scholarly journals An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability

Micromachines ◽  
2019 ◽  
Vol 10 (5) ◽  
pp. 323 ◽  
Author(s):  
Liang Zhou ◽  
Xiaoyang Zhang ◽  
Huikai Xie
Keyword(s):  
Thin Film ◽  
Response Time ◽  
High Reliability ◽  
Resonant Frequencies ◽  
Piston Displacement ◽  
Fabrication And Characterization ◽  
Measured Response

This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination of surface and bulk micromachining. The piston displacement and tip-tilt optical angle of the mirror plate of the fabricated MEMS mirror are around 114 μm and ±8°, respectively at only 2.35 V. The measured response time is 7.3 ms. The piston and tip-tilt resonant frequencies are measured to be 1.5 kHz and 2.7 kHz, respectively. The MEMS mirror survived 220 billion scanning cycles with little change of its scanning characteristics, indicating that the MEMS mirror is stable and reliable.

scholarly journals Fabrication and characterization of copper-tin-sulfide thin film

2018 ◽  
Author(s):  
F. Welatta ◽  
A. El Kissani ◽  
M. Aggour ◽  
A. Outzourhit
Keyword(s):  
Thin Film ◽  
Tin Sulfide ◽  
Fabrication And Characterization

scholarly journals Fabrication and Characterization of PCBM: P3HT-based Thin-film Organic Solar Cells with Zinc Phthalocyanine and 1,8-Diiodooctane

2017 ◽  
Vol 5 (1) ◽  
pp. 1-7 ◽  
Author(s):  
Haruto Maruhashi ◽  
Takeo Oku ◽  
Atsushi Suzuki ◽  
Tsuyoshi Akiyama ◽  
Yasuhiro Yamasaki
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Organic Solar Cells ◽  
Zinc Phthalocyanine ◽  
Fabrication And Characterization
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