scholarly journals Contact Photolithography at Sub-Micrometer Scale Using a Soft Photomask

Micromachines ◽  
2019 ◽  
Vol 10 (8) ◽  
pp. 547
Author(s):  
Chun-Ying Wu ◽  
Heng Hsieh ◽  
Yung-Chun Lee
Keyword(s):  
Line Width ◽  
Uv Light ◽  
Silicon Mold ◽  
Coated Substrate ◽  
New Type ◽  
Micrometer Scale ◽  
Pattern Resolution

This paper proposes a method for improving the patterning resolution of conventional contact photolithography from the micrometer, down to the sub-micrometer scale. The key element is a soft polydimethylsiloxane (PDMS) photomask, which is first replicated from a silicon mold and then patterned with a black photoresist (PR) layer to selectively block ultraviolet (UV) light. This soft PDMS photomask can easily form an intimate and conformable contact with a PR-coated substrate and hence can perform contact photolithography with high pattern resolution. The fabrication processes of this black-PR/PDMS soft photomask are experimentally carried out. Using the fabricated soft photomask, UV patterning by contact photolithography with the smallest line-width of 170 nm over a 4” wafer area was successfully achieved. The advantages and potentials of this new type of contact photolithography will be addressed.

scholarly journals Application and Analysis of an Ionic Liquid Gel in a Soft Robot

2019 ◽  
Vol 2019 ◽  
pp. 1-14
Author(s):  
Chenghong Zhang ◽  
Bin He ◽  
Zhipeng Wang ◽  
Yanmin Zhou ◽  
Aiguo Ming
Keyword(s):  
Ionic Liquid ◽  
Uv Light ◽  
Electroactive Polymers ◽  
Electroactive Polymer ◽  
Soft Robot ◽  
Polymer Gel ◽  
Basic Module ◽  
Soft Actuator ◽  
New Type ◽  
Soft Actuators

Due to their light weight, flexibility, and low energy consumption, ionic electroactive polymers have become a hotspot for bionic soft robotics and are ideal materials for the preparation of soft actuators. Because the traditional ionic electroactive polymers, such as ionic polymer-metal composites (IPMCs), contain water ions, a soft actuator does not work properly upon the evaporation of water ions. An ionic liquid polymer gel is a new type of ionic electroactive polymer that does not contain water ions, and ionic liquids are more thermally and electrochemically stable than water. These liquids, with a low melting point and a high ionic conductivity, can be used in ionic electroactive polymer soft actuators. An ionic liquid gel (ILG), a new type of soft actuator material, was obtained by mixing 1-butyl-3-methylimidazolium tetrafluoroborate (BMIMBF4), hydroxyethyl methacrylate (HEMA), diethoxyacetophenone (DEAP) and ZrO2 and then polymerizing this mixture into a gel state under ultraviolet (UV) light irradiation. An ILG soft actuator was designed, the material preparation principle was expounded, and the design method of the soft robot mechanism was discussed. Based on nonlinear finite element theory, the deformation mechanism of the ILG actuator was deeply analyzed and the deformation of the soft robot when grabbing an object was also analyzed. A soft robot was designed with the soft actuator as the basic module. The experimental results show that the ILG soft robot has good driving performance, and the soft robot can grab a 105 mg object at an input voltage of 3.5 V.

PHOTOMULTIPLIER DEVELOPMENT AND WAVELENGTH SHIFTER MANUFACTURING TO INCREASE THE DETECTION OF FAINT FLUORESCENCE SIGNALS

2005 ◽  
Vol 20 (29) ◽  
pp. 6872-6874 ◽  
Author(s):  
M. BERTAINA ◽  
T. EBISUZAKI ◽  
K. HIROTA ◽  
Y. KAWASAKI ◽  
N. SAKAKI ◽  
...  
Keyword(s):  
Quantum Efficiency ◽  
Uv Light ◽  
Sensitive Area ◽  
Wavelength Shifter ◽  
Physical Surface ◽  
New Type

RIKEN has developed in collaboration with Hamamatsu a new type of Multi Anode Photomultiplier (MAPMT), R8900 series, with a large sensitive area of ~ 83% of the physical surface. The performance of R8900 is reviewed in the following. RIKEN has also manufactured a new type of wavelength shifter (w.s.) film to shift near-UV light (330 ÷ 400 nm ) to visible one. This film uses POPOP as a shifter and EPO-TEX as a substrate. The quantum efficiency of the film reaches ~ 80%.

scholarly journals Photo Alignment Behaviour of Polyethene Imine Having Cyano Azobenzene Side Chain

