scholarly journals Performance of an Ultra-High Vacuum System Employing Sorption Pump and Getter-Ion Pump

Shinku ◽  
1963 ◽  
Vol 6 (3) ◽  
pp. 89-95
Author(s):  
Zenjiro ODA ◽  
Tatsuo ASAMAKI
Keyword(s):  
High Vacuum ◽  
Ultra High Vacuum ◽  
Vacuum System ◽  
Ion Pump

In-Process Diagnostic System for Semiconductor Materials Using UHV Wafer Transfer Chamber

1993 ◽  
Vol 324 ◽  
Author(s):  
F. Uchida ◽  
M. Matsui ◽  
H. Kakibayashi ◽  
M. Kouguchi ◽  
A. Mutoh ◽  
...  
Keyword(s):  
High Vacuum ◽  
Diagnostic System ◽  
Chemical Vapor ◽  
Ultra High Vacuum ◽  
Vacuum System ◽  
Wafer Surface ◽  
Measuring Instruments ◽  
Ion Pump ◽  
Semiconductor Wafer ◽  
Chemical Conditions

AbstractWe have developed a novel stand-alone diagnostic system that can analyze a semiconductor wafer surface in each process without introducing contamination. This allows us to analyze the relationship between chemical conditions and device properties.A UHV (Ultra High Vacuum) wafer transfer chamber is used between the measuring apparatus and the semiconductor processes. The chamber vacuum system, which consists of a battery driven ion pump and a liquid N2 shroud, achieves a pressure of 2 × 10−8 Pa (corresponding to about 100 min. until one monolayer of contamination has been adsorbed).Wafer transfer lines have been constructed between semiconductor vacuum processes, CVD (Chemical Vapor Deposition) and measuring instruments, ESCA (Electron Spectroscopy for Chemical Analysis) and TEM (Transmission Electron Microscope). Our results from ESCA and TEM showed measurements that carbon contamination and oxidation was suppressed.

The design and study of a compact bakeable ultra-high vacuum system for calibrating absolutely low pressure gauges

Vacuum ◽  
1977 ◽  
Vol 27 (9) ◽  
pp. 511-517 ◽  
Author(s):  
K.J. Close ◽  
R.S. Vaughan-Watkins ◽  
J Yarwood
Keyword(s):  
High Vacuum ◽  
Low Pressure ◽  
Ultra High Vacuum ◽  
Vacuum System

scholarly journals Why Pressure Scales Cause So Much Confusion

1993 ◽  
Vol 1 (8) ◽  
pp. 5-6
Author(s):  
Anthony D. Buonaquisti
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Ambient Pressure ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Vacuum System ◽  
Scanning Auger Microprobe ◽  
The Mean ◽  
Scanning Electron

Pressure scales can be extremely confusing to new operators. This is not surprising. To my mind, there are three primary areas of confusion.Firstly, the pressure of gas inside an instrument changes over many orders of magnitude during pumpdown. The change is about 9 orders of magnitude for a traditional Scanning Electron Microscope and about 13 orders of magnitude for an ultra-high vacuum instrument such as a Scanning Auger Microprobe.To give an idea about the scale of change involved in vacuum, consider that the change in going from ambient pressure to that inside a typical ultra high vacuum system is like comparing one meter with the mean radius of the planet Pluto's orbit. The fact is that we don't often get to play with things on that scale. As a consequence, many of us have to keep reminding ourselves that 1 X 10-3 is one thousand times the value of 1 X 10-6 - not twice the value.

scholarly journals Optical contamination control in the Advanced LIGO ultra-high vacuum system

2013 ◽  
Author(s):  
Margot H. Phelps ◽  
Kaitlin E. Gushwa ◽  
Calum I. Torrie
Keyword(s):  
High Vacuum ◽  
Ultra High Vacuum ◽  
Vacuum System ◽  
Contamination Control

Development of an ultra-high vacuum system for space application

Vacuum ◽  
2004 ◽  
Vol 73 (2) ◽  
pp. 243-248 ◽  
Author(s):  
F. Grangeon ◽  
C. Monnin ◽  
M. Mangeard ◽  
D. Paulin
Keyword(s):  
High Vacuum ◽  
Ultra High Vacuum ◽  
Vacuum System ◽  
Space Application

scholarly journals Enhanced Ionic Conduction at the Film/Substrate Interface in LiI Thin Films Grown on Sapphire(0001)

1993 ◽  
Vol 318 ◽  
Author(s):  
D. Lubben ◽  
F. A. Modine
Keyword(s):  
Thin Films ◽  
Film Thickness ◽  
Ionic Conduction ◽  
High Vacuum ◽  
Dislocation Motion ◽  
Ultra High Vacuum ◽  
Vacuum System ◽  
Substrate Interface ◽  
Interdigital Electrodes ◽  
Film Substrate

ABSTRACTThe ionic conductivity of LiI thin films grown on sapphire(0001) substrates has been studied in situ during deposition as a function of film thickness and deposition conditions. LiI films were produced at room temperature by sublimation in an ultra-high-vacuum system. The conductivity of the Lil parallel to the film/substrate interface was determined from frequency-dependent impedance measurements as a function of film thickness using Au interdigital electrodes deposited on the sapphire surface. The measurements show a conduction of ∼5 times the bulk value at the interface which gradually decreases as the film thickness is increased beyond 100 nm. This interfacial enhancement is not stable but anneals out with a characteristic log of time dependence. Fully annealed films have an activation energy for conduction (σT) of ∼0.47 ± .03 eV, consistent with bulk measurements. The observed annealing behavior can be fit with a model based on dislocation motion which implies that the increase in conduction near the interface is not due to the formation of a space-charge layer as previously reported but to defects generated during the growth process. This explanation is consistent with the behavior exhibited by CaF2 films grown under similar conditions.

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