A Barometric Pressure Sensor with Integrated Reference Pressure Control using Localized CVD
Keyword(s):
2011 ◽
Vol 10
(1)
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pp. 013018
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2019 ◽
Vol 26
(3)
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pp. 901-912
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2013 ◽
Vol 17
(2)
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pp. 420-426
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Keyword(s):
2020 ◽
Vol 92
(12)
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pp. 1407-1420
Keyword(s):
2006 ◽
Vol 2006
(0)
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pp. _1A1-C09_1-_1A1-C09_2