scholarly journals Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film

Micromachines ◽  
2020 ◽  
Vol 11 (7) ◽  
pp. 649
Author(s):  
Joerg Froemel ◽  
Satoru Akita ◽  
Shuji Tanaka
Keyword(s):  
Relative Permeability ◽  
Pressure Sensor ◽  
Electrical Response ◽  
Applied Pressure ◽  
Electric Circuit ◽  
Gauge Factor ◽  
Impedance Change ◽  
Soft Magnetic ◽  
Lumped Element ◽  
Si Effect

A simple micro-machined pressure sensor, based on the stress-impedance (SI) effect, was fabricated herein using typical micro-fabrication technologies. To sense pressure, a 1-µm thin, soft magnetic metallic film of FeSiB was sputtered and used as a diaphragm. Its electrical response (impedance change) was measured under pressure in a frequency band from 5 to 500 MHz. A lumped-element equivalent electric circuit was used to separate the impedance of the soft magnetic metal from other parasitic elements. The impedance change clearly depended on the applied pressure. It was also shown that the impedance change could be explained by a change in relative permeability, according to the theory of the SI effect. The radial stress in the diaphragm and the relative permeability exhibited a linear relationship. At a measurement frequency of 200 MHz, the largest sensor response, with a gauge factor of 385.7, was found. It was in the same order as the conventional sensors. As the proposed device is very simple, it has the potential for application as a cheap pressure sensor.

scholarly journals Micromechanical Force Sensor Using the Stress–Impedance Effect of Soft Magnetic FeCuNbSiB

Sensors ◽  
2021 ◽  
Vol 21 (22) ◽  
pp. 7578
Author(s):  
Joerg Froemel ◽  
Gildas Diguet ◽  
Masanori Muroyama
Keyword(s):  
Thin Film ◽  
Tactile Sensor ◽  
Force Sensor ◽  
Gauge Factor ◽  
Fabrication Technology ◽  
Soft Magnetic ◽  
Piezoresistive Effect ◽  
Large Yield ◽  
Application Potential ◽  
Si Effect

By using the stress–impedance (SI) effect of a soft magnetic amorphous FeCuNbSiB alloy, a micromachined force sensor was fabricated and characterized. The alloy was used as a sputtered thin film of 500 nm thickness. To clarify the SI effect in the used material as a thin film, its magnetic and mechanical properties were first investigated. The stress dependence of the magnetic permeability was shown to be caused by the used transducer effect. The sputtered thin film also exhibited a large yield strength of 983 GPa. Even though the fabrication technology for the device is very simple, characterization revealed a gauge factor (GF) of 756, which is several times larger than that achieved with conventional transducer effects, such as the piezoresistive effect. The fabricated device shows great application potential as a tactile sensor.

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

CMOS-MEMS Based Current Mirror MOSFET Embedded Pressure Sensor for Healthcare and Biomedical Applications

2013 ◽  
Vol 647 ◽  
pp. 315-320 ◽  
Author(s):  
Pradeep Kumar Rathore ◽  
Brishbhan Singh Panwar
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Circuit Simulation ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Cmos Technology ◽  
Current Mirror ◽  
Sensing Element ◽  
Pressure Sensing ◽  
Cmos Mems

This paper reports on the design and optimization of current mirror MOSFET embedded pressure sensor. A current mirror circuit with an output current of 1 mA integrated with a pressure sensing n-channel MOSFET has been designed using standard 5 µm CMOS technology. The channel region of the pressure sensing MOSFET forms the flexible diaphragm as well as the strain sensing element. The piezoresistive effect in MOSFET has been exploited for the calculation of strain induced carrier mobility variation. The output transistor of the current mirror forms the active pressure sensing MOSFET which produces a change in its drain current as a result of altered channel mobility under externally applied pressure. COMSOL Multiphysics is utilized for the simulation of pressure sensing structure and Tspice is employed to evaluate the characteristics of the current mirror pressure sensing circuit. Simulation results show that the pressure sensor has a sensitivity of 10.01 mV/MPa. The sensing structure has been optimized through simulation for enhancing the sensor sensitivity to 276.65 mV/MPa. These CMOS-MEMS based pressure sensors integrated with signal processing circuitry on the same chip can be used for healthcare and biomedical applications.

