Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering

Junichi Nomoto; Katsuhiko Inaba; Shintaro Kobayashi; Takeshi Watanabe; Hisao Makino; Tetsuya Yamamoto

doi:10.3390/ma10080916

Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering

Materials ◽

10.3390/ma10080916 ◽

2017 ◽

Vol 10 (8) ◽

pp. 916 ◽

Cited By ~ 10

Author(s):

Junichi Nomoto ◽

Katsuhiko Inaba ◽

Shintaro Kobayashi ◽

Takeshi Watanabe ◽

Hisao Makino ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Direct Current ◽

Crystallographic Orientation ◽

Carrier Transport ◽

Orientation Distribution ◽

Polycrystalline Films ◽

Direct Current Magnetron Sputtering ◽

Doped Zno

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Characteristics of the orientation distribution and carrier transport of polycrystalline Al-doped ZnO films prepared by direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2017.10.004 ◽

2017 ◽

Vol 644 ◽

pp. 33-40 ◽

Cited By ~ 8

Author(s):

Junichi Nomoto ◽

Hisao Makino ◽

Tetsuya Yamamoto

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Carrier Transport ◽

Orientation Distribution ◽

Zno Films ◽

Direct Current Magnetron Sputtering ◽

Doped Zno

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Carrier mobility of highly transparent conductive Al-doped ZnO polycrystalline films deposited by radio-frequency, direct-current, and radio-frequency-superimposed direct-current magnetron sputtering: Grain boundary effect and scattering in the grain bulk

Journal of Applied Physics ◽

10.1063/1.4906353 ◽

2015 ◽

Vol 117 (4) ◽

pp. 045304 ◽

Cited By ~ 36

Author(s):

Junichi Nomoto ◽

Hisao Makino ◽

Tetsuya Yamamoto

Keyword(s):

Grain Boundary ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Direct Current ◽

Carrier Mobility ◽

Boundary Effect ◽

Direct Current Magnetron Sputtering ◽

Doped Zno ◽

Grain Bulk ◽

Grain Boundary Effect

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Tungsten-doped ZnO transparent conducting films deposited by direct current magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2010.05.010 ◽

2010 ◽

Vol 85 (2) ◽

pp. 184-186 ◽

Cited By ~ 16

Author(s):

Huafu Zhang ◽

Hanfa Liu ◽

Chengxin Lei ◽

Changkun Yuan ◽

Aiping Zhou

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Transparent Conducting Films ◽

Transparent Conducting ◽

Direct Current Magnetron Sputtering ◽

Doped Zno

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Characteristics of Al doped ZnO co-sputtered InZnO anode films prepared by direct current magnetron sputtering for organic light-emitting diodes

Thin Solid Films ◽

10.1016/j.tsf.2008.05.035 ◽

2008 ◽

Vol 516 (21) ◽

pp. 7866-7870 ◽

Cited By ~ 22

Author(s):

Jung-Hyeok Bae ◽

Han-Ki Kim

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Light Emitting Diodes ◽

Organic Light Emitting Diodes ◽

Light Emitting ◽

Organic Light ◽

Direct Current Magnetron Sputtering ◽

Doped Zno ◽

Anode Films

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Chemical trends of n-type doping of Al, Ga, In, and Ti donors for ZnO polycrystalline films deposited by direct-current magnetron sputtering

Journal of Applied Physics ◽

10.1063/5.0021613 ◽

2020 ◽

Vol 128 (14) ◽

pp. 145303

Author(s):

Junichi Nomoto ◽

Hisao Makino ◽

Tetsuo Tsuchiya ◽

Tetsuya Yamamoto

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Polycrystalline Films ◽

Direct Current Magnetron Sputtering ◽

Chemical Trends

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Effect of deposition power on structural and electrical properties of Al-doped ZnO films using pulsed direct-current magnetron sputtering with single cylindrical target

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2010.12.013 ◽

2011 ◽

Vol 14 (1) ◽

pp. 23-27 ◽

Cited By ~ 12

Author(s):

Beom-Ki Shin ◽

Tae-Il Lee ◽

Jyoti Prakash Kar ◽

Min-Jung Lee ◽

Kang-Il Park ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Zno Films ◽

Deposition Power ◽

Structural And Electrical Properties ◽

Direct Current Magnetron Sputtering ◽

Cylindrical Target ◽

Doped Zno ◽

Pulsed Direct Current

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Effect of moving speed during in-line pulsed direct-current magnetron sputtering deposition on the structural and optical properties of Al-doped ZnO films

Thin Solid Films ◽

10.1016/j.tsf.2017.07.014 ◽

2017 ◽

Vol 638 ◽

pp. 144-152 ◽

Cited By ~ 1

Author(s):

Sung Yong Kim ◽

Eou-Sik Cho ◽

Sang Jik Kwon

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Zno Films ◽

Structural And Optical Properties ◽

Sputtering Deposition ◽

Direct Current Magnetron Sputtering ◽

Doped Zno ◽

Pulsed Direct Current ◽

Moving Speed

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Surface Texturing of Ga-Doped ZnO Thin Films by Pulsed Direct-Current Magnetron Sputtering for Photovoltaic Applications

Journal of Electronic Materials ◽

10.1007/s11664-011-1835-2 ◽

2011 ◽

Vol 41 (3) ◽

pp. 442-450

Author(s):

Y. C. Lin ◽

W. T. Yen ◽

C. H. Shen ◽

P. C. Yao

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Direct Current ◽

Surface Texturing ◽

Zno Thin Films ◽

Direct Current Magnetron Sputtering ◽

Photovoltaic Applications ◽

Doped Zno ◽

Pulsed Direct Current

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Correlation between the electrical and structural properties of aluminium-doped ZnO thin films obtained by direct current magnetron sputtering

Journal of Physics Conference Series ◽

10.1088/1742-6596/417/1/012011 ◽

2013 ◽

Vol 417 ◽

pp. 012011

Author(s):

L Avril ◽

Ph Guaino ◽

F Maseri ◽

K Muthukaruppasamy ◽

J-J Pireaux

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Structural Properties ◽

Direct Current ◽

Zno Thin Films ◽

Direct Current Magnetron Sputtering ◽

Doped Zno

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Deposition and corrosion behavior of -oriented vanadium thick films by direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2020.138491 ◽

2020 ◽

pp. 138491

Author(s):

Song Zhang ◽

Wenhua Xu ◽

Jun Li ◽

Rong Tu

Keyword(s):

Magnetron Sputtering ◽

Corrosion Behavior ◽

Direct Current ◽

Thick Films ◽

Direct Current Magnetron Sputtering

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