Agile micromirrors with three degrees of freedom manufactured with liquid MEMS technology
2010 ◽
Vol 13
(2)
◽
pp. 57-65
2018 ◽
Vol 1
◽
pp. 133-142
◽
Keyword(s):
2007 ◽
Vol 63
(1)
◽
pp. 111-117
◽