Complementary metal-oxide semiconductor compatible capacitive barometric pressure sensor
2011 ◽
Vol 10
(1)
◽
pp. 013018
◽
2007 ◽
Vol 46
(2)
◽
pp. 843-848
◽
1992 ◽
Vol 63
(3)
◽
pp. 2026-2029
◽
2002 ◽
Vol 41
(Part 2, No. 8B)
◽
pp. L919-L921
◽
2011 ◽
pp. n/a-n/a
◽
1998 ◽
Vol 37
(Part 1, No. 3B)
◽
pp. 1050-1053
◽