scholarly journals DEVELOPMENT OF A NEW STRUCTURE OF 3-DOF PIEZORESISTIVE ACCELEROMETER TO ENHANCE THE SENSITIVITY

2010 ◽  
Vol 13 (2) ◽  
pp. 57-65
Author(s):  
Tan Duc Tran
Keyword(s):  
Mechanical System ◽  
Degrees Of Freedom ◽  
Micro Electro Mechanical System ◽  
Ansys Software ◽  
Mems Sensors ◽  
Mems Technology ◽  
Mems Device ◽  
Three Degrees Of Freedom

Nowadays, the Micro Electro Mechanical System (MEMS) technology’ has been achieved great developments. Accelerometer is one kind of the most popular MEMS sensors due to it's widely applications. In order to fabricate any MEMS device, the design and simulation have been considered seriously. This paper presents a new design of the three degrees of freedom piezoresistive accelerometer to improve the sensitivity, urgent demand from the reality. The ANSYS software was utilized to design, simulate and evaluate the advantages of this new structure compared to other sensors fabricated previously.

Agile micromirrors with three degrees of freedom manufactured with liquid MEMS technology

2002 ◽  
Author(s):  
Alan D. Feinerman ◽  
Gary Friedman ◽  
Elina Kasman ◽  
Jonathan Montgomery ◽  
Pancham R. Patel ◽  
...  
Keyword(s):  
Degrees Of Freedom ◽  
Mems Technology ◽  
Three Degrees Of Freedom

Analysis and Design of A New Micro Jerk Sensor with Viscous Coupling

2003 ◽  
Vol 15 (6) ◽  
pp. 582-587 ◽  
Author(s):  
Motohiro Fujiyoshi ◽  
◽  
Yutaka Nonomura ◽  
Fumihito Arai ◽  
Toshio Fukuda ◽  
...  
Keyword(s):  
Mechanical System ◽  
Degrees Of Freedom ◽  
Micro Electro Mechanical System ◽  
New Method ◽  
Mass Ratio ◽  
Viscous Coupling ◽  
Position Change ◽  
Analysis And Design ◽  
Simulation Results ◽  
Spring Coefficient

A new method for jerk detection (derivative of acceleration) is proposed. By using a 2 degrees of freedom (DOF) model with viscous coupling, we measure jerk directly as a position change in mass without differential circuit. Analysis by numerical formulas show the principle of the proposed jerk detection and simulation results show suitable parameters such as viscosity, mass ratio, and spring coefficient ratio for jerk detection. We also propose a micro jerk sensor based on the micro electro mechanical system (MEMS). Results of analysis show that the microstructure is suitable for the proposed viscous coupling.

scholarly journals Testing of a MEMS Dynamic Inclinometer Using the Stewart Platform

Sensors ◽  
2019 ◽  
Vol 19 (19) ◽  
pp. 4233 ◽  
Author(s):  
Zhihua Liu ◽  
Chenguang Cai ◽  
Ming Yang ◽  
Ying Zhang
Keyword(s):  
Mechanical System ◽  
Real Time ◽  
Degrees Of Freedom ◽  
Cross Coupling ◽  
Micro Electro Mechanical System ◽  
Stewart Platform ◽  
Forward Kinematics ◽  
Six Degrees Of Freedom ◽  
Position And Orientation ◽  
The Cross

The micro-electro-mechanical system (MEMS) dynamic inclinometer integrates a tri-axis gyroscope and a tri-axis accelerometer for real-time tilt measurement. The Stewart platform has the ability to generate six degrees of freedom of spatial orbits. The method of applying spatial orbits to the testing of MEMS inclinometers is investigated. Inverse and forward kinematics are analyzed for controlling and measuring the position and orientation of the Stewart platform. The Stewart platform is controlled to generate a conical motion, based on which the sensitivities of the gyroscope, accelerometer, and tilt sensing are determined. Spatial positional orbits are also generated in order to obtain the tilt angles caused by the cross-coupling influence. The experiment is conducted to show that the tested amplitude frequency deviations of the gyroscope and tilt sensing sensitivities between the Stewart platform and the traditional rotator are less than 0.2 dB and 0.1 dB, respectively.

