scholarly journals The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor

Sensors ◽  
2016 ◽  
Vol 16 (3) ◽  
pp. 348 ◽  
Author(s):  
Xiawei Meng ◽  
Yulong Zhao
Keyword(s):  
Pressure Sensor ◽  
Design And Optimization ◽  
Piezoresistive Pressure Sensor ◽  
Highly Sensitive

Design and Optimization of a Highly Sensitive and Linearity Piezoresistive Pressure Sensor Based on a Combination of Cross Beam-Peninsula-Membrane Structure

2017 ◽  
Author(s):  
Tran Anh Vang ◽  
Xianmin Zhang ◽  
Benliang Zhu
Keyword(s):  
Pressure Sensor ◽  
Pressure Sensors ◽  
Single Crystal Silicon ◽  
High Sensitivity ◽  
Crystal Silicon ◽  
Nonlinearity Error ◽  
Trade Off ◽  
Design And Optimization ◽  
Piezoresistive Pressure Sensor ◽  
Piezoresistive Pressure Sensors

The sensitivity and linearity trade-off problem has become the hotly important issues in designing the piezoresistive pressure sensors. To solve these trade-off problems, this paper presents the design, optimization, fabrication, and experiment of a novel piezoresistive pressure sensor for micro pressure measurement based on a combined cross beam - membrane and peninsula (CBMP) structure diaphragm. Through using finite element method (FEM), the proposed sensor performances as well as comparisons with other sensor structures are simulated and analyzed. Compared with the cross beam-membrane (CBM) structure, the sensitivity of CBMP structure sensor is increased about 38.7 % and nonlinearity error is reduced nearly 8%. In comparison with the peninsula structure, the maximum non-linearity error of CBMP sensor is decreased about 40% and the maximum deflection is extremely reduced 73%. Besides, the proposed sensor fabrication is performed on the n-type single crystal silicon wafer. The experimental results of the fabricated sensor with CBMP membrane has a high sensitivity of 23.4 mV/kPa and a low non-linearity of −0.53% FSS in the pressure range 0–10 kPa at the room temperature. According to the excellent performance, the sensor can be applied to measure micro-pressure lower than 10 kPa.

Design and optimization of a novel structural MEMS piezoresistive pressure sensor

2016 ◽  
Vol 23 (10) ◽  
pp. 4531-4541 ◽  
Author(s):  
Chuang Li ◽  
Francisco Cordovilla ◽  
R. Jagdheesh ◽  
José L. Ocaña
Keyword(s):  
Pressure Sensor ◽  
Design And Optimization ◽  
Piezoresistive Pressure Sensor

Highly Sensitive Flexible Piezoresistive Pressure Sensor Developed Using Biomimetically Textured Porous Materials

2019 ◽  
Vol 11 (32) ◽  
pp. 29466-29473 ◽  
Author(s):  
Tingting Zhao ◽  
Tongkuai Li ◽  
Longlong Chen ◽  
Li Yuan ◽  
Xifeng Li ◽  
...  
Keyword(s):  
Porous Materials ◽  
Pressure Sensor ◽  
Piezoresistive Pressure Sensor ◽  
Highly Sensitive

Compressible AgNWs/Ti3C2Tx MXene aerogel-based highly sensitive piezoresistive pressure sensor as versatile electronic skins

2020 ◽  
Vol 8 (38) ◽  
pp. 20030-20036 ◽  
Author(s):  
Lili Bi ◽  
Zhonglin Yang ◽  
Liangjun Chen ◽  
Zhen Wu ◽  
Cui Ye
Keyword(s):  
Detection Limit ◽  
Pressure Sensor ◽  
Layer Structure ◽  
Low Detection Limit ◽  
Piezoresistive Pressure Sensor ◽  
Highly Sensitive ◽  
Ultrahigh Sensitivity ◽  
Directional Freezing

AgNWs/Ti3C2Tx MXene aerogel with well-aligned layer structure was prepared by a directional freezing strategy, and applied to fabricate piezoresistive pressure sensor, which has ultrahigh sensitivity (645.69 kPa−1) and low detection limit (1.25 Pa).

scholarly journals A Flexible and Highly Sensitive Piezoresistive Pressure Sensor Based on Micropatterned Films Coated with Carbon Nanotubes

2016 ◽  
Vol 2016 ◽  
pp. 1-5 ◽  
Author(s):  
Jia-lin Yao ◽  
Xing Yang ◽  
Na Shao ◽  
Hui Luo ◽  
Ting Zhang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Gas Sensing ◽  
Fluid Pressure ◽  
High Sensitivity ◽  
Sensing Element ◽  
Pressure Sensing ◽  
Piezoresistive Pressure Sensor ◽  
Highly Sensitive ◽  
Flexible Pressure Sensor ◽  
Low Consumption

Excellent flexibility, high sensitivity, and low consumption are essential characteristics in flexible microtube pressure sensing occasion, for example, implantable medical devices, industrial pipeline, and microfluidic chip. This paper reports a flexible, highly sensitive, and ultrathin piezoresistive pressure sensor for fluid pressure sensing, whose sensing element is micropatterned films with conductive carbon nanotube layer. The flexible pressure sensor, the thickness of which is 40 ± 10 μm, could be economically fabricated by using biocompatible polydimethylsiloxane (PDMS). Experimental results show that the flexible pressure sensor has high sensitivity (0.047 kPa−1in gas sensing and 5.6 × 10−3 kPa−1in liquid sensing) and low consumption (<180 μW), and the sensor could be used to measure the pressure in curved microtubes.

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