scholarly journals Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity

Sensors ◽  
2019 ◽  
Vol 19 (10) ◽  
pp. 2421 ◽  
Author(s):  
Sofia Toto ◽  
Pascal Nicolay ◽  
Gian Luca Morini ◽  
Michael Rapp ◽  
Jan G. Korvink ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
High Vacuum ◽  
Industrial Processes ◽  
Extended Range ◽  
Vacuum Sensor ◽  
Gas Kinetic Theory ◽  
And Control ◽  
Measurement And Control

Pressure is a critical parameter for a large number of industrial processes. The vacuum industry relies on accurate pressure measurement and control. A new compact wireless vacuum sensor was designed and simulated and is presented in this publication. The sensor combines the Pirani principle and Surface Acoustic Waves, and it extends the vacuum sensed range to between 10−4 Pa and 105 Pa all along a complete wireless operation. A thermal analysis was performed based on gas kinetic theory, aiming to optimize the thermal conductivity and the Knudsen regime of the device. Theoretical analysis and simulation allowed designing the structure of the sensor and its dimensions to ensure the highest sensitivity through the whole sensing range and to build a model that simulates the behavior of the sensor under vacuum. A completely new design and a model simulating the behavior of the sensor from high vacuum to atmospheric pressure were established.

Two-Axis Solid-State Microgyroscope on Surface Acoustic Waves

2019 ◽  
Vol 20 (5) ◽  
pp. 299-307
Author(s):  
V. P. Sizov ◽  
V. N. Pogorelov ◽  
Yu. V. Vakhtin
Keyword(s):  
Solid State ◽  
Elastic Waves ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Oscillation Amplitude ◽  
Substrate Layer ◽  
Production Technologies ◽  
Wave Models ◽  
And Control ◽  
High Degree

This article focuses on the development of a two-axis solid state micro gyroscope (SMG) on surface acoustic waves (SAW). The described gyroscope belongs to the category of inexpensive sensing elements featuring a high degree of longtime overload stability. This advantage seems to make SAW SMGs a priority choice for navigation and control systems functioning in severe overload environments of up to 65,000 g. As of today SAW SMGs are designed according to a number of known principles. Such SMGs may also operate on standing SAWs or traveling SAWs. This article addresses the first gyro type. Unfortunately, the existing standing SAW SMGs share a common limitation of measuring angular rates in relation to one axis only. This research attempts to introduce an innovative two-axis standing SAW SMG. The influence of the basis rotation on the parameters of the elastic waves traveling within the substrate layer was carefully studied. Incident and reflected wave models were also elaborated. The numerical simulation results demonstrate the effects of the basis rotation on the complex factors of the volume waves reflected by the substrate layer and on the phase velocity and frequency thereof as well as on the oscillation amplitude of the particles involved in SAW transition, and on the elliptical particle movement path configuration. Also, the SAW SMG is compared to the existing micromechanical gyroscopes, and the basic SAW SMG production technologies are reviewed.

scholarly journals Generation and control of ultrashort-wavelength two-dimensional surface acoustic waves at nanoscale interfaces

2012 ◽  
Vol 85 (19) ◽  
Author(s):  
Qing Li ◽  
Kathleen Hoogeboom-Pot ◽  
Damiano Nardi ◽  
Margaret M. Murnane ◽  
Henry C. Kapteyn ◽  
...  
Keyword(s):  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Two Dimensional ◽  
Nanoscale Interfaces ◽  
And Control ◽  
Dimensional Surface

scholarly journals Dipole states and coherent interaction in surface-acoustic-wave coupled phononic resonators

2019 ◽  
Vol 10 (1) ◽  
Author(s):  
Laetitia Raguin ◽  
Olivier Gaiffe ◽  
Roland Salut ◽  
Jean-Marc Cote ◽  
Valérie Soumann ◽  
...  
Keyword(s):  
Acoustic Waves ◽  
Coherent Control ◽  
Quantum Information Processing ◽  
Surface Acoustic Waves ◽  
Mechanical Vibration ◽  
Separation Distance ◽  
Successful Implementation ◽  
Mechanical Coupling ◽  
Coherent Interaction ◽  
And Control

Abstract Manipulation of mechanical motion at the micro-scale has been attracting continuous attention, leading to the successful implementation of various strategies with potential impact on classical and quantum information processing. We propose an approach based on the interplay between a pair of localised mechanical resonators and travelling surface acoustic waves (SAW). We demonstrate the existence of a two-sided interaction, allowing the use of SAW to trigger and control the resonator oscillation, and to manipulate the elastic energy distribution on the substrate through resonator coupling. Observation of the vectorial structure of the resonator motion reveals the existence of two coupling regimes, a dipole-dipole-like interaction at small separation distance versus a surface-mediated mechanical coupling at larger separation. These results illustrate the potential of this platform for coherent control of mechanical vibration at a resonator level, and reciprocally for manipulating SAW propagation using sub-wavelength elements.

