scholarly journals State Space System Identification of 3-Degree-of-Freedom (DOF) Piezo-Actuator-Driven Stages with Unknown Configuration

Actuators ◽  
2013 ◽  
Vol 2 (1) ◽  
pp. 1-18 ◽  
Author(s):  
Yu Cao ◽  
Xiongbiao Chen
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