A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica

Thorsten Wagner; Sören Krotzky; Alexander Weiß; Tilman Sauerwald; Claus-Dieter Kohl; Jan Roggenbuck; Michael Tiemann

doi:10.3390/s110303135

A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica

Sensors ◽

10.3390/s110303135 ◽

2011 ◽

Vol 11 (3) ◽

pp. 3135-3144 ◽

Cited By ~ 36

Author(s):

Thorsten Wagner ◽

Sören Krotzky ◽

Alexander Weiß ◽

Tilman Sauerwald ◽

Claus-Dieter Kohl ◽

...

Keyword(s):

High Temperature ◽

Mesoporous Silica ◽

Humidity Sensor ◽

Capacitive Humidity Sensor

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A high-and-rapid-response capacitive humidity sensor of nanoporous anodic alumina by one-step anodizing commercial 1050 aluminum alloy and its enhancement mechanism

Sensors and Actuators B Chemical ◽

10.1016/j.snb.2021.130156 ◽

2021 ◽

pp. 130156

Author(s):

C.K. Chung ◽

C.A. Ku ◽

Z.E. Wu

Keyword(s):

Aluminum Alloy ◽

Humidity Sensor ◽

Anodic Alumina ◽

Rapid Response ◽

Enhancement Mechanism ◽

Nanoporous Anodic Alumina ◽

One Step ◽

1050 Aluminum Alloy ◽

Capacitive Humidity Sensor

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Fully inkjet-printed BaTiO3 capacitive humidity sensor: microstructural engineering of the humidity sensing layer using bimodal ink

Ceramics International ◽

10.1016/j.ceramint.2021.05.191 ◽

2021 ◽

Author(s):

Frances Danielle M. Fernandez ◽

Murali Bissannagari ◽

Jihoon Kim

Keyword(s):

Humidity Sensor ◽

Humidity Sensing ◽

Capacitive Humidity Sensor

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High-Temperature Generalized Synthesis of Stable Ordered Mesoporous Silica-Based Materials by Using Fluorocarbon–Hydrocarbon Surfactant Mixtures

Angewandte Chemie ◽

10.1002/ange.200351466 ◽

2003 ◽

Vol 115 (31) ◽

pp. 3761-3765 ◽

Cited By ~ 12

Author(s):

Yu Han ◽

Defeng Li ◽

Lan Zhao ◽

Jiangwei Song ◽

Xiaoyu Yang ◽

...

Keyword(s):

High Temperature ◽

Mesoporous Silica ◽

Ordered Mesoporous Silica ◽

Surfactant Mixtures ◽

Ordered Mesoporous

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Nano particle porous alumina based thin film parallel plate capacitive humidity sensor

10.1063/1.4872672 ◽

2014 ◽

Cited By ~ 1

Author(s):

Shailesh Kumar

Keyword(s):

Thin Film ◽

Parallel Plate ◽

Humidity Sensor ◽

Porous Alumina ◽

Nano Particle ◽

Capacitive Humidity Sensor

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Changing poisson’s ratio of mesoporous silica monoliths with high temperature treatment

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2006.09.002 ◽

2006 ◽

Vol 352 (50-51) ◽

pp. 5251-5256 ◽

Cited By ~ 5

Author(s):

Stephan Puchegger ◽

Doris Brandhuber ◽

Nicola Hüsing ◽

Herwig Peterlik

Keyword(s):

High Temperature ◽

Mesoporous Silica ◽

Poisson’S Ratio ◽

Temperature Treatment ◽

Poisson's Ratio ◽

High Temperature Treatment ◽

Silica Monoliths

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Development of an Innovative Micro Capacitive Humidity Sensor With Double Polyimide Films and Interlacing Out-of-plane Electrodes Structure

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2007.352125 ◽

2007 ◽

Cited By ~ 2

Author(s):

I-Yu Huang ◽

Yao-Yu Lee ◽

Chang-Yu Lin

Keyword(s):

Humidity Sensor ◽

Polyimide Films ◽

Out Of Plane ◽

Capacitive Humidity Sensor

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Fabrication of Nanostructured Metal Oxide Thin Film Capacitive Humidity Sensor

Metal and Metal Oxides for Energy and Electronics - Environmental Chemistry for a Sustainable World ◽

10.1007/978-3-030-53065-5_10 ◽

2020 ◽

pp. 355-374

Author(s):

Anwar Ulla Khan ◽

Lokesh Kumar ◽

Tarikul Islam ◽

Mohammad Ehtisham Khan

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Humidity Sensor ◽

Oxide Thin Film ◽

Metal Oxide Thin Film ◽

Nanostructured Metal ◽

Capacitive Humidity Sensor

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Capacitive humidity sensor using a polyimide sensing film

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. ◽

10.1109/dtip.2003.1287041 ◽

2004 ◽

Cited By ~ 3

Author(s):

J. Laconte ◽

V. Wilmart ◽

J.-P. Raskin ◽

D. Flandre

Keyword(s):

Humidity Sensor ◽

Capacitive Humidity Sensor

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Capacitive humidity sensor in CMOS technology

10.1117/12.444724 ◽

2001 ◽

Cited By ~ 1

Author(s):

Xian-Wei Yan ◽

Ming Qin ◽

Qing-An Huang

Keyword(s):

Humidity Sensor ◽

Cmos Technology ◽

Capacitive Humidity Sensor

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High-performance capacitive humidity sensor based on silicon nanoporous pillar array

Thin Solid Films ◽

10.1016/j.tsf.2008.07.016 ◽

2008 ◽

Vol 517 (2) ◽

pp. 948-951 ◽

Cited By ~ 28

Author(s):

Long Yu Li ◽

Yong Fen Dong ◽

Wei Fen Jiang ◽

Hui Fang Ji ◽

Xin Jian Li

Keyword(s):

High Performance ◽

Humidity Sensor ◽

Pillar Array ◽

Capacitive Humidity Sensor

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