Simulation of Low Pressure MEMS Sensor for Biomedical Application

2011 ◽  
Vol 2 (3) ◽  
Author(s):  
S. Sathyanarayanan ◽  
A. Vimala Juliet
Keyword(s):  
Pressure Sensor ◽  
Microelectromechanical Systems ◽  
Biomedical Application ◽  
Applied Pressure ◽  
Analysis Data ◽  
Operating Pressure ◽  
Capacitive Pressure Sensor ◽  
Element Analysis ◽  
Mems Sensor ◽  
Relationship Of

Micromachining technology has greatly benefited from the success of developments in implantable biomedical microdevices. In this paper, microelectromechanical systems (MEMS) capacitive pressure sensor operating for biomedical applications in the range of 20–400 mm Hg was designed. Employing the microelectromechanical systems technology, high sensor sensitivities and resolutions have been achieved. Capacitive sensing uses the diaphragm deformation-induced capacitance change. The sensor composed of a rectangular polysilicon diaphragm that deflects due to pressure applied over it. Applied pressure deflects the 2 µm diaphragm changing the capacitance between the polysilicon diaphragm and gold flat electrode deposited on a glass Pyrex substrate. The MEMS capacitive pressure sensor achieves good linearity and large operating pressure range. The static and thermo electromechanical analysis were performed. The finite element analysis data results were generated. The capacitive response of the sensor performed as expected according to the relationship of the spacing of the plates.

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

scholarly journals Modeling of a square-shape ZnO, ZnS and AlN membrane for mems capacitive pressure-sensor applications

2020 ◽  
Vol 11 ◽  
pp. 14
Author(s):  
Ahmad Dagamseh ◽  
Qais Al-Bataineh ◽  
Zaid Al-Bataineh ◽  
Nermeen S. Daoud ◽  
Ahmad Alsaad ◽  
...  
Keyword(s):  
Thermal Stress ◽  
Pressure Sensor ◽  
Membrane Structure ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Membrane Thickness ◽  
Capacitive Pressure Sensor ◽  
The Finite Element Method ◽  
Sensor Applications ◽  
Opposite Behavior

In this paper, mathematical modeling and simulation of a MEMS-based clamped square-shape membrane for capacitive pressure sensors have been performed. Three types of membrane materials were investigated (i.e. Zinc Oxide (ZnO), Zinc Sulfide (ZnS) and Aluminum Nitride (AlN)). Various performance parameters such as capacitance changes, deflection, nonlinearity, the sensitivity of the membrane structure for different materials and film-thicknesses have been considered using the Finite Element Method (FEM) and analytically determined using the FORTRAN environment. The simulation model outperforms in terms of the effective capacitance value. The results show that the membrane deflection is linearly related to the applied pressure. The ZnS membrane provides a capacitance of 0.023 pico-Farad at 25 kPa with a 42.5% relative capacitance changes to reference capacitance. Additionally, the results show that for ZnO and AlN membranes the deflection with no thermal stress is higher than that with thermal stress. However, an opposite behavior for the ZnS membrane structure has been observed. The mechanical and capacitance sensitivities are affected by the membrane thickness as the capacitance changes are inversely proportional to the membrane thickness. Such results open possibilities to utilize various materials for pressure sensor applications by means of the capacitance-based detection technique.

Simulation of capacitive pressure sensor based on microelectromechanical systems technology

2017 ◽  
Vol 232 (9) ◽  
pp. 1538-1546
Author(s):  
Masoud Baghelani ◽  
Ahmad Hosseini-Sianaki ◽  
Zeinab Behzadi ◽  
Arash Mirabdolah Lavasani
Keyword(s):  
Young’S Modulus ◽  
Pressure Sensor ◽  
Microelectromechanical Systems ◽  
Young's Modulus ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Suspension Spring ◽  
Length Increase ◽  
Modulus Reduction ◽  
Very High

This paper proposes a very high sensitivity pressure sensor with a novel technique for temperature compensation. The proposed technique employs a geometrical method for self-compensation of Young’s modulus reduction due to temperature increase, where a stronger spring with much larger length and width is anchored. According to the connection of the suspension spring to the larger spring, in higher temperatures, the large spring experiences more length increase, which in turn increases the stiffness of the suspension spring and, consequently, could compensates the Young’s modulus reduction. Simulation results verify that the temperature variation related error in the compensated sensor is less than 0.66% of full-scale under 260 ℃ of temperature range, which shows considerable improvement in comparison with literature. The total consumed area is about 0.033 mm2 with the sensitivity of 290 × 10−6 K−1.

