Low‐energy ion beam system for materials studies

1982 ◽  
Vol 53 (5) ◽  
pp. 610-614
Author(s):  
G. C. Nelson ◽  
J. A. Borders ◽  
M. C. Oborny
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Beam System

scholarly journals Measurement of Au Sputtering Yields by Neon with Low-Energy Mass Analyzed Ion Beam System

Shinku ◽  
2007 ◽  
Vol 50 (3) ◽  
pp. 217-219 ◽  
Author(s):  
Kiyohiro HINE ◽  
Satoru YOSHIMURA ◽  
Masato KIUCHI ◽  
Satoshi HAMAGUCHI
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Beam System ◽  
Sputtering Yields

scholarly journals Fabrication of a Newly Developed Low-Energy Focused Ion Beam System and Its Application to the Maskless Selective Deposition on Microarea.

Shinku ◽  
1992 ◽  
Vol 35 (11) ◽  
pp. 899-904 ◽  
Author(s):  
Kangsa PAK ◽  
Tetsuya SHIMOMURA ◽  
Isao SAITOH ◽  
Hiroo YONEZU
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Selective Deposition ◽  
Beam System

scholarly journals Development of low energy ion beam system for space charge compensation experiments

2008 ◽  
Vol 79 (2) ◽  
pp. 02B712 ◽  
Author(s):  
Mitsuaki Takeuchi ◽  
Yasuhito Gotoh ◽  
Hiroshi Tsuji ◽  
Junzo Ishikawa ◽  
Shigeki Sakai
Keyword(s):  
Space Charge ◽  
Ion Beam ◽  
Charge Compensation ◽  
Low Energy ◽  
Beam System

Direct Ga deposition by low-energy focused ion-beam system

1997 ◽  
Vol 386 (1-3) ◽  
pp. 254-258 ◽  
Author(s):  
T. Chikyow ◽  
N. Koguchi ◽  
A. Shikanai
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Beam System

Low energy focused ion beam system design

2006 ◽  
Vol 24 (4) ◽  
pp. 1055-1066 ◽  
Author(s):  
Michael Rauscher ◽  
Erich Plies
Keyword(s):  
System Design ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Beam System

A low energy ion beam system for thermal evolution measurements of damage in ion bombarded single crystals

Vacuum ◽  
1984 ◽  
Vol 34 (1-2) ◽  
pp. 239-244 ◽  
Author(s):  
P Bailey ◽  
SE Donnelly ◽  
DC Ingram ◽  
DG Armour
Keyword(s):  
Single Crystals ◽  
Thermal Evolution ◽  
Ion Beam ◽  
Low Energy ◽  
Beam System

A 1 eV - 1000 eV ion beam system designed for the calibration of low-energy ion mass spectrometers

2020 ◽  
Author(s):  
Yiren Li ◽  
Bin Miao ◽  
Xinjun Hao ◽  
Tielong Zhang ◽  
Yuming Wang
Keyword(s):  
Imaging System ◽  
Ion Beam ◽  
Low Energy ◽  
Beam Diagnostics ◽  
Large Area ◽  
Mass Spectrometers ◽  
Faraday Cup ◽  
Beam System ◽  
Electrostatic Lenses ◽  
Positive Ion

<p>For the calibration of space plasma analyzers, in particular low-energy ion mass spectrometers, a low energy ion beam system was developed. The positive ion beam is produced by a hot-cathode penning source and modified by a series of electrostatic lenses. And a 75 mm diameter 2-D imaging system and a Faraday cup mounted on movable arms are used for ion beam diagnostics. With protons as primary species, the system provides an ion beam in the energy range of 1 eV - 1000 eV with a large area ( ~ 50 cm<sup>2</sup>), highly parallel ( ± 0.5°), and spatially uniform ( ± 5%).</p>

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