scholarly journals One-Step Femtosecond Laser Stealth Dicing of Quartz

Micromachines ◽  
2020 ◽  
Vol 11 (3) ◽  
pp. 327 ◽  
Author(s):  
Caterina Gaudiuso ◽  
Annalisa Volpe ◽  
Antonio Ancona

We report on a one-step method for cutting 250-µm-thick quartz plates using highly focused ultrashort laser pulses with a duration of 200 fs and a wavelength of 1030 nm. We show that the repetition rate, the scan speed, the pulse overlap and the pulse energy directly influence the cutting process and quality. Therefore, a suitable choice of these parameters was necessary to get single-pass stealth dicing with neat and flat cut edges. The mechanism behind the stealth dicing process was ascribed to tensile stresses generated by the relaxation of the compressive stresses originated in the laser beam focal volume during irradiation in the bulk material. Such stresses produced micro-fractures whose controlled propagation along the laser beam path led to cutting of the samples.

Nanoscale ◽  
2019 ◽  
Vol 11 (40) ◽  
pp. 18779-18789 ◽  
Author(s):  
N. Sharma ◽  
N. Destouches ◽  
C. Florian ◽  
R. Serna ◽  
J. Siegel

Hybrid nanostructure written by ultrafast laser pulses with horizontal polarization, featuring scan speed-dependent nanograting orientations and spectral transmission anisotropy.


Author(s):  
Isamu Miyamoto ◽  
Kristian Cvecek ◽  
Yasuhiro Okamoto ◽  
Michael Schmidt ◽  
Henry Helvajian

Author(s):  
Marcelo Bertolete Carneiro ◽  
Patrícia Alves Barbosa ◽  
Ricardo Samad ◽  
NIlson Vieira ◽  
Wagner de Rossi ◽  
...  

Author(s):  
V. Pouget ◽  
E. Faraud ◽  
K. Shao ◽  
S. Jonathas ◽  
D. Horain ◽  
...  

Abstract This paper presents the use of pulsed laser stimulation with picosecond and femtosecond laser pulses. We first discuss the resolution improvement that can be expected when using ultrashort laser pulses. Two case studies are then presented to illustrate the possibilities of the pulsed laser photoelectric stimulation in picosecond single-photon and femtosecond two-photon modes.


2021 ◽  
Vol 11 (2) ◽  
Author(s):  
Pengjie Wang ◽  
Zheng Gong ◽  
Seong Geun Lee ◽  
Yinren Shou ◽  
Yixing Geng ◽  
...  

2021 ◽  
Vol 127 (5) ◽  
Author(s):  
Daniel Holder ◽  
Rudolf Weber ◽  
Thomas Graf ◽  
Volkher Onuseit ◽  
David Brinkmeier ◽  
...  

AbstractA simplified analytical model is presented that predicts the depth progress during and the final hole depth obtained by laser percussion drilling in metals with ultrashort laser pulses. The model is based on the assumption that drilled microholes exhibit a conical shape and that the absorbed fluence linearly increases with the depth of the hole. The depth progress is calculated recursively based on the depth changes induced by the successive pulses. The experimental validation confirms the model and its assumptions for percussion drilling in stainless steel with picosecond pulses and different pulse energies.


2021 ◽  
Vol 127 (9) ◽  
Author(s):  
A. Feuer ◽  
R. Weber ◽  
R. Feuer ◽  
D. Brinkmeier ◽  
T. Graf

AbstractThe influence of the laser fluence on the quality of percussion-drilled holes was investigated both experimentally and by an analytical model. The study reveals that the edge quality of the drilled microholes depends on the laser fluence reaching the rear exit of the hole and changes with the number of pulses applied after breakthrough. The minimum fluence that must reach the hole’s exit in order to obtain high-quality microholes in stainless steel was experimentally found to be 2.8 times the ablation threshold.


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