scholarly journals Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 930
Author(s):  
Hassen M. Ouakad ◽  
Nouha Alcheikh ◽  
Mohammad I. Younis
Keyword(s):  
Expansion Method ◽  
Geometrical Parameters ◽  
Parallel Plates ◽  
Reduced Order ◽  
Shallow Arches ◽  
Static And Dynamic Analysis ◽  
Electrostatically Actuated ◽  
Static Responses ◽  
Wide Range ◽  
Electrically Actuated

In this research, we investigate the structural behavior, including the snap-through and pull-in instabilities, of in-plane microelectromechanical COSINE-shaped and electrically actuated clamped-clamped micro-beams resonators. The work examines various electrostatic actuation patterns including uniform and non-uniform parallel-plates airgap arrangements, which offer options to actuate the arches in the opposite and same direction of their curvature. The nonlinear equation of motion of a shallow arch is discretized into a reduced-order model based on the Galerkin’s expansion method, which is then numerically solved. Static responses are examined for various DC electrostatic loads starting from small values to large values near pull-in and snap-through instability ranges, if any. The eigenvalue problem of the micro-beam is solved revealing the variations of the first four natural frequencies as varying the DC load. Various simulations are carried out for several case studies of shallow arches of various geometrical parameters and airgap arrangements, which demonstrate rich and diverse static and dynamic behaviors. Results show few cases with multi-states and hysteresis behaviors where some with only the pull-in instability and others with both snap-through buckling and pull-in instabilities. It is found that the micro-arches behaviors are very sensitive to the electrode’s configuration. The studied configurations reveal different possibilities to control the pull-in and snap-through instabilities, which can be used for improving arches static stroke range as actuators and for realizing wide-range tunable micro-resonators.

Tristable Properties in Electrostatically Actuated Initially Curved Coupled Micro Beams

2021 ◽  
Author(s):  
Lior Medina ◽  
Ashwin A. Seshia
Keyword(s):  
Degrees Of Freedom ◽  
Geometrical Parameters ◽  
Curved Beams ◽  
Buckling Modes ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Critical Thresholds ◽  
All Solutions ◽  
Base Functions

Abstract A limit point behaviour analysis of a metastructure, composed of two double clamped, initially curved beams, coupled via a rigid truss at their respective centres, is carried out when subjected to a distributed electrostatic load. The analysis is based on a reduced order (RO) model resulting from Galerkin’s decomposition, with symmetric buckling modes taken as the base functions, for either beam. All solutions employed the implicit arc-length “Riks” method to accommodate for winding equilibrium paths, while validation of the said results were carried out against finite differences (FD) direct solutions. In addition, local stability analysis via the energy method, conducted on the primary beam was instrumental in clarifying the role of the various extremum points by characterising which branches are stable, and which are not. The combined analysis has shown that the driving beam, which directly encounters the load, is able to possess bistable as well as tristable properties, provided that the metastructure meets certain geometrical parameters. Several variations of tristability are disclosed in the study. The analysis indicates that a model with at least three degrees of freedom (DOF) is needed to predict such configurations, as well as the various critical thresholds, with reasonable errors of around one percent when compared against FD. In so doing, the model can be used to provide static characterisation of the structure.

Comprehensive Reduced-Order Models of Electrostatically Actuated Curved MEMS Switches and Their Dynamics Including Impact and Bounce

2011 ◽  
Author(s):  
Michael G. Snow ◽  
Anil K. Bajaj
Keyword(s):  
Time Integration ◽  
Cantilever Beams ◽  
Order Model ◽  
Reduced Order ◽  
Mems Switches ◽  
Electrostatically Actuated ◽  
Wide Range ◽  
Clamped Beams ◽  
The Rich ◽  
Mechanical Devices

