scholarly journals A Simple Low-Temperature Glass Bonding Process with Surface Activation by Oxygen Plasma for Micro/Nanofluidic Devices

Micromachines ◽  
2020 ◽  
Vol 11 (9) ◽  
pp. 804
Author(s):  
Koki Shoda ◽  
Minori Tanaka ◽  
Kensuke Mino ◽  
Yutaka Kazoe
Keyword(s):  
Low Temperature ◽  
Silica Glass ◽  
Oxygen Plasma ◽  
Substrate Surface ◽  
Fused Silica ◽  
Bonding Energy ◽  
Surface Activation ◽  
Glass Substrates ◽  
Nanofluidic Devices ◽  
Fused Silica Glass

The bonding of glass substrates is necessary when constructing micro/nanofluidic devices for sealing micro- and nanochannels. Recently, a low-temperature glass bonding method utilizing surface activation with plasma was developed to realize micro/nanofluidic devices for various applications, but it still has issues for general use. Here, we propose a simple process of low-temperature glass bonding utilizing typical facilities available in clean rooms and applied it to the fabrication of micro/nanofluidic devices made of different glasses. In the process, the substrate surface was activated with oxygen plasma, and the glass substrates were placed in contact in a class ISO 5 clean room. The pre-bonded substrates were heated for annealing. We found an optimal concentration of oxygen plasma and achieved a bonding energy of 0.33–0.48 J/m2 in fused-silica/fused-silica glass bonding. The process was applied to the bonding of fused-silica glass and borosilicate glass, which is generally used in optical microscopy, and revealed higher bonding energy than fused-silica/fused-silica glass bonding. An annealing temperature lower than 200 °C was necessary to avoid crack generation by thermal stress due to the different thermal properties of the glasses. A fabricated micro/nanofluidic device exhibited a pressure resistance higher than 600 kPa. This work will contribute to the advancement of micro/nanofluidics.

Optical Characteristics of Erbium-Doped SiO2/PVA Electrospun Nanofibers

2015 ◽  
Vol 1108 ◽  
pp. 59-66
Author(s):  
M. Kamil Abd-Rahman ◽  
N.F.M. Suhaimi ◽  
Evy Evana Edwin ◽  
Winnie Dian ◽  
Nur Hanis Abdul Halim
Keyword(s):  
Silica Glass ◽  
Sol Gel ◽  
Electrospun Nanofibers ◽  
Fused Silica ◽  
Optical Characteristics ◽  
Glass Substrates ◽  
Erbium Doped ◽  
Pva Solutions ◽  
Er Doped ◽  
Fused Silica Glass

This paper reports on the fabrication and optical characteristics of erbium-doped silica/PVA nanofibers via sol gel and electrospinning techniques. Silica glass, PVA (polyvinyl alcohol) and SiO2/PVA composites displayed 85% to 90% transparent across 300 2000 nm wavelength range. The transmission spectra were measured using Cary 5000 UV-Vis-NIR spectrophotometer. Silica was synthesized using TEOS (tetraethylorthosilicate) as the precursor, while PVA solution comprised of 7.0 wt% in H2O. The compositional ratios of SiO2:PVA were from 6:4 to 1:9 and were doped with 0.2% to 0.6% of erbium. Suitable viscosities of Er3+-doped SiO2:PVA solutions were electrospun into mesh of long strands nanofibers. Morphological and material compositions in the nanofibers were analysed using FESEM (field-emission scanning electron microscopy) and EDX (energy-dispersive X-ray spectroscopy). Er3+-doped SiO2:PVA thin films were coated on fused-silica glass substrates via spin coating and were characterized for their refractive indices, optical transmission, and fluorescence using M-line technique, UV-Vis-NIR spectrometer and photoluminescence spectrophotometer, respectively. Lower ratios of silica to PVA solutions results in higher viscosities and produced more uniform nanofiber structures of diameters around 100 nm with lesser beads. The refractive index of 1.61 for Er-doped SiO2:PVA (1:9) thin film was measured with TE polarized 632.8 nm wavelength laser and the index shows to be higher for more content of PVA in the glass/polymer composites. The 0.4% of Er3+ in SiO2:PVA composite produced the highest luminescence intensity at 605 nm when excited with 514 nm source. Higher doping content caused ion clustering effect and leads to concentration quenching, hence decreased in the emission intensity.

