scholarly journals Study on a High Performance MEMS Infrared Thermopile Detector

Micromachines ◽  
2019 ◽  
Vol 10 (12) ◽  
pp. 877 ◽  
Author(s):  
Aida Bao ◽  
Cheng Lei ◽  
Haiyang Mao ◽  
Ruirui Li ◽  
Yihao Guan
Keyword(s):  
Response Time ◽  
High Precision ◽  
Temperature Sensor ◽  
High Performance ◽  
Infrared Detector ◽  
Isotropic Etching ◽  
Vacuum Sensor ◽  
Precision Temperature ◽  
Etch Stop ◽  
Measured Response

This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent isotropic etching-caused damage on the device. The responsivity of the detector achieved 1151.14 V/W, and the measured response time was 14.46 ms. The detector had the potential to work as a high-precision temperature sensor and as a vacuum sensor.

Design of High Precision Temperature Sensor Based on Platinum Resistance

2014 ◽  
Vol 539 ◽  
pp. 177-180 ◽  
Author(s):  
Yi Zhen Nie
Keyword(s):  
Temperature Measurement ◽  
High Precision ◽  
Measurement System ◽  
Temperature Sensor ◽  
Platinum Resistance ◽  
Control Center ◽  
Precision Temperature ◽  
Nonlinear Compensation ◽  
Temperature Measurement System ◽  
Hardware Circuit

for Pt100 platinum resistance temperature measurement system has low accuracy, duplicate hardware circuit design and other issues, the articles design a high-precision temperature measurement system with Pt100 platinum resistance. With Pt100 temperature sensor, article takes STM32F103 as the control center through filtering, amplification and other signal conditioning circuit and a method of combining software look-up table to compensate the nonlinear compensation, thus achieving high-precision temperature measurement. Research results show that the system has a measurement accuracy high stability, scalability, and other characteristics.

scholarly journals High-precision temperature sensor based on weak measurement

2019 ◽  
Vol 27 (15) ◽  
pp. 21455 ◽  
Author(s):  
Yanjia Li ◽  
Hongjing Li ◽  
Jingzheng Huang ◽  
Cheng Fang ◽  
Miaomiao Liu ◽  
...  
Keyword(s):  
High Precision ◽  
Temperature Sensor ◽  
Weak Measurement ◽  
Precision Temperature

Magnetic Fluid Based High Precision Temperature Sensor

2017 ◽  
Vol 17 (9) ◽  
pp. 2670-2675 ◽  
Author(s):  
Saurabh Pathak ◽  
Komal Jain ◽  
Noorjahan ◽  
Vinod Kumar ◽  
Rajendra Prasad Pant
Keyword(s):  
High Precision ◽  
Magnetic Fluid ◽  
Temperature Sensor ◽  
Precision Temperature

Development of a High-Precision Temperature Measurement Instrument Based on Quartz Tuning-Fork Temperature Sensor

2008 ◽  
Vol 381-382 ◽  
pp. 477-480 ◽  
Author(s):  
Jun Xu ◽  
Bo You ◽  
X. Li
Keyword(s):  
Temperature Measurement ◽  
High Precision ◽  
Temperature Sensor ◽  
Tuning Fork ◽  
Measurement Instrument ◽  
Quartz Tuning Fork ◽  
Large Temperature ◽  
Correction Technique ◽  
Marquardt Algorithm ◽  
Precision Temperature

This paper presents a high precision temperature measurement instrument based on quartz tuning-fork temperature sensor (QTTS) using Artificial Neural Networks (ANN). The advantage of QTTS is a great sensitivity which makes possible to determine the temperature with the accuracy of 0.01 °C , but the QTTS based temperature measurement instrument often appears as erroneous temperature reading when using standard polynomial calibration techniques over a large temperature range. For high precision temperature measurement, a new method is presented to compensate non-linearity of QTTS based instrument using non-linearity compensation model using ANN by Levenberg-Marquardt algorithm to settle its non-linear problem. The hardware and software parts of the system are integrated in a PC-based instrument used for operation and calibration. ANN based modelling and correction technique has been evaluated experimentally, followed by experimental results obtained by applying the method to QTTS calibration.

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