scholarly journals Fabrication of solid electrolyte Ta2O5 thin film by reactive dc magnetron sputtering suitable for electrochromic all-solid-state switchable mirror glass

2011 ◽  
Vol 119 (1385) ◽  
pp. 76-80 ◽  
Author(s):  
Kazuki TAJIMA ◽  
Hiromi HOTTA ◽  
Yasusei YAMADA ◽  
Masahisa OKADA ◽  
Kazuki YOSHIMURA
Keyword(s):  
Thin Film ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Solid Electrolyte ◽  
Dc Magnetron Sputtering ◽  
Switchable Mirror

A 3D All-Solid-State Thin Film Microbattery with Inverted Pyramid Arrays

2015 ◽  
Vol 645-646 ◽  
pp. 1170-1174
Author(s):  
Jie Lin ◽  
Jian Lai Guo ◽  
Chang Liu ◽  
Hang Guo
Keyword(s):  
Thin Film ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Solid Electrolyte ◽  
Lithium Ion ◽  
Effective Area ◽  
Electrochemical Measurements ◽  
Excellent Performance ◽  
Inverted Pyramid ◽  
Microfabrication Technology

A 3D all-solid-state thin film lithium-ion microbattery (TFLM) with inverted pyramid arrays is fabricated by microfabrication technology. Compared with 2D TFLMs, the effective area of this 3D TFLM increases more than 30%. The 3D TFLM prepared by magnetron sputtering is composed of LiCoO2 cathode, LiPON solid electrolyte, and copper doped SnOx anode. The 3D TFLM is tested by electrochemical measurements, and the results show that it has reliable capacity and excellent performance.

Aluminum buffer layer for high durability of all-solid-state switchable mirror based on magnesium-nickel thin film

2007 ◽  
Vol 91 (5) ◽  
pp. 051908 ◽  
Author(s):  
Kazuki Tajima ◽  
Yasusei Yamada ◽  
Shanhu Bao ◽  
Masahisa Okada ◽  
Kazuki Yoshimura
Keyword(s):  
Thin Film ◽  
Solid State ◽  
Buffer Layer ◽  
High Durability ◽  
Switchable Mirror

Reactive DC sputter-deposited tantalum oxide thin film for all-solid-state switchable mirror

Vacuum ◽  
2008 ◽  
Vol 83 (3) ◽  
pp. 602-605 ◽  
Author(s):  
Kazuki Tajima ◽  
Yasusei Yamada ◽  
Shanhu Bao ◽  
Masahisa Okada ◽  
Kazuki Yoshimura
Keyword(s):  
Thin Film ◽  
Solid State ◽  
Tantalum Oxide ◽  
Oxide Thin Film ◽  
Switchable Mirror ◽  
Sputter Deposited

Deposition and Characterization of Aluminium Thin film Coatings using DC Magnetron Sputtering Process

2018 ◽  
Vol 5 (1) ◽  
pp. 2696-2704 ◽  
Author(s):  
M. Muralidhar Singh ◽  
G. Vijaya ◽  
M.S. Krupashankara ◽  
B.K. Sridhara ◽  
T.N. Shridhar
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Film Coatings ◽  
Thin Film Coatings

PROPERTIES OF ALL-SOLID-STATE LITHIUM-ION RECHARGEABLE BATTERIES DEPOSITED BY RF MAGNETRON SPUTTERING

2013 ◽  
Vol 27 (22) ◽  
pp. 1350156 ◽  
Author(s):  
R. J. ZHU ◽  
Y. REN ◽  
L. Q. GENG ◽  
T. CHEN ◽  
L. X. LI ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Coulombic Efficiency ◽  
Electronic Conductivity ◽  
Lithium Ion ◽  
Rf Magnetron Sputtering ◽  
Rechargeable Batteries ◽  
Voltage Range

Amorphous V 2 O 5, LiPON and Li 2 Mn 2 O 4 thin films were fabricated by RF magnetron sputtering methods and the morphology of thin films were characterized by scanning electron microscopy. Then with these three materials deposited as the anode, solid electrolyte, cathode, and vanadium as current collector, a rocking-chair type of all-solid-state thin-film-type Lithium-ion rechargeable battery was prepared by using the same sputtering parameters on stainless steel substrates. Electrochemical studies show that the thin film battery has a good charge–discharge characteristic in the voltage range of 0.3–3.5 V, and after 30 cycles the cell performance turned to become stabilized with the charge capacity of 9 μAh/cm2, and capacity loss of single-cycle of about 0.2%. At the same time, due to electronic conductivity of the electrolyte film, self-discharge may exist, resulting in approximately 96.6% Coulombic efficiency.

Effects of sputtering power toward the Al-doped ZnO thin Film prepared by pulsed DC magnetron sputtering

2017 ◽  
Vol 4 (5) ◽  
pp. 6466-6471 ◽  
Author(s):  
Kittikhun Seawsakul ◽  
Mati Horprathum ◽  
Pitak Eiamchai ◽  
Viyapol Pattantsetakul ◽  
Saksorn Limwichean ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Zno Thin Film ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Sputtering Power ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering
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