scholarly journals Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1028 ◽  
Author(s):  
Eurico Esteves Moreira ◽  
João Gaspar ◽  
Luis Alexandre Rocha

A Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated devices were fabricated in an in-house process on silicon on insulator wafers (SOI) and then tested in vacuum. The final devices have a differential configuration and experimental characterization shows a sensitivity of 4.59 Hz/mT for a total input current (on the Lorentz bar) of 1.5 mA.

2001 ◽  
Vol 705 ◽  
Author(s):  
A. Dietzel ◽  
R. Berger ◽  
H. Grimm ◽  
C. Schug ◽  
W. H. Bruenger ◽  
...  

AbstractCo/Pt thin film multilayers with strong perpendicular anisotropy and out-of-plane coercivities of 5-11 kOe were magnetically altered in areas of local ion beam interaction. The ion irradiations were performed by ion projection through silicon stencil masks fabricated by silicon on insulator (SOI) membrane technology. The ion projector at the Fraunhofer Institute for Silicon Technology (ISiT) was operated at 73 keV ion energy and with a 8.7- fold demagnification. After exposure to 3 × 1014Ar+/ cm2 magnetic islands smaller than 100 nm in diameter were resolved in the Co/Pt multilayersby means of magnetic force microscopy. The impact of different ion species (He+, Ar+ and Xe+) and ion energies (10 – 200 keV) on the multilayer structure was evaluated using Monte Carlo simulations. The ballistic interface intermixing was used to predict magnetic coercivity changes for various irradiation conditions. The simulations revealed that with 73 keV Ar+ and Xe+ ions the irradiation dose could be reduced by a factor of 100 and 400 respectively in comparison to 73 keV He+which was verified in the experiments. X-ray reflectivity measurements confirmed that the Co/Pt superlattice structure is slightly weakened during the irradiation and that the surface smoothness of the media is preserved. Using the Ion Projection Process Development Tool (PDT) at IMS-Vienna concentric data tracks including head positioning servo informations were patterned onto a 1” IBM microdrive™ glass disk which was coated with Co/Pt multilayers. In a single exposure step several tracks within an exposure field of 17 mm in diameter were structured by 2 × 1015He+/ cm2 at 45 keV using a 4- fold demagnification set-up.


Author(s):  
Risaku Toda ◽  
Eui-Hyeok Yang

This paper describes design, fabrication and characterization of a proof-of-concept vertical travel linear microactuator designed to provide out-of-plane actuation for high precision positioning applications in space. The microactuator is designed to achieve vertical actuation travel by incorporating compliant beam structures within a SOI (Silicon on Insulator) wafer. Device structure except for the piezoelectric actuator is fabricated on the SOI wafer using Deep Reactive Ion Etch (DRIE) process. Incremental travel distance of the piezoelectric actuator is adjustable at nanometer level by controlling voltage. Bistable beam geometry is employed to minimize initial gaps between electrodes. The footprint of an actuator is approximately 2 mm × 4 mm. Actuation is characterized with LabVIEW-based test bed. Actuation voltage sequence is generated by the LabVIEW controlled power relays. Vertical actuation in the range of 500 nm over 10-cycle was observed using WYKO RST Plus Optical Profiler.


2012 ◽  
Vol 51 (34) ◽  
pp. 8090 ◽  
Author(s):  
Miguel Cabezón ◽  
Ignacio Garcés ◽  
Asier Villafranca ◽  
José Pozo ◽  
Pragati Kumar ◽  
...  

2021 ◽  
Vol 922 (2) ◽  
pp. L38
Author(s):  
Christopher F. Chyba ◽  
Kevin P. Hand

Abstract Two forms of ohmic heating of astrophysical secondaries have received particular attention: unipolar-generator heating with currents running between the primary and secondary, and magnetic induction heating due to the primary’s time-varying field. Neither appears to cause significant dissipation in the contemporary solar system. But these discussions have overlooked heating derived from the spatial variation of the primary’s field across the interior of the secondary. This leads to Lorentz-force-driven currents around paths entirely internal to the secondary, with resulting ohmic heating. We examine three ways to drive such currents, by the cross product of (1) the secondary’s azimuthal orbital velocity with the nonaxially symmetric field of the primary, (2) the radial velocity (due to nonzero eccentricity) of the secondary with the primary’s field, or (3) the out-of-plane velocity (due to nonzero inclination) with the primary’s field. The first of these operates even for a spin-locked secondary whose orbit has zero eccentricity, in strong contrast to tidal dissipation. We show that Jupiter’s moon Io today could dissipate about 600 GW (more than likely current radiogenic heating) in the outer 100 m of its metallic core by this mechanism. Had Io ever been at 3 Jovian radii instead of its current 5.9, it could have been dissipating 15,000 GW. Ohmic dissipation provides a mechanism that could operate in any solar system to drive inward migration of secondaries that then necessarily comes to a halt upon reaching a sufficiently close distance to the primary.


2015 ◽  
Vol 13 (9) ◽  
pp. 2667-2692 ◽  
Author(s):  
Tiago Miguel Ferreira ◽  
Alexandre A. Costa ◽  
António Arêde ◽  
Ana Gomes ◽  
Aníbal Costa

2021 ◽  
Vol 244 ◽  
pp. 112755
Author(s):  
Marta Agante ◽  
André Furtado ◽  
Hugo Rodrigues ◽  
António Arêde ◽  
Paulo Fernandes ◽  
...  

Materials ◽  
2018 ◽  
Vol 12 (1) ◽  
pp. 9 ◽  
Author(s):  
Pasquale D’Angelo ◽  
Giuseppe Tarabella ◽  
Agostino Romeo ◽  
Simone Marasso ◽  
Alessio Verna ◽  
...  

Organic electrochemical transistors (OECTs) represent a powerful and versatile type of organic-based device, widely used in biosensing and bioelectronics due to potential advantages in terms of cost, sensitivity, and system integration. The benchmark organic semiconductor they are based on is poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS), the electrical properties of which are reported to be strongly dependent on film morphology and structure. In particular, the literature demonstrates that film processing induces morphostructural changes in terms of conformational rearrangements in the PEDOT:PSS in-plane phase segregation and out-of-plane vertical separation between adjacent PEDOT-rich domains. Here, taking into account these indications, we show the thickness-dependent operation of OECTs, contextualizing it in terms of the role played by PEDOT:PSS film thickness in promoting film microstructure tuning upon controlled-atmosphere long-lasting thermal annealing (LTA). To do this, we compared the LTA-OECT response to that of OECTs with comparable channel thicknesses that were exposed to a rapid thermal annealing (RTA). We show that the LTA process on thicker films provided OECTs with an enhanced amplification capability. Conversely, on lower thicknesses, the LTA process induced a higher charge carrier modulation when the device was operated in sensing mode. The provided experimental characterization also shows how to optimize the OECT response by combining the control of the microstructure via solution processing and the effect of postdeposition processing.


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