scholarly journals The Hybrid Fabrication Process of Metal/Silicon Composite Structure for MEMS S&A Device

Micromachines ◽  
2019 ◽  
Vol 10 (7) ◽  
pp. 469 ◽  
Author(s):  
Tengjiang Hu ◽  
Kuang Fang ◽  
Zhiming Zhang ◽  
Xiaohua Jiang ◽  
Yulong Zhao
Keyword(s):  
High Precision ◽  
Composite Structure ◽  
Inductively Coupled Plasma ◽  
Fabrication Process ◽  
Silicon On Insulator ◽  
Cover Plate ◽  
Inductively Coupled ◽  
Structure Strength ◽  
Silicon Based ◽  
High Structure

The micro-electromechanical system (MEMS) safety-and-arming (S&A) device has the features of integration and miniaturization, which is one of the important directions of weapon development. Confined by the fabrication process, the silicon-based devices are too fragile, and the metal-based devices are low precision. In order to solve the contradiction between high precision and high structure strength, a metal/silicon composite structure is proposed in this paper, and a hybrid fabrication process is introduced. This new method mainly consists of metal sputtering, electroplating, and (inductively–coupled-plasma) ICP etching. As the resolution of the thick dry film is limited, the process of a femtosecond laser is applied to refine the structure, and the Ni plate (a block of 1 mm × 3 mm × 0.3 mm with a cavity of ϕ 0.85 mm × 0.3 mm in the center) is fabricated on the silicon-on-insulator (SOI) wafer successfully. After the double sides are etched by ICP, the SOI wafer is immersed in a buffered-oxide-etch (BOE) etchant to remove the buried layer. The cover plate acts as the encapsulation and is bonded with the SOI wafer by the epoxy glue. Then, the temporary support beam of the device is broken by the probe, and the suspended composite structure can be fully released. The hybrid process is the integration of the silicon-based process and the metal-based process, which can combine the advantages of both high precision and a high structure strength. The process proposed here is suitable for the application of weapon miniaturization.

Direct measurement of Fe isotope compositions in iron-dominate minerals without column chromatography using MC-ICP-MS

2022 ◽  
Author(s):  
Kaiyun Chen ◽  
Zhian Bao ◽  
Honglin Yuan ◽  
Nan Lv
Keyword(s):  
Mass Spectrometry ◽  
Direct Measurement ◽  
High Precision ◽  
Column Chromatography ◽  
Inductively Coupled Plasma ◽  
Practical Method ◽  
Inductively Coupled ◽  
Icp Ms ◽  
Plasma Mass Spectrometry ◽  
Isotope Determination

This study presents a practical method for high-precision Fe isotope determination without column chromatography purification for iron-dominated mineral samples using multi-collector inductively coupled plasma-mass spectrometry (MC-ICP-MS). A series of comparable...

The Giant Chalukou Porphyry Mo Deposit, Northeast China: The Product of a Short-Lived, High Flux Mineralizing Event

2021 ◽  
Author(s):  
Qingqing Zhao ◽  
Degao Zhai ◽  
Ryan Mathur ◽  
Jiajun Liu ◽  
David Selby ◽  
...  
Keyword(s):  
High Precision ◽  
Inductively Coupled Plasma ◽  
Hydrothermal Activity ◽  
Ore Deposits ◽  
Ionization Mass ◽  
Inductively Coupled ◽  
Fine Grained ◽  
Porphyry Cu ◽  
Icp Ms ◽  
Porphyry Mo Deposit

Abstract Whether giant porphyry ore deposits are the products of single, short-lived magmatic-hydrothermal events or multiple events over a prolonged interval is a topic of considerable debate. Previous studies, however, have all been devoted to porphyry Cu and Cu-Mo deposits. In this paper, we report high-precision isotope dilution-negative-thermal ionization mass spectrometric (ID-N-TIMS) molybdenite Re-Os ages for the newly discovered, world-class Chalukou porphyry Mo deposit (reserves of 2.46 Mt @ 0.087 wt % Mo) in NE China. Samples were selected based on a careful evaluation of the relative timing of the different vein types (i.e., A, B, and D veins), thereby ensuring that the suite of samples analyzed could be used to reliably determine the age and duration of mineralization. The molybdenite Re-Os geochronology reveals that hydrothermal activity at Chalukou involved two magmatic-hydrothermal events spanning an interval of 6.92 ± 0.16 m.y. The first event (153.96 ± 0.08/0.63/0.79 Ma, molybdenite ID-N-TIMS Re-Os age) was associated with the emplacement of a granite porphyry dated at 152.1 ± 2.2 Ma (zircon laser ablation-inductively coupled plasma-microscopic [LA-ICP-MS] U-Pb ages), and led to only minor Mo mineralization, accounting for <10% of the overall Mo budget. The bulk of the Mo (>90%) was deposited in less than 650 kyr, between 147.67 ± 0.10/0.60/0.76 and 147.04 ± 0.12/0.72/0.86 Ma (molybdenite ID-N-TIMS Re-Os ages), coincident with the emplacement of a fine-grained porphyry at 148.1 ± 2.6 Ma (zircon LA-ICP-MS U-Pb ages). The high-precision Re-Os age determinations presented here show, contrary to the finding of a number of studies of porphyry Cu and Cu-Mo systems, that the giant Chalukou porphyry Mo deposit primarily formed in a single, short-lived (<650 kyr) hydrothermal event, suggesting that this may also have been the case for other giant porphyry Mo deposits.

