Multi-Degree of Freedom Dynamic Characterization of Deep-Etched Silicon Suspensions
1985 ◽
Vol 111
(1)
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pp. 1-19
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2001 ◽
Vol 215
(2)
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pp. 63-78
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Keyword(s):
2001 ◽
Vol 96
(1)
◽
pp. 151-159
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Keyword(s):