scholarly journals Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS 0.18 μm Process

Micromachines ◽  
2021 ◽  
Vol 12 (6) ◽  
pp. 635
Author(s):  
Chih-Hsuan Lin ◽  
Chao-Hung Song ◽  
Kuei-Ann Wen
Keyword(s):  
Resonant Frequency ◽  
Tuning Range ◽  
Dynamic Range ◽  
Ambient Pressure ◽  
Readout Circuit ◽  
Microelectromechanical System ◽  
Correlated Double Sampling ◽  
Driving Current ◽  
Mems Oscillator ◽  
Oscillation Characteristics

In this study, a multi-function microelectromechanical system (MEMS) was integrated with a MEMS oscillator, using the resonant frequency oscillation characteristics of the oscillator to provide the Lorentz current of the magnetometer to enhance a large dynamic range of reading, which eliminates the off-chip clock and current generator. The resonant frequency can be adjusted by adjusting the bias voltage of the oscillator to further adjust the sensitivity of the magnetometer. With the mechanical Q value characteristic, a great dynamic range can be achieved. In addition, using the readout circuit of the nested chopper and correlated double-sampling (CDS) to reduce the noise and achieve a smaller resolution, the calibration circuit compensates for errors caused by the manufacturing process. The frequency of the tuning range of the proposed structure is 17,720–19,924 Hz, and the tuning range of the measurement result is 110,620.36 ppm. The sensitivities of the x-, y-, and z-axes of the magnetometer with driving current of 2 mA are 218.3, 74.33, and 7.5 μV/μT for ambient pressure of 760 torr. The resolutions of the x-, y-, and z-axes of the magnetometer with driving current of 2 mA are 3.302, 9.69, and 96 nT/√Hz for ambient pressure of 760 torr.

A Low-Power Wide Dynamic-Range Current Readout Circuit for Ion-Sensitive FET Sensors

2017 ◽  
Vol 11 (3) ◽  
pp. 523-533 ◽  
Author(s):  
Hyunwoo Son ◽  
Hwasuk Cho ◽  
Jahyun Koo ◽  
Youngwoo Ji ◽  
Byungsub Kim ◽  
...  
Keyword(s):  
Low Power ◽  
Dynamic Range ◽  
Readout Circuit ◽  
Wide Dynamic Range

scholarly journals A Sub-mW 18-MHz MEMS Oscillator Based on a 98-dBΩ Adjustable Bandwidth Transimpedance Amplifier and a Lamé-Mode Resonator

Sensors ◽  
2019 ◽  
Vol 19 (12) ◽  
pp. 2680
Author(s):  
Anoir Bouchami ◽  
Mohannad Y. Elsayed ◽  
Frederic Nabki
Keyword(s):  
Phase Noise ◽  
Cmos Technology ◽  
High Gain ◽  
Transimpedance Amplifier ◽  
Short Term ◽  
Microelectromechanical System ◽  
Fully Differential ◽  
Mems Oscillator ◽  
Measured Input ◽  
Mode Resonator

This paper presents a microelectromechanical system (MEMS)-based oscillator based on a Lamé-mode capacitive micromachined resonator and a fully differential high-gain transimpedance amplifier (TIA). The proposed TIA is designed using TSMC 65 nm CMOS technology and consumes only 0.9 mA from a 1-V supply. The measured mid-band transimpedance gain is 98 dB Ω and the TIA features an adjustable bandwidth with a maximum bandwidth of 142 MHz for a parasitic capacitance C P of 4 pF. The measured input-referred current noise of the TIA at mid-band is below 15 pA/ Hz . The TIA is connected to a Lamé-mode resonator, and the oscillator performance in terms of phase noise and frequency stability is presented. The measured phase noise under vacuum is −120 dBc/Hz at a 1-kHz offset, while the phase noise floor reaches −127 dBc/Hz. The measured short-term stability of the MEMS-based oscillator is ±0.25 ppm.

THz Spectroscopic Imaging of Chemicals Using IS-TPG

2016 ◽  
Vol 25 (03n04) ◽  
pp. 1640016
Author(s):  
Kosuke Murate ◽  
Mikiya Kato ◽  
Kodo Kawase
Keyword(s):  
Illicit Drugs ◽  
Tuning Range ◽  
Dynamic Range ◽  
Spectroscopic Imaging ◽  
Thz Wave ◽  
Non Destructive ◽  
Parametric Source ◽  
Wave Spectrometer

In 2003, we demonstrated a non-destructive terahertz spectroscopic imaging of illicit drugs hidden in envelopes using a widely tunable THz-wave parametric source, though its dynamic range at that time was less than four orders. Recently, we have realized more than nine orders of dynamic range with an evolved injection seeded THz-wave spectrometer. Now we can detect drugs under much thicker obstacles than before. In this report, we introduce the result of THz spectroscopic imaging of chemicals under thick envelopes and related topics; Enhanced tuning range of is-TPG up to 5 THz and >90 dB dynamic range THz spectroscopic system.

A 99.95% linearity readout circuit with 72 dB dynamic range for active pixel sensors

2017 ◽  
Author(s):  
Leonardo Bruno de Sá ◽  
Mauricio Henrique Costa Dias ◽  
Antoine Dupret ◽  
Antonio Carneiro de Mesquita Filho
Keyword(s):  
Dynamic Range ◽  
Readout Circuit ◽  
Active Pixel Sensors ◽  
Active Pixel ◽  
Pixel Sensors

Readout Circuit for Uncooled Pyroelectric IRFPA

2011 ◽  
Vol 84-85 ◽  
pp. 284-288
Author(s):  
Fei Bao Lu ◽  
Guo Lin Lu ◽  
You Shu Huang ◽  
Xiang Hui Yuan
Keyword(s):  
Power Dissipation ◽  
Infrared Detector ◽  
Cmos Technology ◽  
Shift Register ◽  
Double Sampling ◽  
Readout Circuit ◽  
Thermal Images ◽  
Correlated Double Sampling ◽  
Circuit Configuration

A 320×240 readout circuit (ROIC) for the uncooled pyroelectric infrared detector was fabricated in the double-poly-double-metal (DPDM) N-well CMOS technology. Composed of X- and Y-shift register, column amplifier and correlated double sampling (CDS) circuit, the readout circuit integrated signal from the detector for frame time. It has the pitch of 50um and power dissipation of less than 50 mW. The circuit configuration, operation and testing result are described. Testing result indicates that the designed circuit meets with the requirement. Thermal images were obtained by the hybrid-integrated sensing array.

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