Kontur-, Rauheits- und Kraftmesstechnik mit Silizium-Cantileversonden (Shape, Roughness and Force Metrology using Silicon Cantilever Sensors)

2008 ◽  
Vol 75 (2) ◽  
Author(s):  
Erwin Peiner ◽  
Michael Balke ◽  
Lutz Doering ◽  
Andreas Christ
Keyword(s):  
Cantilever Sensors ◽  
Silicon Cantilever

scholarly journals In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

Sensors ◽  
2020 ◽  
Vol 20 (3) ◽  
pp. 618 ◽  
Author(s):  
Andi Setiono ◽  
Maik Bertke ◽  
Wilson Ombati Nyang’au ◽  
Jiushuai Xu ◽  
Michael Fahrbach ◽  
...  
Keyword(s):  
Micro Electro Mechanical System ◽  
Laboratory System ◽  
Mass Detection ◽  
Cantilever Sensors ◽  
Cantilever Sensor ◽  
First Case ◽  
Silicon Cantilever ◽  
Out Of Plane ◽  
Resistive Heater ◽  
Particle Sizer

In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170 × 19.5 µm3 and 300 × 100 × 4 µm3, which refer to the 1st and 2nd types of cantilevers, respectively. For the first case, the cantilever is configured to detect the fundamental in-plane bending mode and is actuated using a resistive heater. Similarly, the second type of cantilever sensor is actuated using a meandering resistive heater (bimorph) and is designed for out-of-plane operation. We have successfully employed these two cantilevers to measure and monitor the changes of mass concentration of carbon nanoparticles in air, provided by atomizing suspensions of these nanoparticles into a sealed chamber, ranging from 0 to several tens of µg/m3 and oversize distributions from ~10 nm to ~350 nm. Here, we deploy both types of cantilever sensors and operate them simultaneously with a standard laboratory system (Fast Mobility Particle Sizer, FMPS, TSI 3091) as a reference.

scholarly journals Conducting Polymer-Based Cantilever Sensors for Detection Humidity

Scanning ◽  
2018 ◽  
Vol 2018 ◽  
pp. 1-6 ◽  
Author(s):  
Clarice Steffens ◽  
Alexandra Nava Brezolin ◽  
Juliana Steffens
Keyword(s):  
Relative Humidity ◽  
Mechanical Response ◽  
Sensitive Layer ◽  
Cantilever Sensors ◽  
Cantilever Sensor ◽  
Silicon Cantilever ◽  
Recovery Times ◽  
Long Time ◽  
Response And Recovery ◽  
Low Humidity

This paper describes the use of different conducting polymers (polyaniline, poly(o-ethoxyaniline), and polypyrrole) as a sensitive layer on a silicon cantilever sensor. The mechanical response (deflection) of the bimaterial (the coated cantilever) was investigated under the influence of relative humidity. The variations in the deflection of the coated cantilevers when exposed to relative humidity were evaluated. The results indicated a linear sensitivity in ranges, where the high value was obtained for a polypyrrole-sensitive layer between 20 and 45% of humidity. Furthermore, the sensor shows excellent performance along with rapid response and recovery times, relatively low hysteresis, and excellent stability. The sensors developed are potentially excellent materials for sensing low humidity for long time.

scholarly journals Enhancement of unsteady frequency responses of electro-thermal resonance MEMS cantilever sensors

2021 ◽  
Vol 1837 (1) ◽  
pp. 012003
Author(s):  
Andi Setiono ◽  
Wilson Ombati Nyang’au ◽  
Michael Fahrbach ◽  
Jiushuai Xu ◽  
Maik Bertke ◽  
...  
Keyword(s):  
Cantilever Sensors ◽  
Frequency Responses

Real-time monitoring of hydrogel rheological property changes and gelation processes using high-order modes of cantilever sensors

2020 ◽  
Vol 128 (17) ◽  
pp. 174502
Author(s):  
Ellen Cesewski ◽  
Manjot Singh ◽  
Yang Liu ◽  
Junru Zhang ◽  
Alexander P. Haring ◽  
...  
Keyword(s):  
Rheological Property ◽  
Real Time ◽  
High Order ◽  
Real Time Monitoring ◽  
Cantilever Sensors ◽  
Property Changes

Optical Vibration and Acceleration Sensor With a Silicon Cantilever

1999 ◽  
Author(s):  
Mitsuteru Kimura ◽  
Katsuhisa Toshima ◽  
Harunobu Satoh
Keyword(s):  
Simple Model ◽  
Optical Fiber ◽  
Resonance Frequency ◽  
Acceleration Sensor ◽  
Frequency Range ◽  
Silicon Cantilever ◽  
All Optical ◽  
New Type ◽  
Good Agreement ◽  
Optical Vibration

Abstract A new type all optical vibration and acceleration sensor using the combination of micromachined Si cantilever and optical fiber is proposed, and its fundamental characteristics are demonstrated. The light emitted from bulb-lens set into the V-groove is reflected at the reflector formed on the Si cantilever and then recoupled into the bulb-lens. Several sensors with different length (0.64–6.0 mm long) of the Si cantilever are fabricated to compare the theoretical resonance frequency fr obtained from the simple model and experimental ones. They had good agreement. From the sensing principle the sensing frequency range of the vibration is suitable below the fr of the Si cantilever of the sensor.

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