scholarly journals Large-Area Synthesis of Aligned Carbon Nanotubes by Surface-Wave-Excited Microwave-Plasma CVD

Shinku ◽  
2003 ◽  
Vol 46 (3) ◽  
pp. 249-252
Author(s):  
Hiroyuki HAYASHI ◽  
Mizuho KOGA ◽  
Jun KASHIRAJIMA ◽  
Kazumasa TAKAHASHI ◽  
Yasuaki HAYASHI ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Surface Wave ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Large Area ◽  
Aligned Carbon Nanotubes ◽  
Microwave Plasma Cvd

Diamond-like carbon thin films grown by large-area surface-wave mode microwave plasma CVD: Effects of stage distance to microwave window

2006 ◽  
Vol 15 (4-8) ◽  
pp. 913-916 ◽  
Author(s):  
Sudip Adhikari ◽  
Ashraf M.M. Omer ◽  
Sunil Adhikary ◽  
Mohamad Rusop ◽  
Hideo Uchida ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Microwave Plasma ◽  
Wave Mode ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd ◽  
Carbon Thin Films

scholarly journals Large area microwave plasma CVD of diamond using composite right/left-handed materials

2021 ◽  
Vol 116 ◽  
pp. 108394
Author(s):  
Justas Zalieckas ◽  
Paulius Pobedinskas ◽  
Martin Møller Greve ◽  
Kristoffer Eikehaug ◽  
Ken Haenen ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Plasma Cvd ◽  
Large Area ◽  
Left Handed ◽  
Microwave Plasma Cvd

Deposition of large area uniform diamond films by microwave plasma CVD

Vacuum ◽  
2018 ◽  
Vol 147 ◽  
pp. 134-142 ◽  
Author(s):  
J. Weng ◽  
F. Liu ◽  
L.W. Xiong ◽  
J.H. Wang ◽  
Q. Sun
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd

Fluorine incorporated amorphous carbon thin films prepared by Surface Wave Microwave Plasma CVD

2008 ◽  
Vol 17 (7-10) ◽  
pp. 1697-1701 ◽  
Author(s):  
Golap Kalita ◽  
Hare Ram Aryal ◽  
Sudip Adhikari ◽  
Dilip C. Ghimire ◽  
Rakesh A. Afre ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Amorphous Carbon ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Carbon Thin Films

Deposition of large-area, high-quality cubic boron nitride films by ECR-enhanced microwave-plasma CVD

2003 ◽  
Vol 76 (6) ◽  
pp. 953-955 ◽  
Author(s):  
W.J. Zhang ◽  
C.Y. Chan ◽  
K.M. Chan ◽  
I. Bello ◽  
Y. Lifshitz ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Microwave Plasma ◽  
Cubic Boron Nitride ◽  
Plasma Cvd ◽  
Large Area ◽  
High Quality ◽  
Microwave Plasma Cvd ◽  
Boron Nitride Films

Large area diamond nucleation on Si(001) using magnetoactive microwave plasma CVD

1997 ◽  
Vol 113-114 ◽  
pp. 244-248 ◽  
Author(s):  
Hyeongmin Jeon ◽  
Akimitsu Hatta ◽  
Hidetoshi Suzuki ◽  
Toshimichi Ito ◽  
Takatomo Sasaki ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Plasma Cvd ◽  
Large Area ◽  
Diamond Nucleation ◽  
Microwave Plasma Cvd
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