scholarly journals Investigation on Design Theory and Performance Analysis of Vacuum Capacitive Micromachined Ultrasonic Transducer

Micromachines ◽  
2021 ◽  
Vol 12 (9) ◽  
pp. 1127
Author(s):  
Xiao Huang ◽  
Hongliang Wang ◽  
Lijun Yu

The capacitive micromachined ultrasonic transducer (CMUT), as a new acoustic-electric conversion element, has a promising application prospect. In this paper, the structure of the vacuum capacitive micromachined ultrasonic transducer is presented, and its performance-influencing factors are investigated. Firstly, the influencing factors of the performance parameters of the vacuum CMUT are analyzed theoretically based on the circular plate model and flat plate capacitance model, and the design principles of the structural parameters of the CMUT cell are proposed. Then, the finite element simulation software COMSOL Multiphysics is used to construct CMUT cell models with different membrane materials, membrane shapes, membrane radius thicknesses, and cavity heights for simulation verification. The results show that both the membrane parameters and the cavity heights affect the performance parameters of the Vacuum CMUT. In order to improve the efficiency of the CMUT, materials with low bending stiffness should be selected, and the filling factor of the membrane should be increased. In order to achieve high-transmission sound pressure, a smaller radius thickness and a larger cavity height should be selected. To achieve high reception sensitivity, a larger membrane radius thickness and a smaller cavity height should be selected. In order to obtain high fractional bandwidth, a larger membrane radius thickness should be selected. The results of this paper provide a basis for the design of Vacuum CMUT cell structure.

Materials ◽  
2021 ◽  
Vol 14 (13) ◽  
pp. 3701
Author(s):  
Xuepeng Zhang ◽  
Zhijun Wang ◽  
Jianping Yin ◽  
Jianya Yi ◽  
Haifu Wang

The incorporation of reactive material damage element technology in ammunition warheads is a research hotspot in the development of conventional ammunition. The research results are of great significance and military application value to promote the development of high-efficiency damage ammunition technology. In this paper, we aimed to understand the behavior of the reactive jet and its damage effect on a steel target by undertaking theoretical analysis, numerical simulation, and experimental research. We studied the influence of structural and material parameters on the shape of the reactive jet based on autodyn-2d finite element simulation software, and the formation behavior of the reactive jet was verified using a pulsed X-ray experiment. By studying the combined damage caused by the steel target penetrating and exploding the reactive jet, the influence of the structural and performance parameters, and the explosion height of the reactive jet liner on the damage effect to the steel target was studied. A static explosion experiment was carried out, and the optimal structural and performance parameters for the reactive material and explosion height of the reactive jet liner were obtained.


Micromachines ◽  
2021 ◽  
Vol 12 (10) ◽  
pp. 1180
Author(s):  
Hongliang Wang ◽  
Xiao Huang ◽  
Lijun Yu ◽  
Qi Ding ◽  
Hanqiang Zhang ◽  
...  

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent characteristics. This paper studies the method of increasing the bandwidth of the CMUT, proposes the structure of the wideband CMUT with a hybrid cell structure, and analyzes the design principles and characteristics of the wideband CMUT structure. By changing the cell spacing and the number of cells of different sizes composing the CMUT, we analyze the simulation of the effect of the spacing and number on the CMUT bandwidth, thereby optimizing the bandwidth characteristics of the CMUT. Next, the selection principle of the main structural parameters of the wideband CMUT is analyzed. According to the proposed principle, the CMUT in the air and water are designed and simulated. The results prove that both the air and water CMUT meet the design requirements. The design rules obtained in this paper can provide theoretical guidance for the selection of the main structural parameters of the wideband CMUT.


2011 ◽  
Vol 282-283 ◽  
pp. 440-443
Author(s):  
Ping Zhang ◽  
Chun Lei Sun ◽  
Qing’en Li

The relevant introduction development of the micro electromechanical systems (MEMS) is carried out in this paper. The pressure sensor is an important component of micro electromechanical systems (MEMS). Many aspects of the pressure sensor are studied,simulated and analyzed by us. The principle of work of the pressure sensor is elaborated in details and the material selection is studied also. The correlative performance indexes, such as precision and the repeatability of pressure sensor, are explored. In the following part of this paper, through the finite element simulation software, the analytic study of some performance parameters of the sensor chip is carried out in detail. Through the analysis, we find that the sensor designed here has many advantages.


2014 ◽  
Vol 1028 ◽  
pp. 278-283
Author(s):  
De Yue Cao ◽  
Yang Zhang ◽  
Yi Zou

This paper briefly introduces the function of LC three point oscillation circuit and the study of the composition and performance parameters of capacitance three point oscillation circuit, inductance three point oscillation circuit and modified capacitance three point oscillation circuit based on the Multisim simulation software.


2016 ◽  
Vol 67 (1) ◽  
pp. 26 ◽  
Author(s):  
Weibing Li ◽  
Huan Zhou ◽  
Wenbin Li ◽  
Xiaoming Wang ◽  
Jianjun Zhu

<p>A shaped charge was produced with a wave shaper that can transform dual-mode penetrators by changing the single-point detonation location. Specifically, the theory of denotation wave formation was applied to analyze changes in the liner surface pressure in different initiation situations. An analytical model was established of the projectile explosively formed by denotation at the top of the liner and jetting projectile charge formed by denotation at the center of charge. LS-DYNA finite element simulation software was used to study the effects of the liner configuration parameters on the formation of dual-mode penetrators, and orthogonal optimizing design and simulation calculation was conducted to obtain suitable structural parameters of a uniform-thickness eccentric hemisphere liner. X-ray imaging and penetration experiments were then conducted. The penetration depth of the explosively formed projectile in a steel target was 0.64<em>D</em><sub>k</sub>(the charge diameter),while that of the jetting projectile charge was 2.42<em>D</em><sub>k</sub> when the burst height was approximately 13<em>D</em><sub>k</sub>.</p>


2019 ◽  
Vol 13 (2) ◽  
pp. 108-116
Author(s):  
Rashmi Sharma ◽  
Rekha Agarwal ◽  
Ashwani Kumar Dubey ◽  
Anil Arora

Background:Objective:To simulate a Micromechanical systems (MEMS) based CMUT working as a transmitter with the existing design and provide comparison within the possible architectural geometries.Methods:FEM simulation software COMSOL is used to simulate the 3D model of the transducer radiating in the air. The classical thin-plate theory is employed to solve for CMUT with a circular shape which is sufficient when the ratio of the diameter to thickness of the plate is very large, an aspect common in CMUTs. The Galerkin-weighted residual technique is used to get a solution for thin plate equation with the presumption that the deflections are small in comparison to the thickness of the plate.Results:The resonant frequency of CMUT with different geometries have been calculated. The deflection of membrane with applied DC bias is shown along with collapse voltage calculation. The generated ultrasound is shown with the AC bias superimposed on the DC bias. The capacitance change with the increasing DC voltage is discussed. The deflection of membrane is maximum as the resonance frequency is proved.Conclusion:The review of Capacitive Micromachined Ultrasonic Transducer architectures with different shapes is highlighted. The working behavior of CMUT with suitable dimension is simulated in 3D providing researcher data to wisely choose the CMUT prior to the fabrication. The CMUT is prioritized on various characteristics like wafer area utilization, deflection percentage within the cavity and durability of the transducer.


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