Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices
Keyword(s):
Micro and nanoelectromechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within integrated circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors [...]
2021 ◽
Vol 11
(1)
◽
pp. 6
2003 ◽
Vol 38
(3)
◽
pp. 391-393
◽
Keyword(s):
2012 ◽
Vol 47
(8)
◽
pp. 1798-1799
2018 ◽
pp. 2897-2907
Keyword(s):
2005 ◽
Vol 5
(2)
◽
pp. 167-167
2012 ◽
Vol 370
(1973)
◽
pp. 4015-4041
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