scholarly journals Investigation on Key Parameters in the Fabrication of Stamps for Transfer Printing of Micro Devices

2020 ◽  
Vol 10 (13) ◽  
pp. 4604
Author(s):  
Changwen Su ◽  
Yue Lin ◽  
Tien-Mo Shih ◽  
Hao Lu ◽  
Yang Gao ◽  
...  

For the past few years, the transfer printing method has been developed and has secured numerous advantages. Here, via both experiments and analyses, we have focused on identifying key parameters and optimizing their values in the fabrication process of stamps for transfer-printing micro-devices. Specifically, the elastic modulus of posts is measured using the atomic force microscope and the Derjaguin, Muller, and Toporov model. Based on mold morphologies data, we subsequently explore the law of photoresist development under different design widths as well as development time, establish mathematical models, and offer relevant explanations for the formation of various developmental topographies. Furthermore, the relationship between the elastic modulus and these stamp-fabrication parameters has also been analyzed and confirmed. Hopefully, the proposed work can provide the guidance for fabricating reliable stamps in the future.

2012 ◽  
Vol 57 (15) ◽  
pp. 1868-1872 ◽  
Author(s):  
Miao Yu ◽  
JingHe Wang ◽  
HongXiang Wang ◽  
Li Liu ◽  
YongDa Yan ◽  
...  

2011 ◽  
Vol 88-89 ◽  
pp. 34-37
Author(s):  
Kuai Ji Cai

The relationship of the friction coefficient and the MTC were discussed, and the MTC and its effects on surface roughness were a theoretical analysised and experimental verification by AFM (atomic force microscope). The results show that the theoretical MTC tends to be minimal value then before the adhering effect to reach remarkable. Appropriate adjustments cutting parameters, the cutting process can always micro-cutting phase to reach the steady-thin chip, and no plowing phenomenon. So the surface residues highly were reduced and higher surface quality was achieved.


2001 ◽  
Vol 74 (3) ◽  
pp. 428-450 ◽  
Author(s):  
Kenneth T. Gillen ◽  
Edward R. Terrill ◽  
Robb M. Winter

Abstract Modulus measurements are among the most useful properties available for monitoring the cure and aging of rubbers. Historically, such measurements were done on macroscopic samples, but over the past 15 years, several penetration techniques have been and are being developed that allow quantitative estimates of modulus to be made with lateral resolutions of 100 μm or better. This review summarizes these developments and the types of unique information that can be generated on rubbery materials. A large part of the review focuses on the types of results available from a modulus profiling apparatus that has been used to study rubbers for the past 15 years. This instrument allows estimates to be made of the inverse tensile compliance (closely related to Young's tensile modulus) with a lateral resolution of around 50 to 100 μm. Several recently developed alternative methods for achieving similar spatial resolution are also described. Finally, a brief review is given of the recent attempts to measure quantitative modulus values for rubbers with even better resolution using instruments historically focused on metals and other hard materials such as nano-indenters, the atomic force microscope and the interfacial force microscope.


2014 ◽  
Vol 891-892 ◽  
pp. 606-611 ◽  
Author(s):  
Daiki Shiozawa ◽  
Ken Inaba ◽  
Atsushi Akai ◽  
Takahide Sakagami

In recent years, fatigue limit estimation based on dissipated energy has been introduced in various industries because of its time and cost effectiveness. However, the mechanism of energy dissipation and the relationship between energy dissipation and fatigue damage have not been investigated well. In this study, mechanism of energy dissipation is investigated in relation with formulation of slip bands for JIS type 316L stainless steel through observation of slip bands by optical microscope and atomic force microscope.


1992 ◽  
Vol 7 (3) ◽  
pp. 613-617 ◽  
Author(s):  
G.M. Pharr ◽  
W.C. Oliver ◽  
F.R. Brotzen

Results of Sneddon's analysis for the elastic contact between a rigid, axisymmetric punch and an elastic half space are used to show that a simple relationship exists among the contact stiffness, the contact area, and the elastic modulus that is not dependent on the geometry of the punch. The generality of the relationship has important implications for the measurement of mechanical properties using load and depth sensing indentation techniques and in the measurement of small contact areas such as those encountered in atomic force microscopy.


2013 ◽  
Vol 13 (04) ◽  
pp. 1350057 ◽  
Author(s):  
CHENG-TAO CHANG ◽  
CHOU-CHING K. LIN ◽  
MING-SHAUNG JU

Atomic force microscopy (AFM) has been widely applied to study cellular functions;however, the relationship between cellular elasticity and ultrastructure density of a live cell remains to be discovered. The objective of this study was thus to extend our previous method of integrating AFM and immunofluorescence imaging to measure the ultrastructure distribution-related local mechanical properties of live cells. First, the morphology of a live cell was obtained by AFM. Second, the indentation sites were selected and flexible force volume indentation was performed. Third, the immunofluorescence image of the cell was obtained. The last was the mapping of the indentation site to the immunofluorescence image and obtaining the relationship between the local elastic properties and cytoskeleton density. The results on differentiated rat Schwann cells (RSCs) showed that the elastic modulus of stress fibers is higher than those of the nucleus and cytosol. The local elastic modulus of the live RSCs is correlated to the actin density, and the stress fiber that behaves like a pretension beam can give RSCs enough strength to envelop axons during myelination. In particular, the elastic properties of the live RSCs were twofold lower than those of the fixed. The results demonstrated the integrated method's applicability for a live cell.


2011 ◽  
Vol 6 (4) ◽  
Author(s):  
Wei Huang ◽  
Andrew J. Dick

In this paper, a study of the characteristics of period-doubling bifurcations in the dynamic behavior of an atomic force microscope probe for off-resonance excitation is presented. Using a three-mode approximation and excitation at two-and-a-half times the fundamental frequency, the relationship between the characteristics of the period-doubling bifurcation and the material properties is studied by using numerical simulations. Simulations are first used to successfully reproduce nonlinear response data collected experimentally by using a commercial atomic force microscope system and then to conduct a parametric study in order to examine the influence of variations in other system parameters on the relationship. These parameters are the excitation magnitude, the damping level, the cantilever stiffness, and the characteristics of the force model. Based upon the results of the parametric study, a new operation mode for obtaining localized material properties through an efficient scanning process is proposed. A preliminary scan simulation demonstrates the successful implementation of the relationship and its potential for providing localized material property information with nanoscale resolution.


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