scholarly journals In-Situ Analysis of Perfluoro Compounds in Semiconductor Process Exhaust by Ion Attachment Mass Spectrometry (IAMS).

Shinku ◽  
2002 ◽  
Vol 45 (12) ◽  
pp. 846-853 ◽  
Author(s):  
Megumi NAKAMURA ◽  
Kenji HINO ◽  
Yoshiro SHIOKAWA ◽  
Toshihiro FUJII ◽  
Masao TAKAYANAGI ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
In Situ Analysis ◽  
Ion Attachment ◽  
Semiconductor Process

scholarly journals Touch spray mass spectrometry for in situ analysis of complex samples

The Analyst ◽  
2014 ◽  
Vol 139 (11) ◽  
pp. 2714-2720 ◽  
Author(s):  
Kevin S. Kerian ◽  
Alan K. Jarmusch ◽  
R. Graham Cooks
Keyword(s):  
Mass Spectrometry ◽  
In Situ Analysis ◽  
Complex Samples ◽  
Small Probe ◽  
Ionization Method

Touch spray, a spray-based ambient in situ ionization method, uses a small probe, e.g. a teasing needle to pick up sample and the application of voltage and solvent to cause field-induced droplet emission.

Application of Ion Attachment Mass Spectrometry to Evolved Gas Analysis for in Situ Monitoring of Porous Ceramic Processing

2006 ◽  
Vol 78 (7) ◽  
pp. 2366-2369 ◽  
Author(s):  
Takahisa Tsugoshi ◽  
Takaaki Nagaoka ◽  
Megumi Nakamura ◽  
Yoshiro Shiokawa ◽  
Koji Watari
Keyword(s):  
Mass Spectrometry ◽  
Evolved Gas Analysis ◽  
Porous Ceramic ◽  
Gas Analysis ◽  
In Situ Monitoring ◽  
Ceramic Processing ◽  
Evolved Gas ◽  
Ion Attachment
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