scholarly journals Metrology of Nanostructures by Tomographic Mueller-Matrix Scatterometry

2018 ◽  
Vol 8 (12) ◽  
pp. 2583 ◽  
Author(s):  
Chao Chen ◽  
Xiuguo Chen ◽  
Yating Shi ◽  
Honggang Gu ◽  
Hao Jiang ◽  
...  
Keyword(s):  
Plane Wave ◽  
Scattered Field ◽  
Structural Parameters ◽  
Low Cost ◽  
Mueller Matrix ◽  
Zeroth Order ◽  
Measurement Sensitivity ◽  
Illumination Direction ◽  
Test Conditions ◽  
Mueller Matrices

The development of necessary instrumentation and metrology at the nanoscale, especially fast, low-cost, and nondestructive metrology techniques, is of great significance for the realization of reliable and repeatable nanomanufacturing. In this work, we present the application of a homemade novel optical scatterometer called the tomographic Mueller-matrix scatterometer (TMS), for the measurement of photoresist gratings. The TMS adopts a dual rotating-compensator configuration and illuminates the nanostructure sequentially under test conditions by a plane wave, with varying illumination directions and records. For each illumination direction, the polarized scattered field along various directions of observation can be seen in the form of scattering Mueller matrices. That more scattering information is collected by TMS than conventional optical scatterometry ensures that it achieves better measurement sensitivity and accuracy. We also show the capability of TMS for determining both grating pitch and other structural parameters, which is incapable by current zeroth-order methods such as reflectometry- or ellipsometry-based scatterometry.

scholarly journals All-Solid-State Potentiometric Ion-Sensors Based on Tailored Imprinted Polymers for Pholcodine Determination

Polymers ◽  
2021 ◽  
Vol 13 (8) ◽  
pp. 1192
Author(s):  
Hisham S. M. Abd-Rabboh ◽  
Abd El-Galil E. Amr ◽  
Abdulrahman A. Almehizia ◽  
Ayman H. Kamel
Keyword(s):  
Solid State ◽  
Low Cost ◽  
Cost Effective ◽  
Pharmaceutical Formulations ◽  
Measurement Sensitivity ◽  
Serum Samples ◽  
Multiwalled Carbon ◽  
Imprinted Polymers ◽  
High Measurement ◽  
Liquid Chromatographic

In recent times, the application of the use of ion-selective electrodes has expanded in the field of pharmaceutical analyses due to their distinction from other sensors in their high selectivity and low cost of measurement, in addition to their high measurement sensitivity. Cost-effective, reliable, and robust all-solid-state potentiometric selective electrodes were designed, characterized, and successfully used for pholcodine determination. The design of the sensor device was based on the use of a screen-printed electrode modified with multiwalled carbon nanotubes (MWCNTs) as a solid-contact transducer. Tailored pholcodine (PHO) molecularly imprinted polymers (MIPs) were prepared, characterized, and used as sensory receptors in the presented potentiometric sensing devices. The sensors exhibited a sensitivity of 31.6 ± 0.5 mV/decade (n = 5, R2 = 0.9980) over the linear range of 5.5 × 10−6 M with a detection limit of 2.5 × 10−7 M. Real serum samples in addition to pharmaceutical formulations containing PHO were analyzed, and the results were compared with those obtained by the conventional standard liquid chromatographic approach. The presented analytical device showed an outstanding efficiency for fast, direct, and low-cost assessment of pholcodine levels in different matrices.

scholarly journals Universal Synthesizer of Mueller Matrices Based on the Symmetry Properties of the Enpolarizing Ellipsoid

Symmetry ◽  
2021 ◽  
Vol 13 (6) ◽  
pp. 983
Author(s):  
José J. Gil ◽  
Ignacio San José
Keyword(s):  
Mathematical Structure ◽  
Mueller Matrix ◽  
Morphological Properties ◽  
Nondestructive Analysis ◽  
Structural Decomposition ◽  
Symmetry Properties ◽  
Mueller Matrices ◽  
Scattering Measurement ◽  
The Way

