Preparation of Switchable Mirror Thin Film using Magnetron Sputtering

Kazuki YOSHIMURA

doi:10.3131/jvsj2.57.84

Preparation of Switchable Mirror Thin Film using Magnetron Sputtering

Journal of the Vacuum Society of Japan ◽

10.3131/jvsj2.57.84 ◽

2014 ◽

Vol 57 (3) ◽

pp. 84-90

Author(s):

Kazuki YOSHIMURA

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Switchable Mirror

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Fabrication of solid electrolyte Ta2O5 thin film by reactive dc magnetron sputtering suitable for electrochromic all-solid-state switchable mirror glass

Journal of the Ceramic Society of Japan ◽

10.2109/jcersj2.119.76 ◽

2011 ◽

Vol 119 (1385) ◽

pp. 76-80 ◽

Cited By ~ 6

Author(s):

Kazuki TAJIMA ◽

Hiromi HOTTA ◽

Yasusei YAMADA ◽

Masahisa OKADA ◽

Kazuki YOSHIMURA

Keyword(s):

Thin Film ◽

Solid State ◽

Magnetron Sputtering ◽

Solid Electrolyte ◽

Dc Magnetron Sputtering ◽

Switchable Mirror

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Electrochromic switchable mirror foil with tantalum oxide thin film prepared by reactive DC magnetron sputtering in hydrogen-containing gas

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2011.02.035 ◽

2011 ◽

Vol 205 (15) ◽

pp. 3956-3960 ◽

Cited By ~ 7

Author(s):

Kazuki Tajima ◽

Hiromi Hotta ◽

Yasusei Yamada ◽

Masahisa Okada ◽

Kazuki Yoshimura

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Tantalum Oxide ◽

Oxide Thin Film ◽

Dc Magnetron Sputtering ◽

Switchable Mirror

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Proton conductive tantalum oxide thin film deposited by reactive DC magnetron sputtering for all-solid-state switchable mirror

Journal of Physics Conference Series ◽

10.1088/1742-6596/100/8/082017 ◽

2008 ◽

Vol 100 (8) ◽

pp. 082017 ◽

Cited By ~ 6

Author(s):

K Tajima ◽

Y Yamada ◽

S Bao ◽

M Okada ◽

K Yoshimura

Keyword(s):

Thin Film ◽

Solid State ◽

Magnetron Sputtering ◽

Tantalum Oxide ◽

Oxide Thin Film ◽

Dc Magnetron Sputtering ◽

Switchable Mirror

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Effective Density of Tantalum Oxide Thin Film by Reactive DC Magnetron Sputtering for All-Solid-State Switchable Mirror

Journal of The Electrochemical Society ◽

10.1149/1.2750445 ◽

2007 ◽

Vol 154 (9) ◽

pp. J267 ◽

Cited By ~ 17

Author(s):

Kazuki Tajima ◽

Yasusei Yamada ◽

Kazuki Yoshimura

Keyword(s):

Thin Film ◽

Solid State ◽

Magnetron Sputtering ◽

Tantalum Oxide ◽

Oxide Thin Film ◽

Effective Density ◽

Dc Magnetron Sputtering ◽

Switchable Mirror

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Solid electrolyte of tantalum oxide thin film deposited by reactive DC and RF magnetron sputtering for all-solid-state switchable mirror glass

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2007.01.022 ◽

2008 ◽

Vol 92 (2) ◽

pp. 120-125 ◽

Cited By ~ 20

Author(s):

Kazuki Tajima ◽

Yasusei Yamada ◽

Shanhu Bao ◽

Masahisa Okada ◽

Kazuki Yoshimura

Keyword(s):

Thin Film ◽

Solid State ◽

Magnetron Sputtering ◽

Solid Electrolyte ◽

Tantalum Oxide ◽

Rf Magnetron Sputtering ◽

Oxide Thin Film ◽

Switchable Mirror

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Deposition Behavior of Boron Carbide Thin Film Deposited by Unbalanced Magnetron Sputtering Method

Korean Journal of Metals and Materials ◽

10.3365/kjmm.2014.52.12.969 ◽

2014 ◽

Vol 52 (12) ◽

pp. 969-974

Author(s):

Young Joon Baik ◽

Kyung Eun Bae ◽

Jong Keuk Park ◽

Wook Seong Lee

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Boron Carbide ◽

Deposition Behavior ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Formation and Study of Thin-Film Structures Based on Copper Oxide and Zinc Oxide, Obtained by a Reaction Magnetron Sputtering Technique for Applying in Solar Power Engineering

Vestnik of Volga State University of Technology Ser Radio Engineering and Infocommunication Systems ◽

10.15350/2306-2819.2017.3.69 ◽

2017 ◽

Vol 3 (35) ◽

Author(s):

Dmitry Shashin ◽

Sergey Stepanov ◽

Nikolay Sushentsov

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Copper Oxide ◽

Solar Power ◽

Power Engineering ◽

Solar Power Engineering

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Mô hình hoá và mô phỏng quá trình tạo màng Al2O3 bằng phún xạ Magnetron = Modeling and simulation of the magnetron sputtering process for Al2O3 thin film coating.

Science and Technology Development Journal ◽

10.3125/jstd.v10i3.425 ◽

2007 ◽

Vol 10 (3) ◽

Author(s):

Phúc Giang Văn ◽

Tuấn Hùng Vũ Lê ◽

Đạt Thành Huỳnh ◽

Đến Văn Nguyễn

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Modeling And Simulation ◽

Film Coating ◽

Thin Film Coating ◽

Al2o3 Thin Film

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Nickel telluride vertically aligned thin film by radio-frequency magnetron sputtering for hydrogen evolution reaction

APL Materials ◽

10.1063/5.0024588 ◽

2020 ◽

Vol 8 (12) ◽

pp. 121104

Author(s):

Jeonghyeon Oh ◽

Ho Jun Park ◽

Arindam Bala ◽

Hee-Soo Kim ◽

Na Liu ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Hydrogen Evolution ◽

Hydrogen Evolution Reaction ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Vertically Aligned

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Effect of Al2O3-doping on the structure and optoelectronic characteristics of MgZnO thin film prepared by RF magnetron sputtering

Applied Physics A ◽

10.1007/s00339-021-04723-2 ◽

2021 ◽

Vol 127 (7) ◽

Author(s):

Du-Cheng Tsai ◽

Feng-Kuan Chen ◽

Zue-Chin Chang ◽

Bing-Hau Kuo ◽

Erh-Chiang Chen ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Al2o3 Doping

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