scholarly journals Characterization of a Wireless Vacuum Sensor Prototype Based on the SAW-Pirani Principle

Processes ◽  
2020 ◽  
Vol 8 (12) ◽  
pp. 1685
Author(s):  
Sofia Toto ◽  
Mazin Jouda ◽  
Jan G. Korvink ◽  
Suparna Sundarayyan ◽  
Achim Voigt ◽  
...  
Keyword(s):  
Acoustic Waves ◽  
Printed Circuit Board ◽  
Surface Acoustic Waves ◽  
Operating Conditions ◽  
Circuit Board ◽  
Ambient Conditions ◽  
Vacuum Sensor ◽  
Dependent Signal ◽  
Main Components

A prototype of a wireless vacuum microsensor combining the Pirani principle and surface acoustic waves (SAW) with extended range and sensitivity was designed, modelled, manufactured and characterised under different conditions. The main components of the prototype are a sensing SAW chip, a heating coil and an interrogation antenna. All the components were assembled on a 15 mm × 11 mm × 3 mm printed circuit board (PCB). The behaviour of the PCB was characterised under ambient conditions and in vacuum. The quality of the SAW interrogation signal, the frequency shift and the received current of the coil were measured for different configurations. Pressures between 0.9 and 100,000 Pa were detected with sensitivities between 2.8 GHz/Pa at 0.9 Pa and 1 Hz/Pa close to atmospheric pressure. This experiment allowed us to determine the optimal operating conditions of the sensor and the integration conditions inside a vacuum chamber in addition to obtaining a pressure-dependent signal.

Rapid Thermal Annealing of As in Si

1985 ◽  
Vol 52 ◽  
Author(s):  
J. L. Hoyt ◽  
J. F. Gibbons
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
High Vacuum ◽  
Depth Profiling ◽  
Electrical Characterization ◽  
Wide Range ◽  
Time Cycle ◽  
Series Of Experiments ◽  
And Control ◽  
Measurement And Control

ABSTRACTThe results of a detailed investigation of the diffusion of ion implanted As in Si during Rapid Thermal Annealing (RTA) are reported. A series of experiments has been performed on samples implanted with As in a wide range of concentrations. The use of an improved thermocouple bonding technique enables precise measurement and control of the temperature versus time cycle for each individual sample. The RTA apparatus is designed to perform high vacuum annealing, eliminating the complications associated with point defect generating mechanisms at the surface, which are known to influence the diffusion of impurities in Si. Sample analysis includes depth profiling by SIMS and RBS, and electrical characterization employing VanderPauw and Spreading Resistance measurements.The resulting profiles have been analyzed via a numerical solution of the diffusion equation subject to the appropriate boundary conditions. With an effective As diffusivity of the form we find good simulation of all measured profiles with the standard values of D0 and D- from SUPREMIII and a one parameter fit to D= Recent results on the redistribution of low dose As implants in heavily phosphorus doped Si illustrate the strong Fermi level dependence. The model has also been successfully used to simulate RTA data in the literature where careful temperature measurements have been made.

Characterization of RF Sputtered ZnO Piezoelectric Films Using Transmission Electron Microscope

1975 ◽  
Vol 33 ◽  
pp. 86-87
Author(s):  
Kemining W. Yeh ◽  
Richard S. Muller ◽  
Wei-Kuo Wu ◽  
Jack Washburn
Keyword(s):  
Integrated Circuit ◽  
Acoustic Waves ◽  
New Technology ◽  
Surface Acoustic Waves ◽  
Electromechanical Properties ◽  
Leading Role ◽  
Saw Devices ◽  
Transmission Electron ◽  
High Degree

Considerable and continuing interest has been shown in the thin film transducer fabrication for surface acoustic waves (SAW) in the past few years. Due to the high degree of miniaturization, compatibility with silicon integrated circuit technology, simplicity and ease of design, this new technology has played an important role in the design of new devices for communications and signal processing. Among the commonly used piezoelectric thin films, ZnO generally yields superior electromechanical properties and is expected to play a leading role in the development of SAW devices.

Attenuation of surface acoustic waves by quantum dots

1998 ◽  
Vol 77 (5) ◽  
pp. 1195-1202
Author(s):  
Andreas Knabchen Yehoshua, B. Levinson, Ora
Keyword(s):  
Quantum Dots ◽  
Acoustic Waves ◽  
Surface Acoustic Waves
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