Polarimetry is today a widely used and powerful tool for nondestructive analysis of the structural and morphological properties of a great variety of material samples, including aerosols and hydrosols, among many others. For each given scattering measurement configuration, absolute Mueller polarimeters provide the most complete polarimetric information, intricately encoded in the 16 parameters of the corresponding Mueller matrix. Thus, the determination of the mathematical structure of the polarimetric information contained in a Mueller matrix constitutes a topic of great interest. In this work, besides a structural decomposition that makes explicit the role played by the diattenuation-polarizance of a general depolarizing medium, a universal synthesizer of Muller matrices is developed. This is based on the concept of an enpolarizing ellipsoid, whose symmetry features are directly linked to the way in which the polarimetric information is organized.

scholarly journals Optical Chirality Determined from Mueller Matrices

2021 ◽  
Vol 11 (15) ◽  
pp. 6742
Author(s):  
Hans Arwin ◽  
Stefan Schoeche ◽  
James Hilfiker ◽  
Mattias Hartveit ◽  
Kenneth Järrendahl ◽  
...  
Keyword(s):  
Circular Dichroism ◽  
Constitutive Relations ◽  
Mueller Matrix ◽  
Optical Path ◽  
Electromagnetic Modeling ◽  
Structural Effects ◽  
Polarization Effects ◽  
Optical Chirality ◽  
Mueller Matrices ◽  
Circular Dichroïsm

Optical chirality, in terms of circular birefringence and circular dichroism, is described by its electromagnetic and magnetoelectric material tensors, and the corresponding optical activity contributes to the Mueller matrix. Here, spectroscopic ellipsometry in the spectral range 210–1690 nm is used to address chiral phenomena by measuring Mueller matrices in transmission. Three approaches to determine chirality parameters are discussed. In the first approach, applicable in the absence of linear polarization effects, circular birefringence and circular dichroism are evaluated directly from elements of a Mueller matrix. In the second method, differential decomposition is employed, which allows for the unique separation of chirality parameters from linear anisotropic parameters as well as from depolarization provided that the sample is homogeneous along the optical path. Finally, electromagnetic modeling using the Tellegen constitutive relations is presented. The last method also allows structural effects to be included. The three methods to quantify optical chirality are demonstrated for selected materials, including sugar solutions, α-quartz, liquid crystals, beetle cuticle, and films of cellulose nanocrystals.

scholarly journals Ultrasonic Scattered Field Distribution of One and Two Cylindrical Solids with Phased Array Technique

2019 ◽  
Vol 32 (1) ◽  
Author(s):  
Xiaozhou Liu ◽  
Jian Ma ◽  
Haibin Wang ◽  
Sha Gao ◽  
Yifeng Li ◽  
...  
Keyword(s):  
Plane Wave ◽  
Field Distribution ◽  
Scattered Field ◽  
Phased Array ◽  
Simulation Analysis ◽  
Plane Waves ◽  
Theoretical Solution ◽  
Steel Matrix ◽  
Field Distributions ◽  
Scattered Fields

AbstractThe scattered fields of plane waves in a solid from a cylinder or sphere are critical in determining its acoustic characteristics as well as in engineering applications. This paper investigates the scattered field distributions of different incident waves created by elastic cylinders embedded in an elastic isotropic medium. Scattered waves, including longitudinal and transverse waves both inside and outside the cylinder, are described with specific modalities under an incident plane wave. A model with a scatterer embedded in a structural steel matrix and filled with aluminum is developed for comparison with the theoretical solution. The frequency of the plane wave ranged from 235 kHz to 2348 kHz, which corresponds to scaling factors from 0.5 to 5. Scattered field distributions in matrix materials blocked by an elastic cylindrical solid have been obtained by simulation or calculated using existing parameters. The simulation results are in good agreement with the theoretical solution, which supports the correctness of the simulation analysis. Furthermore, ultrasonic phased arrays are used to study scattered fields by changing the characteristics of the incident wave. On this foundation, a partial preliminary study of the scattered field distribution of double cylinders in a solid has been carried out, and the scattered field distribution at a given distance has been found to exhibit particular behaviors at different moments. Further studies on directivities and scattered fields are expected to improve the quantification of scattered images in isotropic solid materials by the phased array technique.

scholarly journals Imaging Mueller matrix ellipsometry setup for optical nanoform metrology

