scholarly journals Direct-Write Dewetting of High Melting Temperature Metals on Flexible Substrates

2019 ◽  
Vol 9 (15) ◽  
pp. 3165
Author(s):  
Anthony J. Ferrer ◽  
Anna Halajko ◽  
Glenn G. Amatucci

Microelectromechanical systems (MEMS) are pervasive in modern technology due to their reliability, small foot print, and versatility of function. While many of the manufacturing techniques for MEMS devices stem from integrated circuit (IC) manufacturing, the wide range of designs necessitates more varied processing techniques. Here, new details of a scanning laser based direct-write dewetting technique are presented as an expansion of previous demonstrations. For the first time, the ability to pattern a high melting temperature and high reflectance metallic thin films of Ni and Ag, respectively, on polymer substrates is reported. Novel methods for reducing the power necessary for processing highly reflective films are demonstrated by depositing very thin films of high near-infrared absorbance.

2016 ◽  
Vol 37 (10) ◽  
pp. 851-857 ◽  
Author(s):  
Malte Winnacker ◽  
Michael Neumeier ◽  
Xiaohan Zhang ◽  
Christine M. Papadakis ◽  
Bernhard Rieger

2018 ◽  
Vol 96 (12) ◽  
pp. 1079-1086 ◽  
Author(s):  
Molla R. Islam ◽  
Shakiba Azimi ◽  
Faranak Teimoory ◽  
Glen Loppnow ◽  
Michael J. Serpe

In this investigation, we show that RNA can be separated from a solution containing DNA and RNA and the isolated RNA can be detected using poly (N-isopropylacrylamide-co-N-(3-aminopropyl) methacrylamide hydrochloride) microgel-based optical devices (etalons). The isolation of RNA was accomplished by using hairpin-functionalized magnetic beads (MMPDNA) and differential melting, based on the fact that the DNA–RNA hybrid duplex is stronger (i.e., high melting temperature) than the DNA–DNA duplex (i.e., low melting temperature). By performing concurrent etalon sensing and fluorescent studies, we found that the MMPDNA combined with differential melting was capable of selectively separating RNA from DNA. This selective separation and simple colorimetric detection of RNA from a mixture will help lead to future RNA-based disease diagnostic devices.


2008 ◽  
Vol 1139 ◽  
Author(s):  
Kwangsik Kwak ◽  
Masaaki Otsu ◽  
Kazuki Takashima

AbstractFatigue properties of thin film materials are extremely important to design durable and reliable microelectromechanical systems (MEMS) devices. However, it is rather difficult to apply conventional fatigue testing method of bulk materials to thin films. Therefore, a fatigue testing method fitted to thin film materials is required. In this investigation, we have developed a fatigue testing method that uses a resonance of cantilever type specimen prepared from thin films. Cantilever beam specimens with dimensions of 1(W) × 3(L) × 0.01(t) mm3 were prepared from Ni-P amorphous alloy thin films and gold foils. In addition, cantilever beam specimens with dimension of 3(L) × 0.3(W) × 0.005(t) mm3 were also prepared from single crystalline silicon thin films. These specimens were fixed to a holder that is connected to an golddio speaker used as an actuator, and were resonated in bending mode. In order to check the validity of this testing method, Young's moduli of these specimens were measured from resonant frequencies. The average Young's modulus of Ni-P was 108 GPa and that of gold foil specimen was 63 GPa, and these values were comparable with those measured by other techniques. This indicates that the resonance occurred theoretically-predicted manner and this testing method is valid for measuring the fatigue properties of thin films. Resonant fatigue tests were carried out for these specimens by changing amplitude range of resonance, and S-N curves were successfully obtained.


2010 ◽  
Vol 132 (12) ◽  
pp. 124511 ◽  
Author(s):  
Noah Kastelowitz ◽  
Jessica C. Johnston ◽  
Valeria Molinero

MRS Bulletin ◽  
2009 ◽  
Vol 34 (9) ◽  
pp. 658-664 ◽  
Author(s):  
P. Muralt ◽  
R. G. Polcawich ◽  
S. Trolier-McKinstry

AbstractPiezoelectric microelectromechanical systems (MEMS) offer the opportunity for high-sensitivity sensors and large displacement, low-voltage actuators. In particular, recent advances in the deposition of perovskite thin films point to a generation of MEMS devices capable of large displacements at complementary metal oxide semiconductor-compatible voltage levels. Moreover, if the devices are mounted in mechanically noisy environments, they also can be used for energy harvesting. Key to all of these applications is the ability to obtain high piezoelectric coefficients and retain these coefficients throughout the microfabrication process. This article will review the impact of composition, orientation, and microstructure on the piezoelectric properties of perovskite thin films such as PbZr1−xTixO3 (PZT). Superior piezoelectric coefficients (e31, f of −18 C/m2) are achieved in {001}-oriented PbZr0.52Ti0.48O3 films with improved compositional homogeneity on Si substrates. The advent of such high piezoelectric responses in films opens up a wide variety of possible applications. A few examples of these, including low-voltage radio frequency MEMS switches and resonators, actuators for millimeter-scale robotics, droplet ejectors, energy scavengers for unattended sensors, and medical imaging transducers, will be discussed.


2006 ◽  
Vol 20 (25n27) ◽  
pp. 3757-3762 ◽  
Author(s):  
JAE-HYUN KIM ◽  
HAK-JOO LEE ◽  
SEUNG-WOO HAN ◽  
JUNG-YUP KIM ◽  
JUNG-SIL KIM ◽  
...  

Radio frequency microelectromechanical systems (RF–MEMS) are an attractive solution for wireless telecommunication applications. Freestanding films play an important role in RF–MEMS devices. For the successful commercialization of RF–MEMS devices, however, it is necessary to evaluate the mechanical reliability of freestanding films. The first step in the evaluation is to characterize the mechanical behavior of the films. This study focuses on freestanding Mo thin films. Mo test structures with a thickness of 960 nm were fabricated using sputtering deposition and patterned using a surface and bulk micromachining process. The strip-bending test was used to measure the stress–strain relation of the freestanding Mo thin films. The measured elastic modulus, initial stress, and yield strength of Mo thin films are reported.


1995 ◽  
Vol 10 (2) ◽  
pp. 240-242 ◽  
Author(s):  
Toshiyuki Nishimura ◽  
Mamoru Mitomo

Phase relationships in the system Si3N4−SiO2−Yb2O3 have been investigated at 1750 °C and compared with those in the system Si3N4−SiO2−Y2O3. Two types of ytterbium silicon oxynitride, Yb2Si3O3N4 (tetragonal) and Yb4Si2O7N2 (monoclinic), were confirmed to exist. The x-ray powder diffraction data of two compounds were indexed based on the space group and unit cells. Melting temperature of Yb4Si2O7N2 was determined as 1870 °C. Yb4Si2O7N2 is a better intergranular phase of silicon nitride ceramics for its high melting temperature.


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