scholarly journals Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever

Micromachines ◽  
2020 ◽  
Vol 11 (7) ◽  
pp. 647
Author(s):  
Romain Pommois ◽  
Gaku Furusawa ◽  
Takuya Kosuge ◽  
Shun Yasunaga ◽  
Haruki Hanawa ◽  
...  

In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 μL/s to 400 μL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations.

2010 ◽  
Vol 7 (51) ◽  
pp. 1487-1495 ◽  
Author(s):  
Jérôme Casas ◽  
Thomas Steinmann ◽  
Gijs Krijnen

Insects and arachnids are often quite hairy. The reasons for this high density of sensory hairs are unknown. Previous studies have predicted strong hydrodynamic coupling between densely packed airflow-sensitive hairs. Flow perturbation owing to single hairs and between tandem hairs, however, has never been experimentally measured. This paper aims to quantify the extent of flow perturbation by single and tandem hairs directly, using biomimetic microelectromechanical system (MEMS) hairs as physical models and particle image velocimetry (PIV) for flow visualization. Single and tandem MEMS hairs of varying interhair distances were subjected to oscillatory flows of varying frequency. Decreasing hair-to-hair distance markedly reduced flow velocity amplitude and increased the phase shift between the far-field flow and the flow between hairs. These effects were stronger for lower flow frequencies. We predict strong hydrodynamic coupling within whole natural hair canopies exposed to natural stimuli, depending on arthropod and hair sizes, and hair density. Thus, rather than asking why arthropods have so many hairs, it may be useful to address why hairs are packed together at such high densities, particularly given the exquisite sensitivity of a single hair.


2012 ◽  
Vol 1415 ◽  
Author(s):  
Svetlana Tatic-Lucic ◽  
Markus Gnerlich

ABSTRACTThis paper describes the implementation of a custom-made bio-microelectromechanical system for determining mechanical properties of biological cells, which is used for the measurement of mechanical properties of fibroblasts. Our system consists of several subcomponents: (a) actuator which deforms the cell in pre-determined, step-wise fashion, (b) force sensor that measures force applied onto the cell, (c) set of dielectrophoretic (DEP) electrodes for positioning cells in the desired position, (d) temperature sensors and (e) heater. Preliminary results of the mechanical properties of NIH3T3 cells have been determined using this tool and our cell compression techniques.


2006 ◽  
Vol 49 (spe) ◽  
pp. 65-72 ◽  
Author(s):  
Magalí Araújo Damasceno ◽  
Janaina Karla de Medeiros Penha ◽  
Nivaldo Ferreira da Silva Junior ◽  
Raimundo Nonato B. Felipe ◽  
Renata Carla Tavares dos Santos Felipe ◽  
...  

The flow measurement of liquids and gases is a necessity in many industrial applications. There is a great amount of measurers for such purpose, as, for example, the coriolis, positive displacement and type turbine measurers. A measurer sufficiently used for the oil flow measurement is the turbine type, because it uses the proper extracted energy of the measured flow for its functioning, moreover is also used as standard for the calibration of other measurers. For this reason, it is important to study the parameters that influence the measurement process for turbine measurers. In Brazil, to measure the volume of oil, regardless the type of measurer, it is necessary to observe "Portaria Conjunta Nº. 1", of June 19, 2000, that approved the Technical Regulation of Measurement of Oil and Natural Gas, establishing the minimum conditions and requirements for the systems of oil and natural gas measurement, in order to get a measurement standard. As such, the present work has the objective of determining parameters that influence in the measurement of oil volumes using turbine measurers.


Author(s):  
Rumana Tasnim ◽  
Sheroz Khan ◽  
Atika Arshad ◽  
Molla Rashied Hussein

To facilitate real-time flow measurement, this paper aims to realize biomass flow sensing through electronic non-contact capacitive means. Hardware implementation has been carried out using a modified OP-AMP-based bridge circuit, with one arm made of a standard capacitance while the other arm is made from two specifically designed capacitive electrodes fitted on a piping system sensing biomass flow. The experimental results are targeted to obtain data for given biomass types through a custom-developed biomass flow piping system. Several flow affecting parameters namely: electrodes’ shapes, the location of electrodes on the piping system, biomass material type, and particle size have been considered in obtaining experimental data. Also, the circuit has been simulated to analyze flow sensing behavior for the proposed technique by evaluating the measurement data and assessing conformity between experimentally obtained and simulated data.


Author(s):  
Dieter Petrak ◽  
Ulf Niersmann

Results from the application of the spatial filtering velocimetry on capillary flow are presented. The type of the spatial filter is a differentail fibreoptical filter made by 16 step index fibres. Using tracer particles, the flow velocities along the capillary diameter and the volume flow were measured. The capillary is a transparent glass tube with inner diameter ranging from 0.15 mm to 0.5 mm. Using a gravitational measuring system the uncertainty of the flow measurement by the optical system was determined. For the laminar flow of newtonian fluids, the volume flow determination is based on the equation of Hagen-Poiseuille. The range of volume flow was 0.5 ml/h up to 50 ml/h.


2013 ◽  
Vol 712-715 ◽  
pp. 1380-1385
Author(s):  
Hua Xu Yang ◽  
Shuang Yu Zhang ◽  
Xuan Kai Jia ◽  
Xue Di Hao ◽  
Miao Wu

Previous research on thick pastes such as coal slime was using two-cylinder piston pump as power equipment.Since the pressure fluctuation was big,flow measurement was not that accurate. In order to solve the problem, this paper will presents a feasibility study on conveying coal slime by single-screw pump. We used a single-screw pump as power equipment which conveying the coal slime with mass concentration of 64.5%-67.5% . Furthermore, we measured flow rate by self-developed flow meter and completed four groups of test. Through the data such as pressure, flow characteristic obtained from the tests, we have summed up the maximum mass concentration,pressure and flow rate.The results demonstrate the feasibility of conveying coal slime by single-screw pump.The original experimental data and the processing results conform to the theory of law.This paper provides the useful reference for the application of single-screw pump in the field of coal slime pumping.


1991 ◽  
Vol 88 (9) ◽  
pp. 905-911
Author(s):  
C.A.A. Jonker ◽  
J. Vermeij

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