Broadband self‐calibrating micromachined microphones with integrated optical displacement detection

2002 ◽  
Vol 112 (5) ◽  
pp. 2234-2235
Author(s):  
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Wook Lee ◽  
F. Levent Degertekin
Keyword(s):  
Optical Displacement ◽  
Integrated Optical

Integrated Optical Displacement Detection and Electrostatic Actuation for Directional Optical Microphones With Micromachined Biomimetic Diaphragms

2009 ◽  
Vol 9 (12) ◽  
pp. 1933-1941 ◽  
Author(s):  
Baris Bicen ◽  
Sunny Jolly ◽  
Kamran Jeelani ◽  
Caesar T. Garcia ◽  
Neal A. Hall ◽  
...  
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Electrostatic Actuation ◽  
Optical Displacement ◽  
Integrated Optical

Integrated optical displacement sensor based on asymmetric Mach–Zehnder interferometer chip

2017 ◽  
Vol 56 (2) ◽  
pp. 027109 ◽  
Author(s):  
Ning Zhao ◽  
Guang Qian ◽  
Xing-Chang Fu ◽  
Li-Jiang Zhang ◽  
Wei Hu ◽  
...  
Keyword(s):  
Zehnder Interferometer ◽  
Displacement Sensor ◽  
Optical Displacement ◽  
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scholarly journals High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors

Sensors ◽  
2018 ◽  
Vol 18 (7) ◽  
pp. 2055 ◽  
Author(s):  
Yi-Jia Du ◽  
Ting-Ting Yang ◽  
Dong-Dong Gong ◽  
Yi-Cheng Wang ◽  
Xiang-Yu Sun ◽  
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Inertial Sensors ◽  
Self Calibration ◽  
Optical Displacement ◽  
Integrated Optical ◽  
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Integrated optical displacement sensor with four quadrature phase-shifted output signals

1998 ◽  
Vol 29 (3) ◽  
pp. 135-140 ◽  
Author(s):  
Thiemo Lang ◽  
Denis Genon-Catalot ◽  
Pascal Dandrea ◽  
Isabelle Schanen Duport ◽  
Pierre Benech
Keyword(s):  
Displacement Sensor ◽  
Optical Displacement ◽  
Integrated Optical ◽  
Quadrature Phase

scholarly journals Monolithically integrated optical displacement sensor in GaAs/AlGaAs

1995 ◽  
Vol 31 (24) ◽  
pp. 2121-2122 ◽  
Author(s):  
D. Hofstetter ◽  
R. Dändliker ◽  
H.P. Zappe
Keyword(s):  
Displacement Sensor ◽  
Monolithically Integrated ◽  
Optical Displacement ◽  
Integrated Optical
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