vol 25 (8) ◽  
pp. 1777 ◽  
Author(s):  
Umar Khan ◽  
Adnan ◽  
Naveed Ahmed ◽  
Syed Tauseef Mohyud-Din ◽  
Yu-Ming Chu ◽  
...  
Keyword(s):  
Volume Fraction ◽  
High Volume ◽  
Research Area ◽  
Parallel Plates ◽  
Medical Sciences ◽  
Cantilever Sensors ◽  
Prandtl Model ◽  
Cantilever Sensor ◽  
Warfare Agents ◽  
Micro Cantilever

The flow of nanofluid between infinite parallel plates suspended by micro-cantilever sensors is significant. The analysis of such flows is a rich research area due to the variety of applications it has in chemical, biological and medical sciences. Micro-cantilever sensors play a significant role in accurately sensing different diseases, and they can be used to detect many hazardous and bio-warfare agents. Therefore, flow water and ethylene glycol (EG) composed by γ-nanoparticles is used. Firstly, the governing nanofluid model is transformed into two self-similar nanofluid models on the basis of their effective models. Then, a numerical method is adopted for solution purposes, and both the nanofluid models are solved. To enhance the heat transfer characteristics of the models, the effective Prandtl model is ingrained in the energy equation. The velocity F’(η) decreases with respect to the suction of the fluid, because more fluid particles drags on the surface for suction, leading to an abrupt decrement in F’(η). The velocity F’(η) increases for injection of the fluid from the upper end, and therefore the momentum boundary layer region is prolonged. A high volume fraction factor is responsible for the denser characteristics of the nanofluids, due to which the fluids become more viscous, and the velocity F’(η) drops abruptly, with the magnetic parameters favoring velocity F’(η). An increase in temperature β ( η ) of Al2O3-H2O and γAl2O3-C2H6O2 nanofluids was reported at higher fraction factors with permeable parameter effects. Finally, a comparative analysis is presented by restricting the flow parameters, which shows the reliability of the study.

scholarly journals Sampling and Mass Detection of a Countable Number of Microparticles Using on-Cantilever Imprinting

Sensors ◽  
2020 ◽  
Vol 20 (9) ◽  
pp. 2508
Author(s):  
Wilson Ombati Nyang’au ◽  
Andi Setiono ◽  
Angelika Schmidt ◽  
Harald Bosse ◽  
Erwin Peiner
Keyword(s):  
Resonant Frequency ◽  
Microscopic Analysis ◽  
Beam Width ◽  
Target Point ◽  
Mass Detection ◽  
Single Particles ◽  
Cantilever Sensors ◽  
Enhanced Sensitivity ◽  
Disease Diagnostics ◽  
Number Of Particles

Liquid-borne particles sampling and cantilever-based mass detection are widely applied in many industrial and scientific fields e.g., in the detection of physical, chemical, and biological particles, and disease diagnostics, etc. Microscopic analysis of particles-adsorbed cantilever-samples can provide a good basis for measurement comparison. However, when a particles-laden droplet on a solid surface is vaporized, a cluster-ring deposit is often yielded which makes particles counting difficult or impractical. Nevertheless, in this study, we present an approach, i.e., on-cantilever particles imprinting, which effectively defies such odds to sample and deposit countable single particles on a sensing surface. Initially, we designed and fabricated a triangular microcantilever sensor whose mass m0, total beam-length L, and clamped-end beam-width w are equivalent to that of a rectangular/normal cantilever but with a higher resonant frequency (271 kHz), enhanced sensitivity (0.13 Hz/pg), and quality factor (~3000). To imprint particles on these cantilever sensors, various calibrated stainless steel dispensing tips were utilized to pioneer this study by dipping and retracting each tip from a small particle-laden droplet (resting on a hydrophobic n-type silicon substrate), followed by tip-sensor-contact (at a target point on the sensing area) to detach the solution (from the tip) and adsorb the particles, and ultimately determine the particles mass concentration. Upon imprinting/adsorbing the particles on the sensor, resonant frequency response measurements were made to determine the mass (or number of particles). A minimum detectable mass of ~0.05 pg was demonstrated. To further validate and compare such results, cantilever samples (containing adsorbed particles) were imaged by scanning electron microscopy (SEM) to determine the number of particles through counting (from which, the lowest count of about 11 magnetic polystyrene particles was obtained). The practicality of particle counting was essentially due to monolayer particle arrangement on the sensing surface. Moreover, in this work, the main measurement process influences are also explicitly examined.

Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

2007 ◽  
Vol 14 (4-5) ◽  
pp. 441-451 ◽  
Author(s):  
Erwin Peiner ◽  
Lutz Doering ◽  
Michael Balke ◽  
Andreas Christ
Keyword(s):  
Cantilever Sensor ◽  
Silicon Cantilever

scholarly journals Modeling and Simulation of Triple Coupled Cantilever Sensor for Mass Sensing Applications

2015 ◽  
Vol 5 (3) ◽  
pp. 403 ◽  
Author(s):  
Nalluri Siddaiah ◽  
D.V. Rama Koti Reddy ◽  
Y. Bhavani Sankar ◽  
R. Anil Kumar ◽  
Hossein Pakdast
Keyword(s):  
Resonant Frequency ◽  
Simulation Software ◽  
Mass Sensing ◽  
Modeling And Analysis ◽  
Critical Dimensions ◽  
Cantilever Sensors ◽  
Sensing Applications ◽  
Cantilever Sensor ◽  
Modeling Techniques ◽  
Mass Detector

Cantilever sensors have been the growing attention in last decades and their use as a mass detector. This work presents design, modeling and analysis of Triple coupled cantilever(TCC) sensor using MEMS simulation software Comsol Multiphysics with critical  dimensions of 100μm length,20μm width and 2μm thickness. Simulations were performed based on finite element modeling techniques, where different resonant frequencies were observed for different modes of operation. It is also observed that the resonant frequency of the sensor decreases as some mass is applied on one particular cantilever. The various parameters greatly affecting the performance of TCC such as resonant frequency, dimensions, material and pressure or force applied on it.we also observed that while adding some mass on any one lateral cantilever, the resonant frequency of that respective mode reduced.

Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

2007 ◽  
Author(s):  
Erwin Peiner ◽  
Lutz Doering ◽  
Michael Balke ◽  
Andreas Christ
Keyword(s):  
Cantilever Sensor ◽  
Silicon Cantilever
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