As Micro and Nano Electro-Mechanical devices continue to find more applications, the electrostatically actuated micro-beam remains one of the most frequently used structures due to its usefulness and relative simplicity of fabrication. Accurate models of these devices which are valid under a wide range of circumstances are important both for design as well as metrology efforts. Often certain device parameters are implicitly extracted via a mathematical model when they are very difficult to measure directly. This work details the development and results of a reduced-order model for the behavior of an electrostatically actuated beam. The model accounts for arbitrary initial curvature, residual stress, flexible boundary conditions and contact, while including accurate sub-models for the electrostatic and damping forces. The equation of motion of the beam is discretized via the traditional Galerkin method. Static and dynamic solutions are found through specified displacement schemes and direct time integration, respectively. The rich behavior of these systems can easily be seen in the results. Arched doubly-clamped beams can show a variety of bi-stable configurations and tri-stable solutions can be seen in the post-contact behavior of cantilever beams. Dynamic solutions reveal phenomena such as dynamic pull-in, dynamic snap-through, and bouncing behavior. The widely valid model presented here generally converges quickly and is well suited for design, analysis and uncertainty quantification.

scholarly journals Investigation of an electrostatically actuated imperfect circular microplate under transverse pressure for pressure sensor applications

2021 ◽  
Author(s):  
Mainakh Das ◽  
Anand Bhushan
Keyword(s):  
Pressure Sensor ◽  
Electrostatic Force ◽  
Equation Of Motion ◽  
Reduced Order ◽  
Static And Dynamic Analysis ◽  
Electrostatically Actuated ◽  
Sensor Applications ◽  
Transverse Pressure ◽  
Element Simulation ◽  
Circular Microplate

Abstract In this paper, we present static and dynamic analysis of an electrostatically actuated imperfect circular microplate under transverse pressure. In modelling of the microplate, we have included both von Kármán geometric and electrostatic force nonlinearities in the development of the equation of motion. The equation of motion has been solved using Galerkin based reduced order modelling technique. The developed reduced order model has been first validated by comparing it with finite element simulation results. Further, the effects of imperfection as initial curvature and uniform transverse pressure have been investigated on the static and dynamic characteristics of the electrostatically actuated circular microplate. We have also investigated the effects of imperfection and applied DC voltage on the pressure sensitivity of the circular microplate. We have found that both imperfection and electrostatic load are responsible for appreciable variations in sensitivity. This detailed investigation is useful to design an imperfect micro pressure sensor.

scholarly journals Hydromechanics of low-Reynolds-number flow. Part 2. Singularity method for Stokes flows

1975 ◽  
Vol 67 (4) ◽  
pp. 787-815 ◽  
Author(s):  
Allen T. Chwang ◽  
T. Yao-Tsu Wu
Keyword(s):  
Exact Solutions ◽  
Stokes Flow ◽  
Fundamental Solutions ◽  
The Body ◽  
Circular Cylinders ◽  
Geometrical Parameters ◽  
Flow Problems ◽  
Singularity Method ◽  
Wide Range ◽  
Body Shapes

The present study further explores the fundamental singular solutions for Stokes flow that can be useful for constructing solutions over a wide range of free-stream profiles and body shapes. The primary singularity is the Stokeslet, which is associated with a singular point force embedded in a Stokes flow. From its derivatives other fundamental singularities can be obtained, including rotlets, stresslets, potential doublets and higher-order poles derived from them. For treating interior Stokes-flow problems new fundamental solutions are introduced; they include the Stokeson and its derivatives, called the roton and stresson.These fundamental singularities are employed here to construct exact solutions to a number of exterior and interior Stokes-flow problems for several specific body shapes translating and rotating in a viscous fluid which may itself be providing a primary flow. The different primary flows considered here include the uniform stream, shear flows, parabolic profiles and extensional flows (hyper-bolic profiles), while the body shapes cover prolate spheroids, spheres and circular cylinders. The salient features of these exact solutions (all obtained in closed form) regarding the types of singularities required for the construction of a solution in each specific case, their distribution densities and the range of validity of the solution, which may depend on the characteristic Reynolds numbers and governing geometrical parameters, are discussed.

