scholarly journals Generation and control of ultrashort-wavelength two-dimensional surface acoustic waves at nanoscale interfaces

2012 ◽  
Vol 85 (19) ◽  
Author(s):  
Qing Li ◽  
Kathleen Hoogeboom-Pot ◽  
Damiano Nardi ◽  
Margaret M. Murnane ◽  
Henry C. Kapteyn ◽  
...  
2012 ◽  
Vol 112 (3) ◽  
pp. 033511 ◽  
Author(s):  
Abdelkrim Khelif ◽  
Younes Achaoui ◽  
Boujemaa Aoubiza

2019 ◽  
Vol 20 (5) ◽  
pp. 299-307
Author(s):  
V. P. Sizov ◽  
V. N. Pogorelov ◽  
Yu. V. Vakhtin

This article focuses on the development of a two-axis solid state micro gyroscope (SMG) on surface acoustic waves (SAW). The described gyroscope belongs to the category of inexpensive sensing elements featuring a high degree of longtime overload stability. This advantage seems to make SAW SMGs a priority choice for navigation and control systems functioning in severe overload environments of up to 65,000 g. As of today SAW SMGs are designed according to a number of known principles. Such SMGs may also operate on standing SAWs or traveling SAWs. This article addresses the first gyro type. Unfortunately, the existing standing SAW SMGs share a common limitation of measuring angular rates in relation to one axis only. This research attempts to introduce an innovative two-axis standing SAW SMG. The influence of the basis rotation on the parameters of the elastic waves traveling within the substrate layer was carefully studied. Incident and reflected wave models were also elaborated. The numerical simulation results demonstrate the effects of the basis rotation on the complex factors of the volume waves reflected by the substrate layer and on the phase velocity and frequency thereof as well as on the oscillation amplitude of the particles involved in SAW transition, and on the elliptical particle movement path configuration. Also, the SAW SMG is compared to the existing micromechanical gyroscopes, and the basic SAW SMG production technologies are reviewed.


Author(s):  
Kebin Gu ◽  
Chien-Liu Chang ◽  
Jyh-Cherng Shieh

In this paper, we present the design and fabrication of innovative phononic crystals integrated with two sets of interdigital (IDT) electrodes for frequency band selection of surface acoustic waves (SAW). The potential applications of this device include performance improvement of SAW micro-sensors, front-end components in RF circuitries, and directional receptions of high frequency acoustic waves. Analogous to the band-gap generated by photonic crystals, the phononic crystals, two dimensional repetitive structures composed of two different elastic materials, can prohibit the propagation of elastic waves with either specific incident angles or certain bandwidth. In this paper, the prohibited bandwidth has been verified by fabricating the phononic crystals between a micromachined SAW resonator and a receiver. Both the resonator and receiver are composed of IDT electrodes deposited and patterned on a thin piezoelectric layer. To confine the prohibited bandwidth on the order of hundred MHz, the diameter of the circular pores in phononic crystals is designed to be 6 micron and the aspect ratio of each pore is 3:1. To maximize the power transduction from IDT electrodes to SAW, the spacing between two inter-digits is one-fourth the wavelength of SAW. Specifically, the spacing ranges from 3.4 microns to 9.0 microns, depending on the central frequency. Both surface and bulk micromachining are employed and integrated to fabricate the crystals as well as SAW resonator and receiver altogether. Firstly, a 1.5-micron zinc oxide, which provides well-defined central frequency, is sputtered and patterned onto silicon substrate. Second, the IDT electrodes are evaporated and patterned by lift-off technique. Then the exposed silicon substrate is etched using DRIE to generate two dimensional phononic crystals. To tune the prohibited SAW bandwidth, the crystal pores are filled with copper or nickel by electroless plating. The insertion loss of the fabricated devices is characterized and is found to agree with simulation results.


Sensors ◽  
2019 ◽  
Vol 19 (10) ◽  
pp. 2421 ◽  
Author(s):  
Sofia Toto ◽  
Pascal Nicolay ◽  
Gian Luca Morini ◽  
Michael Rapp ◽  
Jan G. Korvink ◽  
...  

Pressure is a critical parameter for a large number of industrial processes. The vacuum industry relies on accurate pressure measurement and control. A new compact wireless vacuum sensor was designed and simulated and is presented in this publication. The sensor combines the Pirani principle and Surface Acoustic Waves, and it extends the vacuum sensed range to between 10−4 Pa and 105 Pa all along a complete wireless operation. A thermal analysis was performed based on gas kinetic theory, aiming to optimize the thermal conductivity and the Knudsen regime of the device. Theoretical analysis and simulation allowed designing the structure of the sensor and its dimensions to ensure the highest sensitivity through the whole sensing range and to build a model that simulates the behavior of the sensor under vacuum. A completely new design and a model simulating the behavior of the sensor from high vacuum to atmospheric pressure were established.


Nanoscale ◽  
2021 ◽  
Author(s):  
Anulekha De ◽  
Justine Lynn Drobitch ◽  
Sudip Majumder ◽  
Saswati Barman ◽  
S. Bandyopadhyay ◽  
...  

Using time-resolved magneto optical Kerr effect (TR-MOKE) microscopy, we demonstrate surface-acoustic-wave (SAW) induced resonant amplification of intrinsic spin-wave (SW) modes, as well as generation of new extrinsic or driven modes...


2018 ◽  
Vol 284 ◽  
pp. 168-171 ◽  
Author(s):  
Tengfei Zheng ◽  
Chaohui Wang ◽  
Chaoping Xu ◽  
Qiao Hu ◽  
Shoupeng Wei

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