A Simple Extraction Method of Young’s Modulus for Multilayer Films in MEMS Applications
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1993 ◽
Vol 12
(16)
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pp. 1333-1334
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1985 ◽
Vol 46
(C8)
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pp. C8-561-C8-565
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2011 ◽
Vol 695
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pp. 170-173
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