Local Hydrostatic Pressure Test for Cylindrical Vessels

2016 ◽  
Vol 139 (1) ◽  
Author(s):  
H. Al-Gahtani ◽  
A. Khathlan ◽  
M. Sunar ◽  
M. Naffa'a
Keyword(s):  
Finite Element Method ◽  
Finite Element ◽  
Hydrostatic Pressure ◽  
Cylindrical Vessel ◽  
Geometrical Parameters ◽  
The Finite Element Method ◽  
Wide Range ◽  
Pressure Test ◽  
Local Test ◽  
Alternative Test

The juncture of a small cylindrical nozzle to a large cylindrical vessel is very common in the pressure vessel industry. Upon fabrication, it is required that the whole structure is subjected to pressure testing. The test can be expensive as it necessitates pressurizing the whole structure typically having a large volume. Hence, it is proposed to make a “local test,” which is considerably simpler as it involves capping the small nozzle and testing only a relatively small portion of the structure. This paper investigates the accuracy and reliability of such an alternative test, using the finite-element method. Two different finite-element types are used in the study, specifically a shell-based element and a solid-based element. The verification of the finite-element results for two different cases shows that the models used in the study are valid. It also proves that the two element types yield very similar stress results. In addition, the study includes a numerical investigation of more than 40 different nozzle-to-vessel junctures with a wide range of parameters for the nozzle and vessel. The results indicate that the use of cylindrical caps that are slightly larger than the nozzle is not recommended as it produces stresses that are significantly different from those for the original required pressure test. As such, the study provides an estimate of the smallest size of the cap that may be used in the local test to generate stresses that agree with the full test. For most practical geometries, it is shown that the size of the cap needs to be at least 2–30 times larger than that of the nozzle, depending on the geometrical parameters of the juncture.

The Static and Dynamic Behavior of MEMS Arches Under Electrostatic Actuation

2009 ◽  
Author(s):  
Hassen M. Ouakad ◽  
Mohammad I. Younis ◽  
Fadi M. Alsaleem ◽  
Ronald Miles ◽  
Weili Cui
Keyword(s):  
Multiple Scales ◽  
Perturbation Technique ◽  
Dynamical Behavior ◽  
Primary Resonance ◽  
Reduced Order Model ◽  
Harmonic Load ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Model Equations

In this paper, we investigate theoretically and experimentally the static and dynamic behaviors of electrostatically actuated clamped-clamped micromachined arches when excited by a DC load superimposed to an AC harmonic load. A Galerkin based reduced-order model is used to discretize the distributed-parameter model of the considered shallow arch. The natural frequencies of the arch are calculated for various values of DC voltages and initial rises of the arch. The forced vibration response of the arch to a combined DC and AC harmonic load is determined when excited near its fundamental natural frequency. For small DC and AC loads, a perturbation technique (the method of multiple scales) is also used. For large DC and AC, the reduced-order model equations are integrated numerically with time to get the arch dynamic response. The results show various nonlinear scenarios of transitions to snap-through and dynamic pull-in. The effect of rise is shown to have significant effect on the dynamical behavior of the MEMS arch. Experimental work is conducted to test polysilicon curved microbeam when excited by DC and AC loads. Experimental results on primary resonance and dynamic pull-in are shown and compared with the theoretical results.

Reduced Order Model of MEMS Sensors Near Natural Frequency

2011 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Jose C. Solis Silva
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Mass Detection ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated

The nonlinear response of an electrostatically actuated cantilever beam microresonator sensor for mass detection is investigated. The excitation is near the natural frequency. A first order fringe correction of the electrostatic force, viscous damping, and Casimir effect are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for uniform microresonators with mass deposition and without are reported.

A Reduced-Order Model for the Preliminary Design of Small-Scale Radial Inflow Turbines

2021 ◽  
Author(s):  
Marco Manfredi ◽  
Marco Alberio ◽  
Marco Astolfi ◽  
Andrea Spinelli
Keyword(s):  
Heat Recovery ◽  
Internal Combustion Engines ◽  
Reduced Order Model ◽  
Pollutant Emissions ◽  
Small Scale ◽  
Preliminary Design ◽  
Order Model ◽  
Reduced Order ◽  
Wide Range ◽  
Loss Models

Abstract Power production from waste heat recovery represents an attractive and viable solution to contribute to the reduction of pollutant emissions generated by industrial plants and automotive sector. For transport applications, a promising technology can be identified in bottoming mini-organic Rankine cycles (ORCs), devoted to heat recovery from internal combustion engines (ICE). While commercial ORCs exploiting turbo-expanders in the power range of hundreds kW to several MW are a mature technology, well-established design guidelines are not yet available for turbines targeting small power outputs (below 50 kW). The present work develops a reduced-order model for the preliminary design of mini-ORC radial inflow turbines (RITs) for high-pressure ratio applications, suitable to be integrated in a comprehensive cycle optimization. An exhaustive review of existing loss models, whose development pattern is retraced up to the original approaches, is proposed. This investigation is finalized in a loss models effectiveness analysis performed by testing several correlations over six existing geometries. These test case turbines, operating with different fluids and covering a wide range of target expansion ratio, size, and gross power output, are then employed to carry out the validation procedure, whose results prove the robustness and prediction capability of the proposed reduced-order model.

