Subsurface Damage in Polishing Process of Silicon Carbide Ceramic
2020 ◽
Vol 282
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pp. 116667
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Keyword(s):
Keyword(s):
2019 ◽
Vol 210
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pp. 189-201
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1993 ◽
Vol 76
(9)
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pp. 2300-2304
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Keyword(s):
2014 ◽
Vol 800-801
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pp. 203-207
Keyword(s):
2018 ◽
Vol 44
(12)
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pp. 14742-14753
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