Arsenic-Doped High-Resistivity-Silicon Epitaxial Layers for Integrating Low-Capacitance Diodes
1988 ◽
Vol 49
(C4)
◽
pp. C4-363-C4-366
◽
2003 ◽
Vol 512
(1-2)
◽
pp. 199-206
◽
2010 ◽
Vol 58
(3)
◽
pp. 706-713
◽