Micromachined Pressure Sensors on Optical Fiber Tip

2009 ◽  
Vol 74 ◽  
pp. 149-152
Author(s):  
X.M. Zhang ◽  
M. Yu ◽  
Silas Nesson ◽  
H. Bae ◽  
A. Christian ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Pressure Sensor ◽  
Linear Response ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Outer Diameter ◽  
Sensor Element ◽  
Batch Fabrication ◽  
In Vitro Measurements

This paper reports the development of a miniature pressure sensor on the optical fiber tip for in vitro measurements of rodent intradiscal pressure. The sensor element is biocompatible and can be fabricated by simple, batch-fabrication methods in a non-cleanroom environment with good device-to-device uniformity. The fabricated sensor element has an outer diameter of only 366 μm, which is small enough to be inserted into the rodent discs without disrupting the structure or altering the intradiscal pressures. In the calibration, the sensor element exhibits a linear response to the applied pressure over the range of 0 - 70 kPa, with a sensitivity of 0.0206 μm/kPa and a resolution of 0.17 kPa.

scholarly journals Simulation of the dynamic behaviour of a permanent magnet linear actuator

2010 ◽  
Vol 23 (1) ◽  
pp. 37-43 ◽  
Author(s):  
Ivan Yatchev ◽  
Vultchan Gueorgiev ◽  
Racho Ivanov ◽  
Krastio Hinov
Keyword(s):  
Permanent Magnet ◽  
Dynamic Behaviour ◽  
Electric Circuit ◽  
Linear Actuator ◽  
Soft Magnetic ◽  
Mechanical Motion ◽  
Field Problem ◽  
Motion Problems ◽  
Long Stroke ◽  
The Magnetic Field

The paper presents simulation of the dynamics of a permanent magnet linear actuator with soft magnetic mover and relatively long stroke 60 mm. The simulation is carried out using decoupled approach where the magnetic field problem is solved separately from the electric circuit and mechanical motion problems. The obtained results are compared with experiment. .

MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer

2008 ◽  
Author(s):  
Joshua S. Krause ◽  
Robert D. White ◽  
Mark J. Moeller ◽  
Judith M. Gallman ◽  
Richard De Jong
Keyword(s):  
Pressure Sensor ◽  
Sensor Array ◽  
Single Element ◽  
Lumped Element ◽  
Depth Analysis ◽  
Fluid Damping ◽  
Sensitivity Studies ◽  
Gain Stage ◽  
Acoustic Sensitivity

The design, fabrication, and characterization of a surface micromachined, front-vented, 64 channel (8×8), capacitively sensed pressure sensor array is described. The array was fabricated using the MEMSCAP PolyMUMPs® process, a three layer polysilicon surface micromachining process. An acoustic lumped element circuit model was used to design the system. The results of our computations for the design, including mechanical components, environmental loading, fluid damping, and other acoustic elements are detailed. Theory predicts single element sensitivity of 1 mV/Pa at the gain stage output in the 400–40,000 Hz band. A laser Doppler velocimetry (LDV) system has been used to map the spatial motion of the elements in response to electrostatic excitation. A strong resonance appears at 480 kHz for electrostatic excitation, in good agreement with mathematical models. Static stiffness measured electrostatically using an interferometer is 0.1 nm/V2, similar to the expected stiffness. Preliminary acoustic sensitivity studies show single element acoustic sensitivity (as a function of frequency) increasing from 0.01 mV/Pa at 200 Hz to 0.16 mV/Pa at 2 kHz. A more in depth analysis of acoustic sensitivity is ongoing.

scholarly journals Strain Dependence of Hysteretic Giant Magnetoimpedance Effect in Co-Based Amorphous Ribbon

Materials ◽  
2019 ◽  
Vol 12 (13) ◽  
pp. 2110 ◽  
Author(s):  
Michał Nowicki ◽  
Piotr Gazda ◽  
Roman Szewczyk ◽  
Andriy Marusenkov ◽  
Anton Nosenko ◽  
...  
Keyword(s):  
Amorphous Ribbon ◽  
Strain Gauges ◽  
Gauge Factor ◽  
Giant Magnetoimpedance ◽  
Giant Magnetoimpedance Effect ◽  
Strain Dependence ◽  
Si Effect ◽  
Magnetizing Field ◽  
Field Influence ◽  
Semiconductor Strain

The significant strain dependence of the hysteretic Giant Magnetoimpedance (GMI) effect in a Co67Fe3Cr3B12Si15 amorphous alloy in a low magnetizing field is presented. A simplistic test stand capable of continuous measurements of GMI characteristics under the influence of strain is detailed. Based on the results, a stress-impedance (SI) sensor is proposed, with a gauge factor similar to semiconductor strain gauges but more robust. An effective method of minimizing external magnetic field influence on the SI effect is given.