Giant magnetoimpedance based immunoassay for cardiac biomarker myoglobin

2017 ◽  
Vol 9 (24) ◽  
pp. 3636-3642 ◽  
Author(s):  
Zhen Yang ◽  
Huanhuan Wang ◽  
Xinwei Dong ◽  
Hailong Yan ◽  
Chong Lei ◽  
...  
Keyword(s):  
Mechanical System ◽  
Micro Electro Mechanical System ◽  
Giant Magnetoimpedance ◽  
Cardiac Biomarker ◽  
Mems Technology

A GMI sensor integrated with a microcavity was fabricated by micro-electro-mechanical-system (MEMS) technology.

Analysis of a Nonlinear Mechanical System With Three Degrees of Freedom

1959 ◽  
Vol 26 (4) ◽  
pp. 546-548
Author(s):  
S. A. Hovanessian
Keyword(s):  
Steady State ◽  
Mechanical System ◽  
Degrees Of Freedom ◽  
Amplitude Equations ◽  
Response Curves ◽  
Nonlinear Mechanical ◽  
Nonlinear Mechanical System ◽  
Nonlinear Mechanical Systems ◽  
Steady State Amplitude ◽  
Three Degrees Of Freedom

Abstract In recent years the methods of solution of nonlinear vibratory systems with one degree of freedom have been extended to the solution of nonlinear systems with two degrees of freedom. For these systems, the steady-state amplitude equations can be obtained by several methods, such as perturbation and the iteration method introduced by Duffing. In this paper the amplitude-frequency equations for a nonlinear mechanical system with three degrees of freedom are obtained, using Duffing’s method for obtaining the steady-state amplitude equations [1]. The steady-state response curves of two nonlinear mechanical systems, each having three degrees of freedom, are given.

Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology

2011 ◽  
Vol 291-294 ◽  
pp. 3135-3138 ◽  
Author(s):  
Peng Cheng Chi ◽  
Wei Ping Zhang ◽  
Wen Yuan Chen ◽  
Hong Yi Li ◽  
Kun Meng
Keyword(s):  
Titanium Alloy ◽  
Mechanical System ◽  
Research Priorities ◽  
Micro Electro Mechanical System ◽  
Flapping Wing ◽  
Future Research ◽  
Parylene C ◽  
Insect Wings ◽  
Mems Technology ◽  
Materials Used

This paper presents a feasibility step in the development of biomimetic microrobotic insects. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. A flapping-wing flying MEMS concept and design inspired from insects is first described. Then different kinds of materials used feasibly for flapping-wing microrobotic insect by MEMS technology, such as SU-8, Titanium alloy and Parylene-C, are discussed. And artificial insect wings and thoraxs with different materials by MEMS Technology are fabricated and analyzed. Finally, summarize the paper and propose future research priorities.

scholarly journals Wireless Sensor Based Monitoring System for Forest Tree Poaching and Fire Using Iot

2018 ◽  
Vol 7 (3.27) ◽  
pp. 186
Author(s):  
C Arulstephen ◽  
R K. Raghulsharma ◽  
B Ebenezer Abishek ◽  
P Satish Kumar
Keyword(s):  
Mechanical System ◽  
Monitoring System ◽  
Forest Tree ◽  
Micro Electro Mechanical System ◽  
Vibration Sensor ◽  
Wireless Sensor ◽  
Forest Resource ◽  
Mems Accelerometer ◽  
Alert Message ◽  
Mems Technology

Forest tree poaching is a serious threat to forest resource and has an impact on the environment hence preservation of trees is a  must for mankind .This paper mainly aims at monitoring the trees using Micro –Electro mechanical system(MEMS) technology and employing vibration sensor , sound sensor, fire sensor. The vibration produced while cutting of trees using MEMS accelerometer is sent through Zigbee to the main server and the location is detected using GPS likewise if fire is detected the information is sent through IoT and it can be viewed by forest ranger hence alert message is sent to detect and avoid poaching of trees and fire in forest. 

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