2020 ◽  
Vol 238 ◽  
pp. 06006
Author(s):  
Tim Käseberg ◽  
Jana Grundmann ◽  
Johannes Dickmann ◽  
Stefanie Kroker ◽  
Bernd Bodermann
Keyword(s):  
Finite Element Method ◽  
Finite Element ◽  
Numerical Simulations ◽  
Mueller Matrix ◽  
The Finite Element Method ◽  
Mueller Matrices ◽  
Microscope Images ◽  
Element Method

We designed, realized, and characterised an imaging Mueller matrix ellipsometry setup for the pixelwise measurement of the Mueller matrices in microscope images. Our setup is capable of performing measurements in reflection as well as in transmission in a broad range of angles of incidence for wavelengths between 400 nm and 700 nm. We compared measurements of specially designed nanostructured samples with AFM and SEM measurements as well as with numerical simulations using the finite element method.

A method for the exact solution of a class of two-dimensional diffraction problems

1951 ◽  
Vol 205 (1081) ◽  
pp. 286-308 ◽  
Keyword(s):  
Integral Equation ◽  
Plane Wave ◽  
Integral Equations ◽  
Scattered Field ◽  
Plane Waves ◽  
Angular Spectrum ◽  
Diffraction Theory ◽  
General Interest ◽  
Two Dimensional ◽  
Dual Integral Equations

In the last few years Copson, Schwinger and others have obtained exact solutions of a number of diffraction problems by expressing these problems in terms of an integral equation which can be solved by the method of Wiener and Hopf. A simpler approach is given, based on a representation of the scattered field as an angular spectrum of plane waves, such a representation leading directly to a pair of ‘dual’ integral equations, which replaces the single integral equation of Schwinger’s method. The unknown function in each of these dual integral equations is that defining the angular spectrum, and when this function is known the scattered field is presented in the form of a definite integral. As far as the ‘radiation’ field is concerned, this integral is of the type which may be approximately evaluated by the method of steepest descents, though it is necessary to generalize the usual procedure in certain circumstances. The method is appropriate to two-dimensional problems in which a plane wave (of arbitrary polarization) is incident on plane, perfectly conducting structures, and for certain configurations the dual integral equations can be solved by the application of Cauchy’s residue theorem. The technique was originally developed in connexion with the theory of radio propagation over a non-homogeneous earth, but this aspect is not discussed. The three problems considered are those for which the diffracting plates, situated in free space, are, respectively, a half-plane, two parallel half-planes and an infinite set of parallel half-planes; the second of these is illustrated by a numerical example. Several points of general interest in diffraction theory are discussed, including the question of the nature of the singularity at a sharp edge, and it is shown that the solution for an arbitrary (three-dimensional) incident field can be derived from the corresponding solution for a two-dimensional incident plane wave.

scholarly journals Fuzzy uncertainty analysis and reliability assessment of aeroelastic aircraft wings

2020 ◽  
Vol 124 (1275) ◽  
pp. 786-811
Author(s):  
M. Rezaei ◽  
S.A. Fazelzadeh ◽  
A. Mazidi ◽  
M.I. Friswell ◽  
H.H. Khodaparast
Keyword(s):  
Structural Parameters ◽  
Low Cost ◽  
Fuzzy Variable ◽  
Fuzzy Uncertainty ◽  
Aircraft Wings ◽  
Wing Flutter ◽  
Flutter Speed ◽  
Wing Model ◽  
Safe Region ◽  
Air Speed

ABSTRACTIn the present study, fuzzy uncertainty and reliability analysis of aeroelastic aircraft wings are investigated. The uncertain air speed and structural parameters are represented by fuzzy triangular membership functions. These uncertainties are propagated through the wing model using a fuzzy interval approach, and the uncertain flutter speed is obtained as a fuzzy variable. Further, the reliability of the wing flutter is based on the interference area in the pyramid shape defined by the fuzzy flutter speed and air speed. The ratio between the safe region volume and the total volume of the pyramid gives the reliability value. Two different examples are considered—a typical wing section, and a clean wing—and the results are given for various wind speed conditions. The results show that the approach considered is a low-cost but suitable method to estimate the reliability of the wing flutter speed in the presence of uncertainties.

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