2015 ◽  
Vol 63 (2) ◽  
pp. 67-72
Author(s):  
Mohammad Kamruzzaman ◽  
Seiji Kurihara
Keyword(s):  
Molecular Orientation ◽  
Uv Light ◽  
Side Chain ◽  
Reaction Parameters ◽  
Reaction Conditions ◽  
Out Of Plane ◽  
Solid Film ◽  
New Type ◽  
Photo Alignment ◽  
Random State

New type of polyethene imine having cyano (-CN) side chain through six methylene spacer group (PEI6C) was successfully synthesised and characterised. The effect of reaction parameters on degree of substitution of PEI6C was also studied and the reaction conditions were optimised. Photochemical as well as photoorientational behaviour of the polymer were investigated. PEI6C in solid film exhibited photoresponsive properties upon irradiation with UV and visible light. PEI6C film also exhibited reversible molecular orientation from random state to out-of-plane and from out-of-plane to random state upon non-polarised visible and UV light irradiation.Dhaka Univ. J. Sci. 63(2): 67-72, 2015 (July)

scholarly journals Photo-Rheological Fluid-Based Colorimetric Ultraviolet Light Intensity Sensor

Sensors ◽  
2019 ◽  
Vol 19 (5) ◽  
pp. 1128 ◽  
Author(s):  
Kyung-Pyo Min ◽  
Gi-Woo Kim
Keyword(s):  
Light Intensity ◽  
Ultraviolet Light ◽  
Color Change ◽  
Uv Light ◽  
Image Sensor ◽  
Light Intensities ◽  
New Type

This study presents an introduction to a new type of ultraviolet (UV) light intensity sensor using photo-rheological (PR) fluids whose properties, such as color, can be changed by UV light. When the PR fluids were irradiated by UV light, colorimetric transitions were observed. Effectively, this means that their color changed gradually from yellow to red. The degree of the color change depended on the UV light intensity and was characterized by the hue value of the images acquired with a compact image sensor. We demonstrated that UV light-responsive capabilities can be readily imparted to PR fluids, and that the colorimetric responses to different UV light intensities can be used to measure the UV light intensities.

scholarly journals A Computing Method to Determine the Performance of an Ionic Liquid Gel Soft Actuator

2018 ◽  
Vol 2018 ◽  
pp. 1-11 ◽  
Author(s):  
Bin He ◽  
Chenghong Zhang ◽  
Yanmin Zhou ◽  
Zhipeng Wang
Keyword(s):  
Experimental Data ◽  
Ionic Liquid ◽  
Tensile Stress ◽  
Uv Light ◽  
Uniaxial Tensile ◽  
Optimized Design ◽  
Soft Actuator ◽  
Uniaxial Tensile Testing ◽  
New Type ◽  
Uniaxial Tensile Stress

A new type of soft actuator material—an ionic liquid gel (ILG) that consists of BMIMBF4, HEMA, DEAP, and ZrO2—is polymerized into a gel state under ultraviolet (UV) light irradiation. In this paper, we first propose that the ILG conforms to the assumptions of hyperelastic theory and that the Mooney-Rivlin model can be used to study the properties of the ILG. Under the five-parameter and nine-parameter Mooney-Rivlin models, the formulas for the calculation of the uniaxial tensile stress, plane uniform tensile stress, and 3D directional stress are deduced. The five-parameter and nine-parameter Mooney-Rivlin models of the ILG with a ZrO2 content of 3 wt% were obtained by uniaxial tensile testing, and the parameters are denoted as c10, c01, c20, c11, and c02 and c10, c01, c20, c11, c02, c30, c21, c12, and c03, respectively. Through the analysis and comparison of the uniaxial tensile stress between the calculated and experimental data, the error between the stress data calculated from the five-parameter Mooney-Rivlin model and the experimental data is less than 0.51%, and the error between the stress data calculated from the nine-parameter Mooney-Rivlin model and the experimental data is no more than 8.87%. Hence, our work presents a feasible and credible formula for the calculation of the stress of the ILG. This work opens a new path to assess the performance of a soft actuator composed of an ILG and will contribute to the optimized design of soft robots.

scholarly journals The ABALONE photosensor

2022 ◽  
Vol 17 (01) ◽  
pp. C01038
Author(s):  
V. D’Andrea ◽  
R. Biondi ◽  
C. Ferrari ◽  
A.D. Ferella ◽  
J. Mahlstedt ◽  
...  
Keyword(s):  
Particle Physics ◽  
High Performance ◽  
Single Photon ◽  
Uv Light ◽  
Cost Effective ◽  
Emission Angle ◽  
Modern Technology ◽  
Silicon Photomultiplier ◽  
Timing Resolution ◽  
New Type