The Analysis and Study Based on MEMS Sensor

2011 ◽  
Vol 282-283 ◽  
pp. 271-274
Author(s):  
Yan Bing LI ◽  
Meng Yuan ◽  
Ji Yong Xu
Keyword(s):  
Pressure Sensor ◽  
Dynamic Properties ◽  
Wheatstone Bridge ◽  
Response Speed ◽  
Periodic Variation ◽  
Element Analysis ◽  
Structure Selection ◽  
Mems Sensor ◽  
The Finite Element Analysis ◽  
Selection Of

A kind of ultra micro pressure range MEMS pressure sensor is elaborated and analyzed in detail. The chip structure selection of pressure sensor is researched by the relative theory and the reasonable chip structure is designed in this paper. In order to design the Wheatstone bridge properly, we explore the width and length of the resistors on the membrane of the pressure sensor. At last, through the finite element analysis method, the relevant dynamic properties are analyzed for the sensor too. The dynamic response time is 3.2×10-5s. The response speed is fast and the sensor has many advantages under the periodic variation pressure.

scholarly journals FEA Simulation of Fluidic based Pressure Sensor for Differrent Shaped Membrane

2019 ◽  
Vol 8 (2) ◽  
pp. 3610-3613
Keyword(s):  
Pressure Sensor ◽  
Applied Pressure ◽  
Membrane Material ◽  
Large Area ◽  
Element Analysis ◽  
Maximum Performance ◽  
Different Types ◽  
Fea Simulation ◽  
Different Shapes ◽  
Proper Consideration

In designing the fluidic based pressure sensor, the shape of the membrane is important in order to obtain maximum performance. The material used and the liquid inside the sensor is also important and deserve proper consideration. . In this work, the analysis of the membrane, materials and liquid using finite element analysis (FEA) are presented. The FEA simulation of the different shapes including square and rectangular shapes were carried out. The applied pressure and the dimension of selected membrane were varied in order to study the membrane performance.The result shows that the square shape produced the highest displacement of 4.7 mm compared to the other shapes. In terms of dimension, maximum performance can be achieved with a large area of membrane facing the applied pressure. The different types of membrane material andliquids that were used were also discussed. Two commonly used materials, Polyimide (PI) and Polydimethylsiloxane (PDMS) were chosen for this analysis. As for the liquids, methanol and propolyne carbonate were used.

Development of Biocompatible MEMS Wireless Capacitive Pressure Sensor

2005 ◽  
Vol 2 (4) ◽  
pp. 287-296
Author(s):  
Shankaran Janardhanan ◽  
Joan. Z. Delalic ◽  
Jeffrey Catchmark ◽  
Dharanipal Saini
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Resonant Frequency ◽  
Pressure Sensor ◽  
Impedance Matching ◽  
Pressure Sensors ◽  
Important Variable ◽  
Bladder Pressure ◽  
Capacitive Pressure Sensor ◽  
Element Analysis

The objective of this research was to develop a wireless pressure sensor useful for monitoring bladder pressure. The wireless sensor consists of an active capacitive element and an inductor coil. The changes in pressure are related to the changes in the resonant frequency of the internal sensor. The existing pressure sensors have inductors formed on both sides of the substrate. The changes in internal capacitance of these sensors are related to the changes in pressure by impedance matching of the internal LC circuit. The deviation in bladder pressure is an important variable in evaluating the diseased state of the bladder. The inductor designed for this application is a spirally wound inductor fabricated adjacent to the capacitor. The external sensing uses equivalent changes in internal LC. The resonant frequency of the internal sensor is defined by the deformation of the plate, causing the plate to touch the dielectric on the fixed capacitive plate, which is reflected as changes in capacitance(C). The deformation of the plate has been modeled using Finite Element Analysis. The finite element analysis optimizes the dimensions of the design. Remote sensing is achieved through inductive coupling and the changes in pressure are determined. The device is tested for pressures ranging from 0–150 mmHg, bladder pressure. The RF Telemetry system has been modeled using Sonnet. The frequency range is between 100–670 MHz which is in compliance to that specified by Federal Communications Commission (FCC) regulations.

Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range

2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Hamid Reza Ansari ◽  
Zoheir Kordrostami
Keyword(s):  
Pressure Sensor ◽  
Dielectric Layer ◽  
Pressure Range ◽  
High Sensitivity ◽  
Low Pressure ◽  
Air Gap ◽  
Capacitive Pressure Sensor ◽  
Aluminium Nitrate ◽  
Mems Sensor ◽  
Capacitive Mems

Abstract In this paper, the improvement of the sensitivity of a capacitive MEMS pressure sensor is investigated. The proposed spring for the sensor can increase the sensitivity. Silicon is used as the substrate and gold and aluminium nitrate are used as the diaphragm and the dielectric layer, respectively. The dimensions of the diaphragm are 150 µm × 150 µm, which is suspended by four springs. The air gap between the diaphragm and the top electrode is 1.5 µm. The proposed structure is an efficient sensor for the pressures in the range of 1–20 kPa. By using the proposed design, the sensitivity of the MEMS sensor in 18 kPa has improved to 663 (× 10−3 pF/kPa).

Design and Simulation of MEMS Sensor for Detection of Arterial Pulse

2018 ◽  
Vol 17 (2) ◽  
pp. 7247-7260
Author(s):  
Sonali Navghare
Keyword(s):  
Piezoelectric Effect ◽  
Biomedical Application ◽  
Applied Pressure ◽  
Electrical Potential ◽  
Fem Analysis ◽  
Piezoelectric Sensor ◽  
Micro Electro Mechanical System ◽  
Arterial Pulse ◽  
Mems Sensor ◽  
Circular Diaphragm

The work presented in this paper describe the design and simulation of a MEMS (Micro Electro Mechanical System) system based piezoelectric sensor for detecting arterial pulse in biomedical application. The study is done through the analysis of square and circular diaphragm made out of piezoelectric and MEMS material. In this work, piezoelectric material is used which work on the principle of piezoelectric effect. In piezoelectric effect, diaphragm reorients under stress, form an internal polarization which result in crystal charge on the crystal face that is proportional to applied pressure. When pressure is applied on diaphragm deformation occurs which converts physical energy into output electrical voltage. For selecting the appropriate geometry and material for sensor design different parameter were checked such as deformation, output voltage, Stress and linearity. FEM analysis is done for circular and square diaphragm on COMSOL Multi-Physics. Comparison of square and circular diaphragm is done on the basis of deformation and Electrical potential. Piezoelectric sensor is designed and simulated with lithium-Niobate and poly-si. Sensitivity obtained for the designed sensor is about 4mV/Kpa.

Peeling Mode Capacitive Pressure Sensor for Sub-KPA Pressure Measurements

2006 ◽  
Author(s):  
Jeahyeong Han ◽  
Shunzhou Yang ◽  
Mark A. Shannon
Keyword(s):  
Residual Stresses ◽  
Pressure Sensor ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Capacitive Pressure Sensor ◽  
Resistance To Deformation ◽  
Fixed Electrode ◽  
Electrostatic Pressure ◽  
Nonlinear Signal ◽  
Low Pressures

Capacitive pressure sensors measure changes in pressure typically by the deflection of a flexible conducting membrane towards a fixed electrode. The deflection in the membrane produces a quadratic change in capacitance, which often yields higher sensitivity to changes in pressure compared to piezo-resistive pressure sensors, which measures the resistance changes proportional to the applied pressure. However, residual stresses in the membrane can provide a substantial resistance to deformation compared to the driving force created by the applied pressure, which decreases the sensitivity at low pressures and produces a nonlinear signal. If the membrane is made compliant enough to increase sensivitiy, pull-in of the membrane can occur, reducing the effective pressure range of the capacitive manometer type pressure sensor. Hence, these type of sensors are typically not used to measure very low pressure differences over several hundred Pascals. To overcome this limitation, a capacitive pressure sensor was developed that operates in a peeling mode while under applied electrostatic actuation, which counters the residual stresses. The changes in capacitance can be detected if the pressure is just enough to overcome the interfacial electrostatic pressure. This type of pressure sensor can potentially be used for very low differential pressure differences, well below 100 Pa, over ~ 1 kPa range.

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