scholarly journals Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices

Sensors ◽  
2019 ◽  
Vol 19 (2) ◽  
pp. 374 ◽  
Author(s):  
Ayoub Lahlalia ◽  
Olivier Le Neel ◽  
Ravi Shankar ◽  
Siegfried Selberherr ◽  
Lado Filipovic
Keyword(s):  
Metal Oxide ◽  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
High Sensitivity ◽  
Fast Response ◽  
Low Power Consumption ◽  
Response Characteristics ◽  
The Impact ◽  
Semiconducting Metal Oxide

Semiconducting metal oxide (SMO) gas sensors were designed, fabricated, and characterized in terms of their sensing capability and the thermo-mechanical behavior of the micro-hotplate. The sensors demonstrate high sensitivity at low concentrations of volatile organic compounds (VOCs) at a low power consumption of 10.5 mW. In addition, the sensors realize fast response and recovery times of 20 s and 2.3 min, respectively. To further improve the baseline stability and sensing response characteristics at low power consumption, a novel sensor is conceived of and proposed. Tantalum aluminum (TaAl) is used as a microheater, whereas Pt-doped SnO2 is used as a thin film sensing layer. Both layers were deposited on top of a porous silicon nitride membrane. In this paper, two designs are characterized by simulations and experimental measurements, and the results are comparatively reported. Simultaneously, the impact of a heat pulsing mode and rubber smartphone cases on the sensing performance of the gas sensor are highlighted.

Low power consumption and fast response H2S gas sensor based on a chitosan-CuO hybrid nanocomposite thin film

2020 ◽  
Vol 236 ◽  
pp. 116064 ◽  
Author(s):  
Fajr I.M. Ali ◽  
Saleh T. Mahmoud ◽  
Falah Awwad ◽  
Yaser E. Greish ◽  
Ayah F.S. Abu-Hani
Keyword(s):  
Thin Film ◽  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
Fast Response ◽  
Low Power Consumption ◽  
Hybrid Nanocomposite ◽  
Nanocomposite Thin Film ◽  
H2s Gas Sensor

Design and Fabrication of a MEMS-Based Gas Sensor

2009 ◽  
Vol 74 ◽  
pp. 255-258 ◽  
Author(s):  
Jin Ho Yoon ◽  
Jung Sik Kim
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
Sol Gel ◽  
High Sensitivity ◽  
Low Power Consumption ◽  
Potential Candidate ◽  
Gas Sensitivity ◽  
Thin Film Layer ◽  
Sol Gel Process

In this study, the micro gas sensor for NOx gas was fabricated by using a MEMS technology and sol-gel process. The sensing electrode and micro heater were designed to be a co-planar typed structure in the Pt thin film layer. The fabricated micro platform had a low power consumption of 67 mW at 2.0 V of heater voltage and 300°C of operating temperature. Indium oxide as a sensing material for NOx gas was synthesized by a sol-gel process with indium isopropoxide. The particle size of synthesized In2O3 was identified as about 50 nm. The maximum gas sensitivity as relative resistance (Rs = Rgas / Rair) occurred at 300°C with the value of 8.0 at 1 ppm NO2 gas. The present study shows that a MEMS-based gas sensor is a potential candidate for the automobile AQS (air quality system) gas sensor with many advantages of small dimension, high sensitivity, short response time and low power consumption.

scholarly journals Highly selective and ultra-low power consumption metal oxide based hydrogen gas sensor employing graphene oxide as molecular sieve

2020 ◽  
Vol 320 ◽  
pp. 128363 ◽  
Author(s):  
Florian Rasch ◽  
Vasile Postica ◽  
Fabian Schütt ◽  
Yogendra Kumar Mishra ◽  
Ali Shaygan Nia ◽  
...  
Keyword(s):  
Graphene Oxide ◽  
Metal Oxide ◽  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
Molecular Sieve ◽  
Hydrogen Gas ◽  
Low Power Consumption ◽  
Ultra Low Power

Low Power Consumption and High Sensitivity Carbon Monoxide Gas Sensor Using Indium Oxide Nanowire

2010 ◽  
Vol 10 (5) ◽  
pp. 3189-3192 ◽  
Author(s):  
S. E. Moon ◽  
H.-Y. Lee ◽  
J. Park ◽  
J.-W. Lee ◽  
N.-J. Choi ◽  
...  
Keyword(s):  
Carbon Monoxide ◽  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
Indium Oxide ◽  
High Sensitivity ◽  
Low Power Consumption

An asymmetric contact-induced self-powered 2D In2S3 photodetector towards high-sensitivity and fast-response

Nanoscale ◽  
2020 ◽  
Vol 12 (13) ◽  
pp. 7196-7205 ◽  
Author(s):  
Jianting Lu ◽  
Zhaoqiang Zheng ◽  
Jiandong Yao ◽  
Wei Gao ◽  
Ye Xiao ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
High Sensitivity ◽  
Fast Response ◽  
Low Power Consumption ◽  
Self Powered ◽  
High Level ◽  
Asymmetric Contact

Self-powered photodetectors have triggered extensive attention in recent years due to the advantages of high sensitivity, fast response, low power consumption, high level of integration and wireless operation.

Hydrogen gas sensor of Pd‐functionalised AlGaN/GaN heterostructure with high sensitivity and low‐power consumption

2017 ◽  
Vol 53 (17) ◽  
pp. 1200-1202 ◽  
Author(s):  
J.‐H. Choi ◽  
M.‐G. Jo ◽  
S.‐W. Han ◽  
H. Kim ◽  
S.‐H. Kim ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
High Sensitivity ◽  
Hydrogen Gas ◽  
Low Power Consumption ◽  
Gan Heterostructure

scholarly journals Enhanced Sensing Performance of Integrated Gas Sensor Devices

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1508
Author(s):  
Ayoub Lahlalia ◽  
Olivier Le Neel ◽  
Ravi Shankar ◽  
Siegfried Selberherr ◽  
Lado Filipovic
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensors ◽  
Low Power Consumption ◽  
Experimental Characterization ◽  
Response Characteristics ◽  
Sensor Performance ◽  
Sensor Structure ◽  
New Applications ◽  
Semiconducting Metal Oxide

Semiconducting metal oxide (SMO) gas sensors, dedicated to wearable devices were designed, fabricated, and characterized in terms of power consumption, thermal distribution, and sensing capability. The sensors demonstrate a sensitivity down to ppb-level VOC concentrations at a low power consumption of 10.5 mW. To further enhance the baseline stability and sensing response characteristics at low power consumption, a new sensor structure is proposed. The design implements novel aspects in terms of fabrication and microheater geometry, leading to improved sensor performance which enables new applications for SMO gas sensors. In this work, two designs were analyzed using experimental characterization and simulation. The results of the analyses of the two sensors are comparatively reported.

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