Spectral Properties of Spatially and Spectrally Partially Coherent Pulsed Beams in Fused-Silica Glass Medium

2010 ◽  
Vol 663-665 ◽  
pp. 108-112
Author(s):  
Chao Liang Ding ◽  
Min Teng ◽  
Zhi Guo Zhao ◽  
Liu Zhan Pan
Keyword(s):  
Spatial Correlation ◽  
Correlation Length ◽  
Silica Glass ◽  
Coherence Length ◽  
Spectral Properties ◽  
Spectral Shift ◽  
Fused Silica ◽  
Partially Coherent ◽  
Spatial Correlation Length ◽  
Fused Silica Glass

Using the coherence theory of non-stationary fields and the method of Fourier transform, the spectral properties of spatially and spectrally partially coherent Gaussian Schell-model pulsed (GSMP) beams in fused-silica glass medium are studied and analyzed numerically. It is shown that the spectral shift takes place, which depends on the position of the field point, spatial correlation length, temporal coherence length and dispersive property of medium, as GSMP beams propagate in fused-silica glass medium. The on-axis spectrum is blue-shifted, and the relative spectral shift increases with increasing propagation distance, and decreases as the spatial correlation length and temporal coherence length increases, and then approaches an asymptotic value. The dispersive property of medium plays an important role in the spectral properties of spatially and spectrally partially coherent beams.

Computer models of micrometeoroid impact on fused silica glass mirrors

2003 ◽  
Vol 29 (1-10) ◽  
pp. 203-214 ◽  
Author(s):  
David Davison ◽  
Burton Cour-Palais ◽  
Xiangyang Quan ◽  
T.J. Holmquist ◽  
Lester M. Cohen ◽  
...  
Keyword(s):  
Silica Glass ◽  
Computer Models ◽  
Fused Silica ◽  
Fused Silica Glass

scholarly journals Cracking Behavior of Fused Silica Glass in Sphere Indentation

2003 ◽  
Vol 46 (3) ◽  
pp. 415-418 ◽  
Author(s):  
Hatsuhiko USAMI ◽  
Kazuto OHASHI ◽  
Shinnya SASAKI ◽  
Junji SUGISHITA
Keyword(s):  
Silica Glass ◽  
Fused Silica ◽  
Cracking Behavior ◽  
Fused Silica Glass

Visualization of second-order nonlinear layer in thermally poled fused silica glass

2004 ◽  
Vol 85 (24) ◽  
pp. 5819-5821 ◽  
Author(s):  
Honglin An ◽  
Simon Fleming ◽  
Guy Cox
Keyword(s):  
Silica Glass ◽  
Fused Silica ◽  
Second Order ◽  
Nonlinear Layer ◽  
Thermally Poled ◽  
Fused Silica Glass

Creation of chiral structures inside fused silica glass

2008 ◽  
Vol 33 (12) ◽  
pp. 1312 ◽  
Author(s):  
R. S. Taylor ◽  
E. Simova ◽  
C. Hnatovsky
Keyword(s):  
Silica Glass ◽  
Fused Silica ◽  
Chiral Structures ◽  
Fused Silica Glass

scholarly journals Time-resolved shadowgraphs of transient plasma induced by spatiotemporally focused femtosecond laser pulses in fused silica glass

2015 ◽  
Vol 40 (24) ◽  
pp. 5726 ◽  
Author(s):  
Zhaohui Wang ◽  
Bin Zeng ◽  
Guihua Li ◽  
Hongqiang Xie ◽  
Wei Chu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Silica Glass ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Fused Silica ◽  
Time Resolved ◽  
Transient Plasma ◽  
Fused Silica Glass
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