CMOS/BICMOS SELF-ASSEMBLING AND ELECTROTHERMAL MICROACTUATORS FOR TUNABLE CAPACITORS, GAP-CLOSING STRUCTURES AND LATCH MECHANISMS
1985 ◽
Vol 43
◽
pp. 522-523
Keyword(s):
2005 ◽
Vol 60
(9)
◽
pp. 1041-1042
◽
Keyword(s):
Keyword(s):