Simulation of Low Pressure MEMS Sensor for Biomedical Application

2011 ◽  
Vol 2 (3) ◽  
Author(s):  
S. Sathyanarayanan ◽  
A. Vimala Juliet
Keyword(s):  
Pressure Sensor ◽  
Microelectromechanical Systems ◽  
Biomedical Application ◽  
Applied Pressure ◽  
Analysis Data ◽  
Operating Pressure ◽  
Capacitive Pressure Sensor ◽  
Element Analysis ◽  
Mems Sensor ◽  
Relationship Of

Micromachining technology has greatly benefited from the success of developments in implantable biomedical microdevices. In this paper, microelectromechanical systems (MEMS) capacitive pressure sensor operating for biomedical applications in the range of 20–400 mm Hg was designed. Employing the microelectromechanical systems technology, high sensor sensitivities and resolutions have been achieved. Capacitive sensing uses the diaphragm deformation-induced capacitance change. The sensor composed of a rectangular polysilicon diaphragm that deflects due to pressure applied over it. Applied pressure deflects the 2 µm diaphragm changing the capacitance between the polysilicon diaphragm and gold flat electrode deposited on a glass Pyrex substrate. The MEMS capacitive pressure sensor achieves good linearity and large operating pressure range. The static and thermo electromechanical analysis were performed. The finite element analysis data results were generated. The capacitive response of the sensor performed as expected according to the relationship of the spacing of the plates.

A pressure-deformation analytical model for rectangular diaphragm of MEMS pressure sensors

2017 ◽  
Vol 31 (05) ◽  
pp. 1750046
Author(s):  
Wu Zhou ◽  
Dong Wang ◽  
Huijun Yu ◽  
Bei Peng
Keyword(s):  
Pressure Sensor ◽  
Applied Pressure ◽  
Influence Factors ◽  
Pressure Sensors ◽  
Superposition Method ◽  
Uniform Load ◽  
Pressure Sensitive ◽  
Partial Load ◽  
Mems Pressure Sensors ◽  
Measured Pressure

Rectangular diaphragm is commonly used as a pressure sensitive component in MEMS pressure sensors. Its deformation under applied pressure directly determines the performance of micro-devices, accurately acquiring the pressure–deflection relationship, therefore, plays a significant role in pressure sensor design. This paper analyzes the deflection of an isotropic rectangular diaphragm under combined effects of loads. The model is regarded as a clamped plate with full surface uniform load and partially uniform load applied on its opposite sides. The full surface uniform load stands for the external measured pressure. The partial load is used to approximate the opposite reaction of the silicon island which is planted on the diaphragm to amplify the deformation displacement, thus to improve the sensitivity of the pressure sensor. Superposition method is proposed to calculate the diaphragm deflections. This method considers separately the actions of loads applied on the simple supported plate and moments distributed on edges. Considering the boundary condition of all edges clamped, the moments are constructed to eliminate the boundary rotations caused by lateral load. The diaphragm’s deflection is computed by superposing deflections which produced by loads applied on the simple supported plate and moments distributed on edges. This method provides higher calculation accuracy than Galerkin variational method, and it is used to analyze the influence factors of the diaphragm’s deflection, includes aspect ratio, thickness and the applied force area of the diaphragm.

scholarly journals Microstrip Based Pressure Sensor Antenna for Harsh Environment Applications

2021 ◽  
Author(s):  
Muhabaw Amare Alebachew ◽  
Anil Kumar Nayak ◽  
Amalendu Patnaik
Keyword(s):  
Dielectric Constant ◽  
Resonant Frequency ◽  
Pressure Sensor ◽  
Applied Pressure ◽  
Substrate Material ◽  
Metal Plate ◽  
Harsh Environment ◽  
Copper Metal ◽  
Pressure Load ◽  
Resonance Frequencies

Abstract this paper is studied on a microstrip based pressure sensor for harsh environment applications which can sensing at a distance. A microstrip based pressure sensor for harsh environment was investigated with good results by using Rogers’s 3210 substrate material with a dielectric constant of 10.2, 1.28mm thickness and 2.4 GHz resonant frequency, and also both the patch side and the ground side are made from copper metal. The simulation of a proposed antenna was designed and tested by using HFSS software, the result of the designed antenna’s resonance frequency is inversely proportional with the displacement gap of the reflection plate and an antenna. The operating principles of this sensor, when a pressure (load) is applied on the reflection metal plate, the distance will decrease from the reflection plate and the resonant frequency will increase. Therefore, the applied pressure (load) can determined by measuring the changing resonance frequencies. Certainly, the simulation and the experimental results of performances and validates are clearly discussed.

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