Abstract The ABALONE is a new type of photosensor produced by PhotonLab, Inc. with cost effective mass production, robustness and high performance. This modern technology provides sensitivity to visible and UV light, exceptional radio-purity and excellent detection performance in terms of intrinsic gain, afterpulsing rate, timing resolution and single-photon sensitivity. For these reasons, the ABALONE can have many fields of application, including particle physics experiments, such as DARWIN, and medical imaging. This new hybrid photosensor, that works as light intensifier, is based on the acceleration in vacuum of photoelectrons generated in a traditional photosensor cathode and guided towards a window of scintillating material that can be read from the outside through a silicon photomultiplier. In this work we present the simulation of the ABALONE and the results from operation at room temperature. The goal of the characterization is the evaluation of the gain, the response in time and the single photoelectron spectrum as a function of the electric field and the photoelectron emission angle. Details of future tests will be also discussed.

Practical photomask pinhole defect repair using micrometer scale pattern Cd CVD with kHz repetition UV light pulses

1985 ◽  
Author(s):  
Y. MORISHIGE ◽  
H. YOKOYAMA ◽  
S. KISHIDA ◽  
K. WASHIO ◽  
H. KINOSHITA ◽  
...  
Keyword(s):  
Uv Light ◽  
Light Pulses ◽  
Defect Repair ◽  
Micrometer Scale

Processing and Applications of "Oxide Nanoskin"

2006 ◽  
Vol 45 ◽  
pp. 660-667
Author(s):  
Atsushi Hozumi
Keyword(s):  
Growth Rate ◽  
Vacuum Ultraviolet ◽  
Silicon Oxide ◽  
Uv Light ◽  
Surface Acidity ◽  
Native Oxide ◽  
Self Assembled Monolayer ◽  
Polymer Substrates ◽  
Si Substrates ◽  
Pattern Resolution

A novel photochemical approach is presented to fabricate a silicon oxide (SiOx) layer, which we have named an “oxide nanoskin” (ONS), whose thickness is defined in the molecular-order of 1~3 nm. Through the chemisorption of a vapor phase organosilane and subsequent photooxidation using 172 nm vacuum ultraviolet (UV) light, an extremely flat SiOx layer without cracks or aggregates was formed on various polymer substrates. Owing to this ONS coating, the charge density and surface acidity of the polymer substrates became almost equal to those of a native oxide-covered Si (SiOx/Si) substrate. In addition, there was marked improvement in the durability of the hydrophilicity and in the micro-wear resistance of the polymer surfaces. Moreover, organosilane self-assembled monolayer (SAM) chemistry currently available for the treatment of inorganic glass and Si substrates could be similarly utilized. Well-ordered SAMs with a wide variety of terminal-end groups (e.g., trifluorocarbon or amino groups) could be fabricated even on inert polymer substrates, in a manner similar to their fabrication on SiOx/Si substrates. Furthermore, we demonstrated the site-selective deposition of metal oxide and metal films on polymer substrates using photolithographically micropatterned SAMs as microtemplates. Well-shaped microstructures were achieved only on the polymer substrates with the ONS layer. On the substrates without the ONS layer, pattern resolution degraded significantly and growth rate decreased, since both depended greatly on the SAM density and quality. Our ONS was very useful not only in forming highly ordered SAMs on the polymer substrates, but also in obtaining excellent pattern resolution, sufficient growth rate, and adhesion of the target materials.

Synthesis and Properties of a New Type Diarylethene Bearing Benzo[b]thiophen Aryl Unit

2011 ◽  
Vol 393-395 ◽  
pp. 1510-1513
Author(s):  
Shang Hua He ◽  
Shou Zhi Pu ◽  
Shi Qiang Cui
Keyword(s):  
Fluorescence Spectra ◽  
Uv Light ◽  
Amorphous Film ◽  
Fluorescent Properties ◽  
New Type

A new type photochromic diarylethene, 1-(2-methyl-3-benzothiophenyl)-2- [2-methyl-5-(3,5-difluorophenyl)-3-thienyl]perfluorocyclopentene (1o) was synthesized, and its photochromic and fluorescent properties were investigated. This compound exhibited reversible photochromism, changing from colorless to pink after irradiation with UV light both in solution and in PMMA amorphous film. In addition, the fluorescence spectra of diarylethene 1o evidently depended on the concentration in hexane.

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