High-precision analysis of potassium isotopes by MC-ICP-MS without collision cell using cool plasma technique in low resolution mode

2021 ◽  
Author(s):  
Hai-Ou Gu ◽  
Sun He
Keyword(s):  
High Precision ◽  
Inductively Coupled Plasma ◽  
Isotope Analysis ◽  
Collision Cell ◽  
Low Resolution ◽  
Inductively Coupled ◽  
Plasma Technique ◽  
Icp Ms ◽  
Cool Plasma ◽  
Plasma Mass Spectrometry

This study presents a method for high-precision stable potassium (K) isotope analysis using Multi-Collector Inductively Coupled Plasma Mass Spectrometry (MC-ICPMS) without collision cell in low resolution mode. Cold plasma technique...

scholarly journals Light Extraction Enhancement of InGaN Based Micro Light-Emitting Diodes with Concave-Convex Circular Composite Structure Sidewall

2019 ◽  
Vol 9 (17) ◽  
pp. 3458 ◽  
Author(s):  
Tan ◽  
Zhou ◽  
Hu ◽  
Wang ◽  
Yao
Keyword(s):  
Composite Structure ◽  
Inductively Coupled Plasma ◽  
Total Internal Reflection ◽  
Light Emitting Diodes ◽  
Light Output ◽  
Electrical Characteristics ◽  
Light Emitting ◽  
Inductively Coupled ◽  
Icp Etching ◽  
Output Characteristics

We demonstrate that the concave-convex circular composite structure sidewall prepared by inductively coupled plasma (ICP) etching is an effective approach to increase the light efficiency without deteriorating the electrical characteristics for micro light-emitting diodes (LEDs). The saturated light output power of the device using the concave-convex circular composite structure sidewalls with a radius of 2 μm is 39.75 mW, an improvement of 7.2% compared with that of the device using flat sidewalls. The enhanced light output characteristics are primarily attributed to the increased photon emitting due by decreasing the total internal reflection without losing the active region area.

scholarly journals Analysis of high-precision vanadium isotope ratios by medium resolution MC-ICP-MS

2016 ◽  
Vol 31 (2) ◽  
pp. 531-536 ◽  
Author(s):  
Sune G. Nielsen ◽  
Jeremy D. Owens ◽  
Tristan J. Horner
Keyword(s):  
High Precision ◽  
Mass Spectrometer ◽  
Inductively Coupled Plasma ◽  
Isotope Ratios ◽  
Mass Resolution ◽  
New Method ◽  
Inductively Coupled ◽  
Medium Resolution ◽  
Medium Mass ◽  
Icp Ms

We present and verify a new method to measure vanadium isotope ratios using a Thermo Scientific Neptune multi-collector inductively-coupled plasma mass spectrometer (MC-ICP-MS) operated in medium mass resolution mode.

Iron isotopic analysis of finger-prick and venous blood by multi-collector inductively coupled plasma-mass spectrometry after volumetric absorptive microsampling

2017 ◽  
Vol 32 (2) ◽  
pp. 314-321 ◽  
Author(s):  
Yulia Anoshkina ◽  
Marta Costas-Rodríguez ◽  
Frank Vanhaecke
Keyword(s):  
Mass Spectrometry ◽  
High Precision ◽  
Whole Blood ◽  
Inductively Coupled Plasma ◽  
Venous Blood ◽  
Isotopic Analysis ◽  
Inductively Coupled ◽  
Finger Prick ◽  
Plasma Mass Spectrometry ◽  
Volumetric Absorptive Microsampling

The use of VAMS – volumetric absorptive microsampling – of finger-prick blood was evaluated in the context of high-precision isotopic analysis of whole blood Fe by multi-collector inductively coupled plasma-mass spectrometry.

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