Silicon Single Crystal Wafer Holder with a Cold Trap and a Direct Current Heating Mechanism Mounted on a Conflat Flange with an Outer Diameter of 70 mm
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2008 ◽
Vol 51
(1)
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pp. 44-47
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1974 ◽
Vol 13
(12)
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pp. 1944-1954
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2003 ◽
Vol 103
(1)
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pp. 49-56
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1995 ◽
Vol 53
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pp. 466-467
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