scholarly journals One-Dimensional Multi-Channel Photonic Crystal Resonators Based on Silicon-On-Insulator With High Quality Factor

2018 ◽  
Vol 6 ◽  
Author(s):  
Joaquin Faneca ◽  
Tatiana S. Perova ◽  
Vladimir Tolmachev ◽  
Anna Baldycheva
2014 ◽  
Vol 22 (3) ◽  
pp. 3724 ◽  
Author(s):  
Jeongwon Lee ◽  
Bo Zhen ◽  
Song-Liang Chua ◽  
Ofer Shapira ◽  
Marin Soljačić

Author(s):  
Mary Gopanchuk ◽  
Mohamed Arabi ◽  
N. Nelson-Fitzpatrick ◽  
Majed S. Al-Ghamdi ◽  
Eihab Abdel-Rahman ◽  
...  

This paper reports on the design, fabrication, and characterization of non-interdigitated comb drive actuators in Silicon-on-Insulator (SOI) wafers, using a single mask surface microma-chining process. The response of the actuator is analyzed numerically and experimentally. The results show at the fundamental frequency; it behaves as a longitudinal comb drive actuator. At a higher frequency, it exhibits a high-quality factor which is appropriate for sensor applications.


2017 ◽  
Vol 56 (9) ◽  
pp. 090304 ◽  
Author(s):  
Masahiro Nakadai ◽  
Ryotaro Konoike ◽  
Yoshinori Tanaka ◽  
Takashi Asano ◽  
Susumu Noda

2012 ◽  
Vol 21 (3) ◽  
pp. 034215
Author(s):  
Nai-Di Cui ◽  
Jing-Qiu Liang ◽  
Zhong-Zhu Liang ◽  
Wei-Biao Wang

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