High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors
Keyword(s):
In situ measurement of coating thickness during thermal spraying using an optical displacement meter
1987 ◽
Vol 5
(1)
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pp. 82-87
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2009 ◽
Vol 9
(12)
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pp. 1933-1941
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2002 ◽
Vol 112
(5)
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pp. 2234-2235
2019 ◽
Vol 19
(10)
◽
pp. 3846-3860
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2001 ◽
Vol 49
(9)
◽
pp. 1067-1071
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Keyword(s):