Turbulent Heat Transfer Between a Series of Parallel Plates With Surface-Mounted Discrete Heat Sources

1994 ◽  
Vol 116 (3) ◽  
pp. 577-587 ◽  
Author(s):  
S. H. Kim ◽  
N. K. Anand
Keyword(s):  
Heat Transfer ◽  
Thermal Resistance ◽  
Electronic Equipment ◽  
Turbulent Heat Transfer ◽  
Turbulent Heat ◽  
Computational Domain ◽  
Heat Sources ◽  
Parallel Plates ◽  
Wide Range ◽  
Independent Parameters

Two-dimensional turbulent heat transfer between a series of parallel plates with surface mounted discrete block heat sources was studied numerically. The computational domain was subjected to periodic conditions in the streamwise direction and repeated conditions in the cross-stream direction (Double Cyclic). The second source term was included in the energy equation to facilitate the correct prediction of a periodically fully developed temperature field. These channels resemble cooling passages in electronic equipment. The k–ε model was used for turbulent closure and calculations were made for a wide range of independent parameters (Re, Ks/Kf, s/w, d/w, and h/w). The governing equations were solved by using a finite volume technique. The numerical procedure and implementation of the k–ε model was validated by comparing numerical predictions with published experimental data (Wirtz and Chen, 1991; Sparrow et al., 1982) for a single channel with several surface mounted blocks. Computations were performed for a wide range of Reynolds numbers (5 × 104–4 × 105) and geometric parameters and for Pr = 0.7. Substrate conduction was found to reduce the block temperature by redistributing the heat flux and to reduce the overall thermal resistance of the module. It was also found that the increase in the Reynolds number decreased the thermal resistance. The study showed that the substrate conduction can be an important parameter in the design and analysis of cooling channels of electronic equipment. Finally, correlations for the friction factor (f) and average thermal resistance (R) in terms of independent parameters were developed.

Aeroelastic Optimization of an Industrial Compressor Rotor Blade Geometry

2018 ◽  
Author(s):  
Federico Vanti ◽  
Lorenzo Pinelli ◽  
Andrea Arnone ◽  
Andrea Schneider ◽  
Pio Astrua ◽  
...  
Keyword(s):  
Numerical Procedure ◽  
Optimization Procedure ◽  
Multidisciplinary Optimization ◽  
Optimization Process ◽  
Geometrical Parameters ◽  
Aerodynamic Optimization ◽  
Compressor Rotor ◽  
Wide Range ◽  
Automatic Optimization ◽  
Blade Geometry

This paper describes a multidisciplinary optimization procedure applied to a compressor blade-row. The numerical procedure takes into account both aerodynamic (efficiency) and aeromechanic (flutter-free design) goals nowadays required by turbo-machinery industries and is applied to a low pressure compressor rotor geometry provided by Ansaldo Energia S.p.A.. Some typical geometrical parameters have been selected and modified during the automatic optimization process in order to generate an optimum geometry with an improved efficiency and, at the same time, a safety flutter margin. This new automatic optimization procedure, which now includes a flutter stability assessment, is an extension of an existing aerodynamic optimization process, which randomly perturbs a starting 3D blade geometry inside a constrained range of values, build the fluid mesh and run the CFD steady analysis. The new implementation provides the self-building of the solid mesh, the FEM analysis and finally the unsteady uncoupled aeroelastic analysis to assess the flutter occurrence. After simulating a wide range of geometries, a database with all the constraint parameters and objective functions is obtained and then used to train a neural network algorithm. Once the ANN validation error is converged, an optimization strategy is used to build the Pareto front and to provide a set of optimum geometries redesigning the original compressor rotor. The aim of this paper is to show the opportunity to also take into account the aeroelastic issues in optimization processes.

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